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    • 88. 发明专利
    • Resist composition, method for forming resist pattern, new compound, and photobase generator
    • 耐蚀组合物,形成耐蚀图案的方法,新化合物和光致发色剂发生器
    • JP2010037215A
    • 2010-02-18
    • JP2008198480
    • 2008-07-31
    • Tokyo Ohka Kogyo Co Ltd東京応化工業株式会社
    • UTSUMI YOSHIYUKIMATSUZAWA KENSUKENAKAMURA TAKESHISHIMIZU HIROAKI
    • C07C251/66C07C251/68G03F7/004G03F7/039H01L21/027
    • PROBLEM TO BE SOLVED: To provide a resist composition improving lithographic characteristics and forming a resist pattern of an excellent shape, a method for forming a resist pattern, a photobase generator for use in the resist composition, and a new compound useful as the photobase generator. SOLUTION: The resist composition comprising a base material component that changes its solubility to an alkali developer by the action of an acid, an acid generator component that generates an acid upon exposure to light, and a photobase generator component (F) that generates an alkali upon exposure to light, is characterized in that the photobase generator component (F) contains a photobase generator (F1) comprised of a compound represented by formula (f1) [in the formula, R and R" each represents a hydrogen atom or a 1-30C hydrocarbon group that may contain a substituent (provided that R and R" are bound to each other to form a ring in case R and R" both are 1-30C hydrocarbon groups that may contain a substituent); and R' represents an aryl group that may contain a substituent, or an alicyclic group]. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供改进光刻特性并形成具有优异形状的抗蚀剂图案的抗蚀剂组合物,形成抗蚀剂图案的方法,用于抗蚀剂组合物的光碱产生剂和用作 光产生器。 解决方案:抗蚀剂组合物包括通过酸的作用改变其对碱显影剂的溶解度的基材成分,以及在曝光时产生酸的酸产生剂组分和光碱产生剂组分(F),其中 在光照下产生碱,其特征在于,所述光产物成分(F)含有由式(f1)表示的化合物构成的光碱产生剂(F1)[式中,R和R“各自表示氢原子 或可以含有取代基的1-30℃烃基(条件是R和R“在R和R”的情况下彼此结合形成环,均为含有取代基的1-30C烃基); R '表示可以含有取代基的芳基或脂环基]。版权所有(C)2010,JPO&INPIT