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1. 发明申请

WO2012126006A1 SYSTEMS AND METHODS FOR CHARGING SOLAR CELL LAYERS 审中-公开
标题翻译：用于充电太阳能电池层的系统和方法
公开(公告)号：WO2012126006A1
公开(公告)日：2012-09-20
申请号：PCT/US2012/029688
申请日：2012-03-19
申请人： AMTECH SYSTEMS, INC. , HWANG, James-Mo
发明人： HWANG, James-Mo
IPC分类号： H01L31/18 , H01L31/0216 , C23C16/509 , H01J37/32
CPC分类号： H01L31/18 , H01J37/32082 , H01J37/32174 , H01J37/32577 , H01L31/02167 , H01L31/02168 , H01L31/068 , H01L31/1868 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention can be used to charge a charge-holding layer (such as a passivation layer and/or antireflective layer) of a solar cell with a positive or negative charge as desired. The charge-holding layer(s) of such a cell can include any suitable dielectric material capable of holding either a negative or a positive charge, and can be charged at any suitable point during manufacture of the cell, including during or after deposition of the passivation layer(s). A method according to one aspect of the invention includes disposing a solar cell in electrical communication with an electrode inside a chamber. The solar cell includes an emitter, a base, a first passivation layer adjacent the emitter, and a second passivation layer adjacent the base. Gas is injected into the chamber and a plasma (with photons having an energy level of at least about 3.1 eV) is generated using the gas. One or more of the first passivation layer and the second passivation layer is charged to a predetermined polarity, wherein the charging includes applying a direct current voltage pulse to the electrode for a predetermined period of time.
摘要翻译：本发明的系统和方法可用于根据需要对正电荷或负电荷对太阳能电池的电荷保持层（例如钝化层和/或抗反射层）进行充电。这种电池的电荷保持层可以包括能够保持负电荷或正电荷的任何合适的电介质材料，并且可以在电池的制造过程中的任何合适的点被充电，包括在沉积钝化层。根据本发明的一个方面的方法包括设置与室内的电极电连通的太阳能电池。太阳能电池包括发射极，基极，与发射极相邻的第一钝化层以及邻近基极的第二钝化层。将气体注入室中，并使用气体产生等离子体（具有至少约3.1eV的能级的光子）。第一钝化层和第二钝化层中的一个或多个被充电至预定极性，其中充电包括在电极上施加直流电压脉冲预定时间段。

2. 发明申请

WO2011156560A1 SOLAR CELL SILICON WAFER PROCESS 审中-公开
标题翻译：太阳能电池硅膜工艺
公开(公告)号：WO2011156560A1
公开(公告)日：2011-12-15
申请号：PCT/US2011/039734
申请日：2011-06-09
申请人： AMTECH SYSTEMS, INC. , RHIEU, Jihyo, M.
发明人： RHIEU, Jihyo, M.
IPC分类号： H01L21/306
CPC分类号： H01L31/186 , H01L31/068 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： In the production of silicon solar cells wherein the process includes a dopant diffusion to form a pn junction, a back surface field layer, or a front surface field layer, resulting in the formation of a doped glass surface, a HF vapor etch is utilized to remove the doped glass layer and expose the wafer surface. The exposed surface is subjected to an oxygen treatment for predetermined times and temperatures to alter the surface state. The HF vapor etch followed by the oxygen treatment, or chemical oxidation, results in significant improvement in solar cell electrical properties.
摘要翻译：在硅太阳能电池的生产中，其中该工艺包括掺杂剂扩散以形成pn结，背表面场层或前表面场层，导致形成掺杂的玻璃表面，利用HF蒸气蚀刻去除掺杂的玻璃层并暴露晶片表面。对暴露的表面进行预定时间和温度的氧处理以改变表面状态。 HF气相蚀刻后进行氧处理或化学氧化，导致太阳能电池电性能的显着改善。

3. 发明专利

DE60129870D1 未知
公开(公告)号：DE60129870D1
公开(公告)日：2007-09-27
申请号：DE60129870
申请日：2001-03-21
申请人： AMTECH SYSTEMS INC
发明人： MARTIN JOHN M , HARRISON ARTHUR W , EDWARDS ALLEN D
IPC分类号： H01L21/68 , H01L21/673 , H01L21/677

4. 发明专利

DE3584204D1 未知
公开(公告)号：DE3584204D1
公开(公告)日：1991-10-31
申请号：DE3584204
申请日：1985-07-18
申请人： AMTECH SYSTEMS INC
发明人： WOLLMANN ANDREW J , WHANG J S
IPC分类号： H01L21/677 , F27B5/02 , H01L21/22 , H01L21/67 , C30B31/10 , C30B31/14

