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    • 82. 发明授权
    • Method for controlling the thickness of a thin crystal film
    • 控制薄晶膜厚度的方法
    • US4855013A
    • 1989-08-08
    • US92348
    • 1987-09-02
    • Kimihiro OhtaTadashi NakagawaTakeshi KojimaTsunenori SakamotoNaoyuki Kawai
    • Kimihiro OhtaTadashi NakagawaTakeshi KojimaTsunenori SakamotoNaoyuki Kawai
    • C23C14/06C30B23/02
    • C30B29/40C23C14/0617C30B23/002
    • A method for controlling the thickness of a thin crystal film which is grown in a vacuum atmosphere, comprising the steps of: generating an electron beam in the vacuum atmosphere; directing the electron beam thus generated to a crystal being grown to obtain a diffraction pattern of the crystal; detecting the variations in time of the intensity of the diffraction pattern thus obtained; obtaining the number of oscillations from the variations thus detected; and interrupting the growth of the crystal in synchronism with the oscillations of the intensity when the number reaches a predetermined number. The composition ratio of a mixed crystal can be also determined by the ratio among the frequency of oscillations of each crystal which constitutes the mixed crystal. The oscillations of the intensity of the RHEED pattern can be observed more than 400 times so that the thickness of the grown thin crystal film can be measured with the accuracy higher than 1000 .ANG. in terms of the mono-layer.
    • 一种用于控制在真空气氛中生长的薄晶体膜的厚度的方法,包括以下步骤:在真空气氛中产生电子束; 将由此产生的电子束引导到正在生长的晶体上以获得晶体的衍射图案; 检测由此获得的衍射图的强度的时间变化; 从所检测的变化中获得振荡次数; 并且当数量达到预定数量时与强度的振荡同步地中断晶体的生长。 混合晶体的组成比也可以通过构成混合晶体的各晶体的振荡频率之比来确定。 可以观察到RHEED图案的强度的振荡超过400次,从而以单层为单位,以高于1000安培的精度测量生长的薄晶体膜的厚度。
    • 89. 发明授权
    • Method of manufacturing light-emitting device
    • 制造发光装置的方法
    • US09153752B2
    • 2015-10-06
    • US13817320
    • 2011-08-02
    • Takeshi Kojima
    • Takeshi Kojima
    • H01L21/00H01L33/50H01L33/52H01L21/66H01L33/00H01L33/56
    • H01L33/502H01L22/10H01L33/005H01L33/50H01L33/52H01L33/56H01L2933/0041
    • A method of manufacturing a light-emitting device including a light-emitting element which emits light with a predetermined wavelength and a wavelength conversion portion including a fluorescent substance which is excited by the light emitted from the light-emitting element to emit fluorescence with a wavelength different from the predetermined wavelength, includes the followings. First, spraying so as to apply a liquid mixture containing a layered silicate mineral and a translucent ceramic precursor on the light-emitting element from a nozzle is performed while the nozzle is moved relative to the light-emitting element. Subsequently, forming of the wavelength conversion portion by heating the sprayed and applied liquid mixture is performed.
    • 一种制造发光装置的方法,所述发光装置包括发射具有预定波长的光的发光元件和包括荧光物质的波长转换部分,所述荧光物质被从所述发光元件发射的光激发以发射具有波长的荧光 与预定波长不同,包括以下内容。 首先,在喷嘴相对于发光元件移动的同时,进行喷涂,以从喷嘴将含有层状硅酸盐矿物和半透明陶瓷前体的液体混合物施加到发光元件上。 随后,进行通过加热喷射和施加的液体混合物来形成波长转换部分。