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    • 83. 发明授权
    • Method and system for forming straight word lines in a flash memory array
    • 用于在闪存阵列中形成直线字线的方法和系统
    • US07488657B2
    • 2009-02-10
    • US11155707
    • 2005-06-17
    • Shenqing FangHiroyuki OgawaKuo-Tung ChangPavel FastenkoKazuhiro MizutaniZhigang Wang
    • Shenqing FangHiroyuki OgawaKuo-Tung ChangPavel FastenkoKazuhiro MizutaniZhigang Wang
    • H01L21/336
    • H01L29/7883H01L21/2652H01L27/115H01L27/11521H01L29/66825
    • Embodiments of the present invention disclose a memory device having an array of flash memory cells with source contacts that facilitate straight word lines, and a method for producing the same. The array is comprised of a plurality of non-intersecting shallow trench isolation (STI) regions that isolate a plurality of memory cell columns. A source column is implanted with n-type dopants after the formation of a tunnel oxide layer and a first polysilicon layer. The implanted source column is coupled to a plurality of common source lines that are coupled to a plurality of source regions associated with memory cells in the array. A source contact is coupled to the implanted source column for providing electrical coupling with the plurality of source regions. The source contact is collinear with a row of drain contacts that are coupled to drain regions associated with a row of memory cells. The arrangement of source contacts collinear with the row of drain contacts allows for straight word line formation.
    • 本发明的实施例公开了一种存储器件,其具有具有促进直线字线的源极触点的闪存单元阵列及其制造方法。 阵列由隔离多个存储单元列的多个不相交的浅沟槽隔离(STI)区域组成。 在形成隧道氧化物层和第一多晶硅层之后,源极列注入n型掺杂剂。 植入的源极柱耦合到耦合到与阵列中的存储器单元相关联的多个源极区域的多个公共源极线。 源极触点耦合到植入源极柱,用于提供与多个源极区域的电耦合。 源触点与一排漏极触点共线,该排触点耦合到与一行存储器单元相关联的漏极区。 与漏极触点排共线的源触点的布置允许直线字线形成。
    • 85. 发明申请
    • Method and apparatus for broadcasting scan patterns in a random access based integrated circuit
    • 用于在基于随机接入的集成电路中广播扫描模式的方法和装置
    • US20080276143A1
    • 2008-11-06
    • US12216640
    • 2008-07-09
    • Laung-Terng (L.-T.) WangBoryau (Jack) SheuZhigang JiangZhigang WangShianling Wu
    • Laung-Terng (L.-T.) WangBoryau (Jack) SheuZhigang JiangZhigang WangShianling Wu
    • G01R31/3177G06F11/25
    • G01R31/318547G01R31/318533G01R31/318591G01R31/31926
    • A broadcaster, system, and method for reducing test data volume and test application time in an ATE (automatic test equipment) in a scan-based integrated circuit. The scan-based integrated circuit contains multiple scan chains, each scan chain comprising multiple scan cells coupled in series. The broadcaster is a combinational logic network coupled to an optional virtual scan controller and an optional scan connector. The virtual scan controller controls the operation of the broadcaster. The system transmits virtual scan patterns stored in the ATE and generates broadcast scan patterns through the broadcaster for testing manufacturing faults in the scan-based integrated circuit. The number of scan chains that can be supported by the ATE is significantly increased. Methods are further proposed to reorder scan cells in selected scan chains, to generate the broadcast scan patterns and virtual scan patterns, and to synthesize the broadcaster and a compactor in the scan-based integrated circuit.The scan architecture used can also be random access scan based, where the integrated circuit comprises an array of random access scan (RAS) cells that are randomly and uniquely addressable. In random access scan, test patterns can be applied by selectively updating RAS cells and test responses can be observed through a direct read-out process. Eliminating the shifting process inherent in serial scan, random access scan produces much lower test power dissipation than serial scan.
