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    • 4. 发明申请
    • HIGH-INDEX UV OPITCAL MATERIALS FOR IMMERSION LITHOGRAPHY
    • 高指数紫外线光学材料
    • WO2008028051A1
    • 2008-03-06
    • PCT/US2007/077259
    • 2007-08-30
    • CRYSTAL PHOTONICS, INCORPORATEDJEN, ShenFEI, Yi-TingCHAI, Bruce
    • JEN, ShenFEI, Yi-TingCHAI, Bruce
    • C30B9/00C30B15/00C30B29/22G03F7/20
    • G03F7/70958C30B15/00C30B29/22G02B1/02G03F7/70341
    • This invention is related to material for use as an ultraviolet (UV) optical element and particularly for use as a 193 nm immersion lens element. The material for use as a UV optical element includes a Lithium Magnesium Aluminate (LMAO) body. The specific compound for this application is the disordered lithium magnesium spinel, having the general composition of Li x Mg 2(1-x) AI 4+x O 8 where x = 0 to 1 as the high-index UV transparent material for immersion lithography. The LMAO body may include a disordered spinel, such as, for example, a single crystal that may be cubic in symmetry, optically isotropic, and having cation disorder within the structure to reduce the intrinsic birefringence (IBR). The LMAO body has certain desired material properties and may be readily made in relatively large sizes suitable for use as the UV optical element for photolithography.
    • 本发明涉及用作紫外线(UV)光学元件并且特别用作193nm浸没透镜元件的材料。 用作UV光学元件的材料包括铝酸锂铝(LMAO)铝体。 用于该应用的具体化合物是无序的锂镁尖晶石,其具有一般组成为Li x2 Mg 2(1-x)3 Al + 4 + x < 其中x = 0至1作为用于浸渍光刻的高折射率UV透明材料。 LMAO体可以包括无序尖晶石,例如可以是对称的立方体,光学各向同性的并且在结构内具有阳离子障碍以降低固有双折射(IBR)的单晶。 LMAO体具有一定的期望的材料性质,并且可以容易地制成适合用作光刻的UV光学元件的相对大的尺寸。
    • 6. 发明申请
    • HIGH-INDEX UV OPTICAL MATERIALS FOR IMMERSION LITHOGRAPHY
    • 高分辨率UV光学材料
    • US20080055715A1
    • 2008-03-06
    • US11847128
    • 2007-08-29
    • Yi-Ting FeiShen JenBruce Chai
    • Yi-Ting FeiShen JenBruce Chai
    • G03B27/54G03F1/00
    • G03F7/70958C30B15/00C30B29/22G02B1/02G03F7/70341
    • This invention is related to material for use as an ultraviolet (UV) optical element and particularly for use as a 193 nm immersion lens element. The material for use as a UV optical element includes a Lithium Magnesium Aluminate (LMAO) body. The specific compound for this application is the disordered lithium magnesium spinel, having the general composition of LixMg2(1-x)Al4+xO8 where x=0 to 1 as the high-index UV transparent material for immersion lithography. The LMAO body may include a disordered spinel, such as, for example, a single crystal that may be cubic in symmetry, optically isotropic, and having cation disorder within the structure to reduce the intrinsic birefringence (IBR). The LMAO body has certain desired material properties and may be readily made in relatively large sizes suitable for use as the UV optical element for photolithography.
    • 本发明涉及用作紫外线(UV)光学元件并且特别用作193nm浸没透镜元件的材料。 用作UV光学元件的材料包括铝酸锂铝(LMAO)铝体。 用于该应用的具体化合物是无序的锂镁尖晶石,具有一般组成为Li x2 Mg(2-x)Al 4+ x + 其中x = 0至1作为用于浸渍光刻的高折射率UV透明材料。 LMAO体可以包括无序尖晶石,例如可以是对称的立方体,光学各向同性的并且在结构内具有阳离子障碍以降低固有双折射(IBR)的单晶。 LMAO体具有一定的期望的材料性质,并且可以容易地制成适合用作光刻的UV光学元件的相对大的尺寸。