5. 发明公开

EP2413368A3 Charge control of solar cell passivation layers 审中-公开
标题翻译：太阳能电池钝化层的电荷控制
公开(公告)号：EP2413368A3
公开(公告)日：2012-08-22
申请号：EP11175497.4
申请日：2011-07-27
申请人： AMTECH SYSTEMS, INC.
发明人： Hwang, Jeong-Mo
IPC分类号： H01L31/0216 , H01L31/068 , H01L31/18
CPC分类号： H01L31/068 , H01L31/02167 , H01L31/1868 , Y02E10/547 , Y02P70/521
摘要： The present invention relates to the charge control of the front and back passivation layers of a solar cell, which allows a common passivation material to be used on both the front and back surfaces of a solar cell. A solar cell according to one embodiment of the present invention comprises an emitter and a base. The cell further includes a first passivation layer adjacent the emitter, the first passivation layer having a charge. The cell also includes a second passivation layer adjacent the base, the second passivation layer having a charge opposite to the charge of the first passivation layer, wherein the first passivation layer and the second passivation layer include a common passivation material. The first and second passivation layers can include any suitable dielectric material capable of holding either a positive or a negative charge, and each of the first and second passivation layers can be charged at any suitable point during manufacture of the cell, including during or after deposition of the passivation layer(s).
摘要翻译：本发明涉及太阳能电池的正面和背面钝化层的电荷控制，其允许在太阳能电池的正面和背面两者上使用普通的钝化材料。根据本发明的一个实施例的太阳能电池包括发射器和基座。该单元还包括与发射极相邻的第一钝化层，第一钝化层具有电荷。所述单元还包括与所述基底相邻的第二钝化层，所述第二钝化层具有与所述第一钝化层的电荷相反的电荷，其中所述第一钝化层和所述第二钝化层包括共同的钝化材料。第一钝化层和第二钝化层可以包括能够保持正电荷或负电荷的任何合适的电介质材料，并且第一钝化层和第二钝化层中的每一个可以在电池的制造期间的任何合适的点处被充电，包括沉积期间或之后的钝化层。

6. 发明公开

EP1139392A3 Improved wafer boat support and method for twin tower wafer boat loader 有权
标题翻译：改进的晶片容器和方法用于装载两个晶片容器的支持
公开(公告)号：EP1139392A3
公开(公告)日：2006-01-25
申请号：EP01107075.2
申请日：2001-03-21
申请人： AMTECH SYSTEMS, INC.
发明人： Martin, John M. , Harrison, Arthur W. , Edwards, Allen D.
IPC分类号： H01L21/68
CPC分类号： H01L21/67781 , H01L21/67313 , H01L21/67778
摘要： An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats (24) onto/from a cantilcver paddle includes a cantilever paddle (47-1) and a carriage (42-1) supporting the cantilever paddle First and second vertical translation mechanisms (34A,B) each include a stationary part (62,63) and a vertically moveable support (61). First and second horizontal translation mechanisms (50A,B) each have a base (86) supported by one of the vertically moveable supports and a horizontally moveable arm (51) supported by the base (86). A horizontal boat support assembly (102) supports the loaded wafer boats and has an end supported by a first horizontally moveable arm (51A) and another end supported by a second horizontally moveable arm (51B). A stationary rail (97) has its ends supported by the first and second horizontally moveable arms, and a moveable rail (96) is supported by outer ends of first and second rotary arms to bring the moveable rail into a lower first position to engage an edge of each of the wafer boats (24) and to an upper second position above wafers in the wafer boats to clear the wafers as the first and second horizontal translation mechanisms are withdrawn from the wafer boats (24).
摘要翻译：用于自动装载和同时/从cantilcver桨走上/卸载晶片舟皿的多个（24）的装置包括一个悬臂桨叶（47-1）和一个滑架（42-1）支撑所述悬臂桨叶第一和第二竖直平移机构（34A，B）的每一个包括一个固定部分（62,63）和一个可垂直移动的支撑件（61）。第一和第二水平平移机构（50A，B）每个都具有由基座（86）支承在垂直可移动的支承中的一个和一个可水平移动的臂（51）支撑的底座（86）。的水平支撑舟组件（102）支撑所述装载晶片舟皿，并且具有在端差由第一可水平移动的臂（51A）和由第二支撑的另一端支持的可水平移动的（51B）。甲静止导轨（97）具有由所述第一和第二水平移动臂支撑其端部，和一个可移动的导轨（96）是由第一和第二旋转臂的外端支承，以使可移动轨到下部第一位置时接合在在上面在晶片舟皿的晶片上的第二位置的每个晶片舟皿（24）的和的边缘以清除晶片作为第一和第二水平平移机构从晶片舟皿（24）取出。

