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    • 82. 发明授权
    • Radio frequency device and method using a carbon nanotube array
    • 射频装置和使用碳纳米管阵列的方法
    • US07157990B1
    • 2007-01-02
    • US10850152
    • 2004-05-21
    • John Douglas AdamRobert Miles Young
    • John Douglas AdamRobert Miles Young
    • H03H9/46H03H9/52H03H9/24
    • H03H9/02259H03H9/2405H03H9/505H03H2009/02488Y10S977/723Y10S977/724Y10S977/742Y10S977/932
    • A radio frequency (RF) filter includes a substrate, first and second dielectric layers formed on first and second portions of the substrate, a ground plane formed on a third portion of said substrate, a carbon nanotube array, and first and second electrodes. The third portion of the substrate includes, at least in part, the area between the first and second portions thereof. The carbon nanotube array is formed on a portion of said ground plane between the first and second dielectric layers. The first and second electrodes are formed on the first and second dielectric layers, such that an RF signal may be input to and output from the carbon nanotube array via the first and second signal guides. A third electrode is disposed over the carbon nanotube array and is used to voltage bias the array.
    • 射频(RF)滤波器包括衬底,形成在衬底的第一和第二部分上的第一和第二电介质层,形成在所述衬底的第三部分上的接地平面,碳纳米管阵列以及第一和第二电极。 衬底的第三部分至少部分地包括其第一和第二部分之间的区域。 在第一和第二电介质层之间的所述接地平面的一部分上形成碳纳米管阵列。 第一和第二电极形成在第一和第二电介质层上,使得RF信号可以经由第一和第二信号引导件输入到碳纳米管阵列并从碳纳米管阵列输出。 第三电极设置在碳纳米管阵列上方并用于对阵列施加偏压。
    • 83. 发明申请
    • Method of manufacturing memory with nano dots
    • 用纳米点制造记忆的方法
    • US20040137704A1
    • 2004-07-15
    • US10743377
    • 2003-12-23
    • In-Sook KimSun-Ae SeoIn-Kyeong YooSoo-Hwan Jeong
    • H01L021/336H01L021/3205H01L021/4763H01L021/00
    • B82Y10/00H01L21/28273H01L21/28282H01L29/42332H01L29/7881H01L29/792Y10S977/723Y10S977/774
    • A method of fabricating memory with nano dots includes sequentially depositing a first insulating layer, a charge storage layer, a sacrificial layer, and a metal layer on a substrate in which source and drain electrodes are formed, forming a plurality of holes on the resultant structure by anodizing the metal layer and oxidizing portions of the sacrificial layer that are exposed through the holes, patterning the charge storage layer to have nano dots by removing the oxidized metal layer, and etching the sacrificial layer and the charge storage layer using the oxidized sacrificial layer as a mask, and removing the oxidized sacrificial layer, depositing a second insulating layer and a gate electrode on the patterned charge storage layer, and patterning the first insulating layer, the patterned charge storage layer, the second insulating layer, and the gate electrode to a predetermined shape, for forming memory having uniformly distributed nano-scale storage nodes.
    • 利用纳米点制造存储器的方法包括在形成源极和漏极的衬底上依次沉积第一绝缘层,电荷存储层,牺牲层和金属层,在所得结构上形成多个孔 通过阳极氧化金属层并氧化通过孔露出的牺牲层的部分,通过去除氧化的金属层将电荷存储层图案化成具有纳米点,并且使用氧化的牺牲层蚀刻牺牲层和电荷存储层 作为掩模,并且去除氧化的牺牲层,在图案化的电荷存储层上沉积第二绝缘层和栅电极,并且将第一绝缘层,图案化电荷存储层,第二绝缘层和栅电极图案化,以 用于形成具有均匀分布的纳米级存储节点的存储器的预定形状。