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81. 发明授权

US07998658B2 Pattern forming method 有权
标题翻译：图案形成方法
公开(公告)号：US07998658B2
公开(公告)日：2011-08-16
申请号：US12767369
申请日：2010-04-26
申请人： Masayuki Endou , Masaru Sasago
发明人： Masayuki Endou , Masaru Sasago
IPC分类号： G03G5/00 , G03F7/00
CPC分类号： G03F7/0035 , G03F7/40 , H01L21/0274 , H01L21/033 , H01L21/0337 , Y10S427/102 , Y10S430/143 , Y10S430/146
摘要： A first resist film is formed on a substrate, and first pattern exposure is performed such that the first resist film is irradiated with exposure light through a first mask. Then, the first resist film is developed, thereby forming a first resist pattern out of the first resist film. Subsequently, a nano-carbon material is attached to the surface of the first resist pattern, and then a second resist film is formed on the substrate including the first resist pattern. Thereafter, second pattern exposure is performed such that the second resist film is irradiated with exposure light through a second mask. Then, the second resist film is developed, thereby forming a second resist pattern out of the second resist film.
摘要翻译：在基板上形成第一抗蚀剂膜，并且执行第一图案曝光，使得通过第一掩模用曝光光照射第一抗蚀剂膜。然后，第一抗蚀剂膜被显影，从而形成第一抗蚀剂图案从第一抗蚀剂膜。随后，将纳米碳材料附着到第一抗蚀剂图案的表面，然后在包括第一抗蚀剂图案的基板上形成第二抗蚀剂膜。此后，进行第二图案曝光，使得第二抗蚀剂膜通过第二掩模用曝光光照射。然后，使第二抗蚀剂膜显影，从而在第二抗蚀剂膜中形成第二抗蚀剂图案。

82. 发明授权

US07687109B2 Apparatus and method for making carbon nanotube array 有权
标题翻译：制造碳纳米管阵列的装置和方法
公开(公告)号：US07687109B2
公开(公告)日：2010-03-30
申请号：US11371997
申请日：2006-03-08
申请人： Kai-Li Jiang , Kai Liu , Shou-Shan Fan
发明人： Kai-Li Jiang , Kai Liu , Shou-Shan Fan
IPC分类号： C23C16/00 , C01B31/02 , C01B31/00 , D01C5/00
CPC分类号： C23C16/0281 , C23C16/26 , C23C16/448 , C30B25/02 , C30B29/02 , C30B29/605 , Y10S427/102
摘要： An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet; a quartz boat disposed in the reaction chamber; a substrate with a surface deposited with a film of first catalyst, the substrate being disposed in the quartz boat; and a second catalyst disposed in the quartz beside the substrate. A method for making an array of carbon nanotubes, comprising the steps of: (a) providing a substrate with a surface deposited with a film of first catalyst; (b) disposing a second catalyst beside the substrate to produce small amounts of hydrogen gas which flows to the first catalyst; (c) introducing a carrier gas and a carbon source gas flowing from the second catalyst to the first catalyst at a predetermined temperature; and (d) growing an array of carbon nanotubes extending from the substrate.
摘要翻译：制造碳纳米管阵列的装置包括具有气体入口和气体出口的反应室; 设置在反应室中的石英舟; 具有表面沉积有第一催化剂膜的基板，所述基板设置在所述石英舟中; 以及设置在基板旁边的石英中的第二催化剂。一种制备碳纳米管阵列的方法，包括以下步骤：（a）向基材提供沉积有第一催化剂膜的表面; （b）在基板旁边设置第二催化剂以产生流过第一催化剂的少量氢气; （c）在预定温度下引入从第二催化剂流向第一催化剂的载气和碳源气体; 和（d）生长从衬底延伸的碳纳米管阵列。

83. 发明申请

US20080020130A1 Method to make and use long single-walled carbon nanotubes as electrical conductors 有权
标题翻译：制造和使用长单壁碳纳米管作为电导体的方法
公开(公告)号：US20080020130A1
公开(公告)日：2008-01-24
申请号：US11224917
申请日：2005-09-12
申请人： Peter Burke , Zhen Yu , Shengdong Li
发明人： Peter Burke , Zhen Yu , Shengdong Li
IPC分类号： B05D5/12 , C23C16/00
CPC分类号： B01J23/862 , B01J23/8993 , B01J37/0211 , B01J37/0215 , B01J37/024 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/02 , C01B2202/34 , C01B2202/36 , D01F9/127 , D01F9/133 , Y10S427/102
摘要： Systems and methods for synthesizing long carbon nanotubes and using the nanotube as an electrical conductor. A substrate is provided with one or more metal underlayer platforms that allow the nanotube to grow freely suspended from the substrate. A modified gas-flow injector is used to reduce the gas flow turbulence during nanotube growth. Nanotube electrodes are formed by growing arrays of aligned nanotubes between two metal underlayer platforms.
摘要翻译：用于合成长碳纳米管并使用纳米管作为电导体的系统和方法。衬底设置有一个或多个金属底层平台，其允许纳米管从衬底自由地生长悬浮。改进的气流注入器用于减少纳米管生长期间的气流湍流。纳米管电极通过在两个金属底层平台之间生长排列的纳米管阵列而形成。