7. 发明授权

EP1139392B1 Improved wafer boat support and method for twin tower wafer boat loader 有权
标题翻译：改进的晶片容器和方法用于装载两个晶片容器的支持
公开(公告)号：EP1139392B1
公开(公告)日：2007-08-15
申请号：EP01107075.2
申请日：2001-03-21
申请人： AMTECH SYSTEMS, INC.
发明人： Martin, John M. , Harrison, Arthur W. , Edwards, Allen D.
IPC分类号： H01L21/68
CPC分类号： H01L21/67781 , H01L21/67313 , H01L21/67778

8. 发明公开

EP2413368A2 Charge control of solar cell passivation layers 审中-公开
标题翻译： Ladungskontrolle von Solarzellenpassivierungsschichten
公开(公告)号：EP2413368A2
公开(公告)日：2012-02-01
申请号：EP11175497.4
申请日：2011-07-27
申请人： AMTECH SYSTEMS, INC.
发明人： Hwang, Jeong-Mo
IPC分类号： H01L31/0216 , H01L31/18
CPC分类号： H01L31/068 , H01L31/02167 , H01L31/1868 , Y02E10/547 , Y02P70/521
摘要： The present invention relates to the charge control of the front and back passivation layers of a solar cell, which allows a common passivation material to be used on both the front and back surfaces of a solar cell. A solar cell according to one embodiment of the present invention comprises an emitter and a base. The cell further includes a first passivation layer adjacent the emitter, the first passivation layer having a charge. The cell also includes a second passivation layer adjacent the base, the second passivation layer having a charge opposite to the charge of the first passivation layer, wherein the first passivation layer and the second passivation layer include a common passivation material. The first and second passivation layers can include any suitable dielectric material capable of holding either a positive or a negative charge, and each of the first and second passivation layers can be charged at any suitable point during manufacture of the cell, including during or after deposition of the passivation layer(s).
摘要翻译：本发明涉及太阳能电池的正面和背面钝化层的电荷控制，其允许在太阳能电池的前表面和后表面上使用常见的钝化材料。根据本发明的一个实施例的太阳能电池包括发射极和基极。电池还包括邻近发射极的第一钝化层，第一钝化层具有电荷。电池还包括与基底相邻的第二钝化层，第二钝化层具有与第一钝化层的电荷相反的电荷，其中第一钝化层和第二钝化层包括公共钝化材料。第一钝化层和第二钝化层可以包括能够保持正电荷或负电荷的任何合适的电介质材料，并且可以在制造电池期间的任何合适的点（包括在沉积期间或之后）对第一和第二钝化层中的每一个进行充电的钝化层。

9. 发明授权

EP0172653B1 Slotted cantilever diffusion tube system and method and apparatus for loading 失效
标题翻译：插槽式扩音管扩散管系统及装载方法及装置
公开(公告)号：EP0172653B1
公开(公告)日：1991-09-25
申请号：EP85305138.1
申请日：1985-07-18
申请人： AMTECH SYSTEMS, INC.
发明人： Wollmann, Andrew J. , Whang, J.S.
IPC分类号： C30B31/10 , C30B31/14
CPC分类号： F27B5/02 , Y10S414/137 , Y10S414/14

10. 发明公开

EP0172653A3 Slotted cantilever diffusion tube system and method and apparatus for loading 失效
标题翻译：插槽式扩压管扩散管系统及装载方法及装置
公开(公告)号：EP0172653A3
公开(公告)日：1988-02-17
申请号：EP85305138
申请日：1985-07-18
申请人： AMTECH SYSTEMS, INC.
发明人： Wollmann, Andrew J. , Whang, J.S.
IPC分类号： C30B31/10 , C30B31/14
CPC分类号： F27B5/02 , Y10S414/137 , Y10S414/14
摘要： A cantilever tube for carrying loaded wafer boats into a diffusion furnace and confining flow of gas through the wafers includes an elongated slot extending from an open end of the tube to a predetermined region in which the wafer boats are positioned, the wafer boats abutting each other and forming a sealing cover for the elongated slot: A narrow boat carrier supported on a carriage system extends through the elongated slot and carries a wafer boat loaded with wafers into the open end and to the predetermined region in the cantilever tube without allowing either the carrier, or the wafer boat, or the wafers to touch the cantilever tube. The carrier lowers the boat onto the bottom inner surface of the tube, causing the boat to cover a portion of the elongated slot. The procedure is repeated for subsequent wafer boats, each of which abuts the previous one, to effectively close and seal the elongated slot when all of the wafer boats are positioned inside the cantilever tube.

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