    • 用于在基于扫描的集成电路中的ATE(自动测试设备)中降低测试数据量和测试应用时间的广播,系统和方法。 基于扫描的集成电路包含多个扫描链,每个扫描链包括串联耦合的多个扫描单元。 广播公司是组合逻辑网络,耦合到可选的虚拟扫描控制器和可选的扫描连接器。 虚拟扫描控制器控制广播机构的操作。 系统发送存储在ATE中的虚拟扫描模式,并通过广播机构生成广播扫描模式,以测试基于扫描的集成电路中的制造故障。 ATE可以支持的扫描链数显着增加。 进一步提出了方法来重新排列所选择的扫描链中的扫描单元,以产生广播扫描图案和虚拟扫描图案,并且在基于扫描的集成电路中合成广播器和压缩器。 所使用的扫描结构也可以是基于随机存取扫描的集成电路,其中集成电路包括随机访问扫描(RAS)阵列,其随机且唯一可寻址。 在随机存取扫描中,可以通过选择性地更新RAS细胞来应用测试模式,并且可以通过直接读出过程来观察测试响应。 消除串行扫描固有的移位过程,随机访问扫描产生比串行扫描低得多的测试功耗。
    • 86. 发明授权
    • Method and apparatus for broadcasting test patterns in a scan based integrated circuit
    • 用于在基于扫描的集成电路中广播测试模式的方法和装置
    • US07412637B2
    • 2008-08-12
    • US11348519
    • 2006-02-07
    • Laung-Terng (L.-T.) WangBoryau (Jack) SheuZhigang JiangZhigang WangShianling Wu
    • Laung-Terng (L.-T.) WangBoryau (Jack) SheuZhigang JiangZhigang WangShianling Wu
    • G01R31/28
    • G01R31/318547G01R31/318533G01R31/318591G01R31/31926
    • A broadcaster, system, and method for reducing test data volume and test application time in an ATE (automatic test equipment) in a scan-based integrated circuit. The scan-based integrated circuit contains multiple scan chains, each scan chain comprising multiple scan cells coupled in series. The broadcaster is a combinational logic network coupled to an optional virtual scan controller and an optional scan connector. The virtual scan controller controls the operation of the broadcaster. The system transmits virtual scan patterns stored in the ATE and generates broadcast scan patterns through the broadcaster for testing manufacturing faults in the scan-based integrated circuit. The number of scan chains that can be supported by the ATE is significantly increased. Methods are further proposed to reorder scan cells in selected scan chains, to generate the broadcast scan patterns and virtual scan patterns, and to synthesize the broadcaster and a compactor in the scan-based integrated circuit.The scan architecture used can also be random access scan based, where the integrated circuit comprises an array of random access scan (RAS) cells that are randomly and uniquely addressable. In random access scan, test patterns can be applied by selectively updating RAS cells and test responses can be observed through a direct read-out process. Eliminating the shifting process inherent in serial scan, random access scan produces much lower test power dissipation than serial scan.
    • 用于在基于扫描的集成电路中的ATE(自动测试设备)中降低测试数据量和测试应用时间的广播,系统和方法。 基于扫描的集成电路包含多个扫描链,每个扫描链包括串联耦合的多个扫描单元。 广播公司是组合逻辑网络,耦合到可选的虚拟扫描控制器和可选的扫描连接器。 虚拟扫描控制器控制广播机构的操作。 系统发送存储在ATE中的虚拟扫描模式,并通过广播机构生成广播扫描模式,以测试基于扫描的集成电路中的制造故障。 ATE可以支持的扫描链数显着增加。 进一步提出了方法来重新排列所选择的扫描链中的扫描单元,以产生广播扫描图案和虚拟扫描图案,并且在基于扫描的集成电路中合成广播器和压缩器。 所使用的扫描结构也可以是基于随机存取扫描的集成电路,其中集成电路包括随机访问扫描(RAS)阵列,其随机且唯一可寻址。 在随机存取扫描中,可以通过选择性地更新RAS细胞来应用测试模式,并且可以通过直接读出过程来观察测试响应。 消除串行扫描固有的移位过程,随机访问扫描产生比串行扫描低得多的测试功耗。
    • 90. 发明授权
    • Memory cell with reduced DIBL and Vss resistance
    • 具有降低的DIBL和Vss电阻的存储单元
    • US07170130B2
    • 2007-01-30
    • US10915771
    • 2004-08-11
    • Shenqing FangKuo-Tung ChangPavel FastenkoZhigang Wang
    • Shenqing FangKuo-Tung ChangPavel FastenkoZhigang Wang
    • H01L29/788
    • H01L29/66825
    • According to one exemplary embodiment, a method for fabricating a floating gate memory cell on substrate comprises a step of forming a spacer adjacent to a source sidewall of a stacked gate structure, where the stacked gate structure is situated over a channel region in substrate. The method further comprises forming a high energy implant doped region adjacent to the spacer in the source region of substrate. The method further comprises forming a recess in a source region of the substrate, where the recess has a sidewall, a bottom, and a depth, and where the sidewall of the recess is situated adjacent to a source of the floating gate memory cell. According to this exemplary embodiment, the spacer causes the source to have a reduced lateral straggle and diffusion in the channel region, which causes a reduction in drain induced barrier lowering (DIBL) in the floating gate memory cell.
    • 根据一个示例性实施例,用于在衬底上制造浮动栅极存储器单元的方法包括形成与层叠栅极结构的源极侧壁相邻的间隔物的步骤,其中堆叠的栅极结构位于衬底中的沟道区域之上。 该方法还包括在衬底的源区中形成与间隔物相邻的高能注入掺杂区。 该方法还包括在衬底的源极区域中形成凹部,其中凹部具有侧壁,底部和深度,并且凹部的侧壁位于与浮动栅极存储单元的源极相邻的位置。 根据该示例性实施例,间隔件导致源极在通道区域中具有减小的横向偏移和扩散,这导致浮动栅极存储单元中的漏极感应势垒降低(DIBL)的减小。