84. 发明申请

US20060068096A1 METHOD OF SYNTHESISING CARBON NANO TUBES 失效
标题翻译：合成碳纳米管的方法
公开(公告)号：US20060068096A1
公开(公告)日：2006-03-30
申请号：US10301317
申请日：2002-11-20
申请人： Xinhe Tang , Klaus Mauthner , Ernst Hammel , Hans Loschner , Elmar Platzgummer , Gerhard Stengl
发明人： Xinhe Tang , Klaus Mauthner , Ernst Hammel , Hans Loschner , Elmar Platzgummer , Gerhard Stengl
IPC分类号： C23C16/00
CPC分类号： C30B23/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , C30B29/02 , C30B29/605 , C30B33/00 , Y10S427/102
摘要： Method of synthesising carbon nano tubes (CNTs) on a catalyst layer formed on a support member, by catalytic deposition of carbon from a gaseous phase, whereby an ion beam is used prior to, during and/or after formation of said carbon nano tubes for modifying the physical, chemical and/or conductive properties of said carbon nano tubes.
摘要翻译：在形成在支撑构件上的催化剂层上合成碳纳米管（CNT）的方法，通过从气相中催化沉积碳，由此在形成所述碳纳米管之前，期间和/或之后使用离子束，改变所述碳纳米管的物理，化学和/或导电性质。

85. 发明授权

US07011771B2 Method of making carbon nanotubes on a substrate 有权
标题翻译：在基材上制造碳纳米管的方法
公开(公告)号：US07011771B2
公开(公告)日：2006-03-14
申请号：US09996523
申请日：2001-11-28
申请人： Yufei Gao , Jun Liu
发明人： Yufei Gao , Jun Liu
IPC分类号： H01J9/02 , H01J1/30 , D01F9/12 , C23C26/00
CPC分类号： B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/08 , C01B2202/34 , C01B2202/36 , Y10S427/102 , Y10S977/742 , Y10S977/842 , Y10S977/843 , Y10T428/12438 , Y10T428/2913 , Y10T428/2918
摘要： The present invention includes carbon nanotubes whose hollow cores are 100% filled with conductive filler. The carbon nanotubes are in uniform arrays on a conductive substrate and are well-aligned and can be densely packed. The uniformity of the carbon nanotube arrays is indicated by the uniform length and diameter of the carbon nanotubes, both which vary from nanotube to nanotube on a given array by no more than about 5%. The alignment of the carbon nanotubes is indicated by the perpendicular growth of the nanotubes from the substrates which is achieved in part by the simultaneous growth of the conductive filler within the hollow core of the nanotube and the densely packed growth of the nanotubes. The present invention provides a densely packed carbon nanotube growth where each nanotube is in contact with at least one nearest-neighbor nanotube. The substrate is a conductive substrate coated with a growth catalyst, and the conductive filler can be single crystals of carbide formed by a solid state reaction between the substrate material and the growth catalyst. The present invention further provides a method for making the filled carbon nanotubes on the conductive substrates. The method includes the steps of depositing a growth catalyst onto the conductive substrate as a prepared substrate, creating a vacuum within a vessel which contains the prepared substrate, flowing H2/inert (e.g. Ar) gas within the vessel to increase and maintain the pressure within the vessel, increasing the temperature of the prepared substrate, and changing the H2/Ar gas to ethylene gas such that the ethylene gas flows within the vessel. Additionally, varying the density and separation of the catalyst particles on the conductive substrate can be used to control the diameter of the nanotubes.
摘要翻译：本发明包括中空芯100％填充有导电填料的碳纳米管。碳纳米管在导电衬底上是均匀的阵列，并且被很好地对准并且可以被密集地包装。碳纳米管阵列的均匀性由碳纳米管的均匀长度和直径指示，两者在给定阵列上从纳米管到纳米管的变化不超过约5％。碳纳米管的排列由纳米管从衬底的垂直生长表示，部分通过导电填料在纳米管的中空芯内的同时生长和纳米管的密集堆积生长而实现。本发明提供了密集填充的碳纳米管生长，其中每个纳米管与至少一个最邻近的纳米管接触。衬底是涂覆有生长催化剂的导电衬底，并且导电填料可以是通过衬底材料和生长催化剂之间的固态反应形成的碳化物单晶。本发明还提供了一种在导电基板上制造填充的碳纳米管的方法。该方法包括以下步骤：将生长催化剂沉积到导电基底上作为制备的基底，在容纳制备的基底的容器内产生真空，在容器内流动H 2 /惰性（例如Ar）气体，以增加和保持在容器，提高制备的基材的温度，并将H 2 / Ar气体改变为乙烯气体，使得乙烯气体在容器内流动。此外，改变导电基板上的催化剂颗粒的密度和分离可用于控制纳米管的直径。

