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    • 83. 发明申请
    • Core-Shell-Shell Nanowire Transistor
    • 核壳壳纳米线晶体管
    • US20110163297A1
    • 2011-07-07
    • US13050750
    • 2011-03-17
    • Mark A. CrowderYutaka Takafuji
    • Mark A. CrowderYutaka Takafuji
    • H01L29/06H01L29/775B82Y99/00
    • H01L29/0665B82Y10/00H01L29/0673H01L29/068H01L29/42384H01L29/42392H01L29/66742H01L29/6675H01L29/78621H01L29/78696H01L51/0048H01L51/055Y10S438/962Y10S977/773Y10S977/774Y10S977/938
    • A fabrication method is provided for a core-shell-shell (CSS) nanowire transistor (NWT). The method provides a cylindrical CSS nanostructure with a semiconductor core, an insulator shell, and a conductive shell. The CSS nanostructure has a lower hemicylinder overlying a substrate surface. A first insulating film is conformally deposited overlying the CSS nanostructure and anisotropically plasma etched. Insulating reentrant stringers are formed adjacent the nanostructure lower hemicylinder. A conductive film is conformally deposited and selected regions are anisotropically plasma etched, forming conductive film gate straps overlying a gate electrode in a center section of the CSS nanostructure. An isotropically etching removes the insulating reentrant stringers adjacent the center section of the CSS nanostructure, and an isotropically etching of the conductive shell overlying the S/D regions is performed. A screen oxide layer is deposited over the CSS nanostructure. The source/drain (S/D) regions in end sections of the CS nanostructure flanking are doped.
    • 提供了用于核 - 壳 - 壳(CSS)纳米线晶体管(NWT)的制造方法。 该方法提供了具有半导体芯,绝缘体壳和导电壳的圆柱形CSS纳米结构。 CSS纳米结构具有覆盖衬底表面的较低的半圆柱体。 第一绝缘膜被保形地沉积在CSS纳米结构和各向异性等离子体蚀刻上。 在纳米结构较低的半圆柱体附近形成绝缘折痕桁条。 导电膜被共形沉积,并且选择的区域是各向异性等离子体蚀刻,在CSS纳米结构的中心部分形成覆盖栅电极的导电膜栅极带。 各向同性蚀刻除去邻近CSS纳米结构的中心部分的绝缘折返桁条,并且执行覆盖S / D区域的导电壳体的各向同性蚀刻。 屏幕氧化物层沉积在CSS纳米结构上。 在CS纳米结构侧面的末端部分的源极/漏极(S / D)区域被掺杂。
    • 85. 发明授权
    • Active silicon device on a cleaved silicon-on-insulator substrate
    • 在绝缘体上的绝缘体基板上的有源硅器件
    • US07659582B2
    • 2010-02-09
    • US11698558
    • 2007-01-26
    • Steve DroesMasao MoriguchiYutaka Takafuji
    • Steve DroesMasao MoriguchiYutaka Takafuji
    • H01L27/01H01L27/12H01L31/0392
    • H01L21/76254H01L27/1266H01L29/78603
    • A system and method for hydrogen (H) exfoliation are provided for attaching silicon-on-insulator (SOI) fabricated circuits to carrier substrates. The method comprises: providing a SOI substrate, including a silicon (Si) active layer and buried oxide (BOX) layer overlying a Si substrate; forming a circuit in the Si active layer; forming a blocking mask over selected circuit areas; implanting H in the Si substrate; annealing; removing the blocking mask; in response to the H implanting, forming a cleaving plane in the Si substrate; bonding the circuit the top oxide layer to the carrier substrate; and, cleaving the Si substrate. More specifically, the cleaving plane is formed along a horizontal peak concentration (Rp) H layer in the Si substrate and along the buried oxide layer interface.
    • 提供氢(H)剥离的系统和方法用于将绝缘体上硅(SOI)制造的电路附着到载体衬底上。 该方法包括:提供SOI衬底,其包括覆盖在Si衬底上的硅(Si)有源层和掩埋氧化物(BOX)层; 在Si有源层中形成电路; 在选定的电路区域上形成阻挡掩模; 在Si衬底中注入H; 退火; 去除阻挡掩模; 响应于H植入,在Si衬底中形成切割平面; 将电路的顶部氧化物层接合到载体衬底; 并切割Si衬底。 更具体地说,切割平面沿着Si衬底中的水平峰值浓度(Rp)H层并且沿掩埋氧化物层界面形成。