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    • 87. 发明申请
    • System and method for cutting using a variable astigmatic focal beam spot
    • 使用可变散光焦点光斑切割的系统和方法
    • US20040228004A1
    • 2004-11-18
    • US10782741
    • 2004-02-19
    • Patrick J. SercelJeffrey P. SercelJongkook Park
    • G02B003/00G02B009/00G02B013/08
    • G03F7/70383B23K26/0608B23K26/0613B23K26/0617B23K26/0624B23K26/066B23K26/067B23K26/0736B23K26/364B23K26/40B23K2101/40B23K2103/12B23K2103/50
    • A variable astigmatic focal beam spot is formed using lasers with an anamorphic beam delivery system. The variable astigmatic focal beam spot can be used for cutting applications, for example, to scribe semiconductor wafers such as light emitting diode (LED) wafers. The exemplary anamorphic beam delivery system comprises a series of optical components, which deliberately introduce astigmatism to produce focal points separated into two principal meridians, i.e. vertical and horizontal. The astigmatic focal points result in an asymmetric, yet sharply focused, beam spot that consists of sharpened leading and trailing edges. Adjusting the astigmatic focal points changes the aspect ratio of the compressed focal beam spot, allowing adjustment of energy density at the target without affecting laser output power. Scribing wafers with properly optimized energy and power density increases scribing speeds while minimizing excessive heating and collateral material damage.
    • 使用具有变形射束输送系统的激光器形成可变散光焦点光斑。 可变散光焦点光斑可以用于切割应用,例如划刻诸如发光二极管(LED)晶片的半导体晶片。 示例性变形射束输送系统包括一系列光学部件,其有意地引入散光以产生分离成两个主经线(即垂直和水平)的焦点。 像散焦点导致了一个不对称但是集中的束斑,其包括锋利的前缘和后缘。 调整散光焦点会改变压缩光束斑点的长宽比,从而可以调节目标处的能量密度,而不影响激光输出功率。 用适当优化的能量和功率密度划分晶片可以提高划线速度,同时最大限度地减少过热和附带材料损坏。