86. 发明申请

US20040265491A1 Method of manufacturing the densely fitted multi-layer carbon nano-tube 失效
标题翻译：密集配合的多层碳纳米管的制造方法
公开(公告)号：US20040265491A1
公开(公告)日：2004-12-30
申请号：US10495212
申请日：2004-07-07
发明人： Sumio Iijima , Masako Yudasaka , Akira Koshio
IPC分类号： C23C016/00 , H05H001/26
CPC分类号： B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/06 , C01B2202/30 , D01F9/12 , Y10S427/102 , Y10S977/844
摘要： A method of manufacturing, with high purity and high efficiency, a multi-wall carbon nanotube (10) having layers densely fitted to the center part thereof, comprising the step of leading a graphite rod (2) into plasma flame (1) generated in the atmosphere of inert gas (4) added with hydrogen to evaporate carbon so as to stack the densest multi-wall carbon nanotube (10) on the surface of the graphite rod (2).

87. 发明授权

US06743481B2 Process for production of ultrathin protective overcoats 失效
标题翻译：生产超薄保护性外衣的方法
公开(公告)号：US06743481B2
公开(公告)日：2004-06-01
申请号：US09871004
申请日：2001-05-31
申请人： Joel W. Hoehn , John W. Dykes , James E. Angelo , William D. Mosley , Richard T. Greenlee , Brian W. Karr
发明人： Joel W. Hoehn , John W. Dykes , James E. Angelo , William D. Mosley , Richard T. Greenlee , Brian W. Karr
IPC分类号： B05D306
CPC分类号： G11B5/8408 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/15 , C01B32/152 , C23C14/0605 , C23C14/5873 , C30B23/02 , C30B29/02 , C30B33/00 , G11B5/255 , G11B5/3106 , G11B5/3163 , G11B5/40 , G11B5/722 , G11B5/82 , G11B7/122 , G11B7/24 , G11B7/26 , G11B11/10582 , G11B11/10586 , Y10S427/102 , Y10S977/843 , Y10S977/891 , Y10S977/951
摘要： A multilayer coating of fullerene molecules is deposited on a substrate, and layers of the multilayer coating are removed leaving an approximate monolayer coating of fullerene molecules on the substrate. In some embodiments, a beam generator, such as an ion beam, electron beam or laser generator, produces a beam arranged to break the weaker fullerene-to-fullerene intermolecular bond of the multilayer coating and inadequate to break the stronger fullerene-to-substrate association/bond of the coating. The beam is directed at the multilayer coating to break the fullerene-to-fullerene intermolecular bond. In other embodiments, the monolayer of fullerene molecules is formed by applying a solvent to the multilayer coating to break the fullerene-to-fullerene intermolecular bond of the multilayer coating.
摘要翻译：富勒烯分子的多层涂层沉积在基底上，去除多层涂层的层，留下基底上富勒烯分子的近似单层涂层。在一些实施例中，诸如离子束，电子束或激光发生器的光束发生器产生一个光束，该光束被布置成打破多层涂层中较弱的富勒烯与富勒烯的分子间键，并且不足以破坏更强的富勒烯与基底缔合/粘合的涂层。光束被引导到多层涂层以破坏富勒烯与富勒烯的分子间键。在其它实施方案中，通过向多层涂层施加溶剂以破坏多层涂层的富勒烯与富勒烯的分子间键，形成富勒烯分子单层。

