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    • 87. 发明专利
    • Organic thin-film transistor and manufacturing method thereof
    • 有机薄膜晶体管及其制造方法
    • JP2006013468A
    • 2006-01-12
    • JP2005149630
    • 2005-05-23
    • Samsung Sdi Co Ltd三星エスディアイ株式会社
    • GU ZAIHONSUH MIN-CHULMO YEON-GON
    • H01L21/786H01L29/786H01L21/00H01L21/336H01L29/08H01L51/05
    • H01L51/0529
    • PROBLEM TO BE SOLVED: To provide a thin-film transistor and a manufacturing method of the same, in which an organic gate insulating film is provided to result in lower threshold voltage and less amount of leakage current, while having flexibility.
      SOLUTION: An organic thin-film transistor and a manufacturing method of the same are provided. The organic thin-film transistor is provided with a substrate, and a gate electrode located on the substrate. A gate insulating film, having a laminated structure of an inorganic gate insulating film and an organic gate insulating film, is located on the gate electrode. An organic semiconductor layer overlapping on the gate electrode is located on the gate insulating film. Accordingly, flexibility is provided and leakage current is reduced, at the same time. Consequently, an organic thin-film transistor having the lower threshold voltage can be realized.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提供薄膜晶体管及其制造方法,其中提供有机栅极绝缘膜以产生较低的阈值电压和较少的漏电流量,同时具有灵活性。 解决方案:提供一种有机薄膜晶体管及其制造方法。 有机薄膜晶体管设置有基板和位于基板上的栅电极。 具有无机栅极绝缘膜和有机栅极绝缘膜的层叠结构的栅极绝缘膜位于栅电极上。 在栅电极上重叠的有机半导体层位于栅极绝缘膜上。 因此,提供灵活性并同时降低泄漏电流。 因此,可以实现具有较低阈值电压的有机薄膜晶体管。 版权所有(C)2006,JPO&NCIPI
    • 89. 发明专利
    • FORMATION OF SPIN-ON-GLASS(SOG) FILM OF SEMICONDUCTOR ELEMENT
    • JPH09312289A
    • 1997-12-02
    • JP35986296
    • 1996-12-27
    • GENDAI DENSHI SANGYO KK
    • KIN MINSAI
    • H01L21/768H01L21/316H01L21/786
    • PROBLEM TO BE SOLVED: To enhance the surface flatness and reliability of an element by a method wherein a constant amount of a spin-on-glass solution is jetted on a wafer, the jet is once stopped and after the wafer is rotated at high speed in a short time, the rotation is again stopped to let the solution have a reflow time and thereafter, the solution is cured and fired. SOLUTION: A wafer with a layer insulating film 12 and lower metal wirings 13, which are formed on a silicon substrate 1, is prepared. A constant amount of a spin-on-glass solution is jetted on the wafer. Then, the wafer is rotated at high speed in a short time in a state that the jet of the spin-on-glass solution is stopped to contrive to distribute equally the solution. Then, after the rotation of the wafer is stopped for diluting the thick sping-on-glass solution on the upper parts of the wirings 13, a state that the rotation is stopped for a constant time is maintained for a reflow of the solution. After that, the solution is cured and fired and a spin-on-glass film 15 is completed. Therefore, with the electrical characteristics of an element enhanced, the flattening characteristics of the element is also enhanced.