88. 发明申请

US20030068432A1 Carbon nanotube devices 有权
标题翻译：碳纳米管装置
公开(公告)号：US20030068432A1
公开(公告)日：2003-04-10
申请号：US10299610
申请日：2002-11-18
申请人： The Board of Trustees of the Leland Stanford Junior University
发明人： Hongjie Dai , Jing Kong
IPC分类号： B05D005/12 , C23C016/00 , B05D001/36
CPC分类号： B82B1/00 , B82B3/00 , C01B32/162 , C01B2202/02 , G01N27/127 , G01Q70/12 , G11C13/025 , G11C17/16 , G11C17/165 , Y10S427/102 , Y10S977/742 , Y10S977/746 , Y10S977/842 , Y10S977/843 , Y10S977/876 , Y10S977/894 , Y10S977/895 , Y10S977/957 , Y10T428/2918 , Y10T428/2975
摘要： Nanotubes and nanotube-based devices are implemented in a variety of applications. According to an example embodiment of the present invention, a nanotube device is manufactured having a nanotube extending between two conductive elements. In one implementation, each conductive element includes a catalyst portion, wherein electrical connection is made to opposite ends of the nanotube at each of the catalyst portions. In one implementation, the conductive elements are coupled to circuitry for detecting an electrical characteristic of the nanotube, such as the response of the nanotube to exposure to one or more of a variety of materials. In another implementation, the nanotube device is adapted for chemical and biological sensing. In still another implementation, a particular functionality is imparted to the nanotube using one or more of a variety of materials coupled to the nanotube, such as metal particles, biological particles and/or layers of the same.
摘要翻译：纳米管和基于纳米管的器件可以在各种应用中实现。根据本发明的示例性实施例，制造具有在两个导电元件之间延伸的纳米管的纳米管器件。在一个实施方案中，每个导电元件包括催化剂部分，其中在每个催化剂部分处对纳米管的相对端进行电连接。在一个实施方案中，导电元件耦合到用于检测纳米管的电特性的电路，例如纳米管暴露于多种材料中的一种或多种的响应。在另一个实施方案中，纳米管装置适用于化学和生物感测。在另一个实施方案中，使用耦合到纳米管的各种材料中的一种或多种，例如金属颗粒，生物颗粒和/或其层，赋予纳米管特定的功能。

89. 发明授权

US06522055B2 Electron-emitting source, electron-emitting module, and method of manufacturing electron-emitting source 失效
标题翻译：电子发射源，电子发射模块和制造电子发射源的方法
公开(公告)号：US06522055B2
公开(公告)日：2003-02-18
申请号：US09784868
申请日：2001-02-15
申请人： Sashiro Uemura , Takeshi Nagasako , Junko Yotani , Hirohiko Murakami
发明人： Sashiro Uemura , Takeshi Nagasako , Junko Yotani , Hirohiko Murakami
IPC分类号： H01J1304
CPC分类号： B82Y10/00 , B82Y30/00 , H01J1/304 , H01J9/025 , Y10S427/102 , Y10S977/939
摘要： An electron-emitting source includes a substrate and a coating film. The substrate is made of a material containing a metal serving as a growth nucleus for nanotube fibers as a main component, and has a plurality of through holes. The coating film is constituted by nanotube fibers formed on a surface of the substrate and wall surfaces of the through holes. A method of manufacturing an electron-emitting source is also disclosed.
摘要翻译：电子发射源包括基底和涂膜。基板由含有用作纳米管纤维的生长核的金属作为主要成分的材料制成，并且具有多个通孔。涂膜由形成在基板表面上的纳米管纤维和通孔的壁面构成。还公开了一种制造电子发射源的方法。

90. 发明申请

US20020150684A1 Method of forming carbon nanotubes and apparatus therefor 失效
标题翻译：形成碳纳米管的方法及其装置
公开(公告)号：US20020150684A1
公开(公告)日：2002-10-17
申请号：US09835757
申请日：2001-04-16
发明人： Ahalapitiya H. Jayatissa
IPC分类号： C23C016/00 , C23C014/00
CPC分类号： B82Y30/00 , B82Y40/00 , C01B32/162 , C23C16/0281 , C23C16/26 , C23C16/44 , C30B25/02 , C30B29/605 , Y10S427/102 , Y10S977/731 , Y10S977/843 , Y10S977/847
摘要： Carbon nanotubes are formed on a substrate by providing a coiled filament in a chemical vapor deposition chamber, supporting a substrate having a catalytic coating provided thereon inside the coiled filament, evacuating air, if present, from the chamber, heating the filament and applying a bias voltage between the filament and the substrate, introducing a reactant gas into the chamber, and pyrolyzing the reactant gas to deposit the carbon nanotubes on the catalytic coating. The substrate can be in the form of a rod or fiber and the carbon nanotubes can be deposited in a radially extending cluster on the substrate. The present invention also contemplates an apparatus for carrying out the inventive method.
摘要翻译：碳纳米管通过在化学气相沉积室中提供螺旋丝而形成在基底上，支撑在其内部设置有催化剂涂层的基底，从腔室排出空气（如果存在），加热细丝并施加偏压在灯丝和衬底之间施加电压，将反应气体引入室中，并热解反应气体以将碳纳米管沉积在催化涂层上。衬底可以是棒或纤维的形式，并且碳纳米管可以沉积在衬底上的径向延伸的簇中。本发明还考虑了用于实施本发明方法的装置。

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