专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

81. 发明授权

US5709958A Electronic parts 失效
标题翻译：电子零件
公开(公告)号：US5709958A
公开(公告)日：1998-01-20
申请号：US451528
申请日：1995-05-26
申请人： Hiroshi Toyoda , Hisashi Kaneko , Masahiko Hasunuma , Takashi Kawanoue , Hiroshi Tomita , Akihiro Kajita , Masami Miyauchi , Takashi Kawakubo , Sachiyo Ito
发明人： Hiroshi Toyoda , Hisashi Kaneko , Masahiko Hasunuma , Takashi Kawanoue , Hiroshi Tomita , Akihiro Kajita , Masami Miyauchi , Takashi Kawakubo , Sachiyo Ito
IPC分类号： H01L21/3205 , H01L23/528 , H01L23/532 , H01L29/43
CPC分类号： H01L21/32051 , H01L23/5283 , H01L23/532 , H01L23/53223 , H01L2924/0002 , Y10T428/12528 , Y10T428/12674 , Y10T428/12681
摘要： An electronic part comprising an amorphous thin film formed on a substrate; and a metal wiring formed on the surface of the amorphous thin film; wherein an interatomic distance corresponding to a peak of halo pattern appearing in diffraction measurement of the amorphous thin film approximately matches with a spacing of a particular crystal plane defined with the first nearest interatomic distance of the metal wiring. An electronic part provided with a metal wiring formed of highly orientated crystal wherein half or more of all grain boundaries are small angle grain boundaries defined by one of grain boundaries with a relative misorientation of 10.degree. or less in tilt, rotation and combination thereof around orientation axes of neighboring crystal grains; coincidence boundaries where a .SIGMA. value is 10 or less; and grain boundaries with a relative misorientation of 3.degree. or less from the coincidence boundary. A method for manufacturing an electronic part, comprising the step of depositing a conductor layer which is mainly formed of one selected from Al and Cu on a substrate via an insulative layer, a barrier layer, a contact layer or an amorphous thin film layer wherein one element selected from Ga, In, Cd, Bi, Pb, Sn and Tl is supplied before or during the deposition of the conductor layer.
摘要翻译：一种电子部件，包括形成在基板上的非晶薄膜; 以及形成在所述非晶薄膜的表面上的金属布线; 其中对应于在非晶薄膜的衍射测量中出现的晕轮图案的峰值的原子间距离大致与由金属布线的第一最接近的原子间距离限定的特定晶面的间隔相匹配。一种电子部件，其具有由高取向晶体形成的金属布线，其中所有晶界的一半以上是由倾斜，旋转及其组合在取向方向上的相位差取向为10°以下的晶界之一限定的小角度晶界相邻晶粒的轴; SIGMA值为10以下的重合边界; 晶界与重合边界的相对误差为3°以下。一种电子部件的制造方法，其特征在于，包括以下步骤：通过绝缘层，阻挡层，接触层或无定形薄膜层，在基板上沉积主要由选自Al和Cu的一个导体层形成的步骤，其中一个选自Ga，In，Cd，Bi，Pb，Sn和Tl的元素在导体层的沉积之前或期间提供。

82. 发明授权

US08102098B2 Piezoelectric-driven MEMS element 有权
标题翻译：压电式MEMS元件
公开(公告)号：US08102098B2
公开(公告)日：2012-01-24
申请号：US12578664
申请日：2009-10-14
申请人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/047 , H01L41/094
摘要： A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
摘要翻译：压电驱动MEMS元件包括基板，光束，固定部分，固定电极部分和电源。光束设置有下电极膜，下压电膜，中间电极膜，上压电膜和上电极膜。固定部分将光束的一端固定到基板上，以便在基板上方具有间隙地保持光束。固定电极部分在固定电极部分和光束的另一端之间具有电容性间隙。此外，下电极膜，中间电极膜和上电极膜中的至少一个或两个比其余部分厚。

83. 发明授权

US07772745B2 MEMS device with low operation voltage, large contact pressure force, and large separation force, and portable communication terminal with the MEMS device 失效
标题翻译：具有低工作电压，大接触压力和大分离力的MEMS器件，以及具有MEMS器件的便携式通信终端
公开(公告)号：US07772745B2
公开(公告)日：2010-08-10
申请号：US12040582
申请日：2008-02-29
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/08
CPC分类号： H01L41/094 , B81B3/001 , B81B2201/014 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01H2059/0072
摘要： It is made possible to provide a MEMS device that has a low operation voltage, a large contact pressure force, and a large separation force. A MEMS device includes: a substrate; a supporting unit that is provided on the substrate; a fixed electrode that is provided on the substrate; an actuator that includes a first electrode, a first piezoelectric film formed on the first electrode, and a second electrode formed on the first piezoelectric film, one end of the actuator being fixed onto the substrate with the supporting unit, the actuator extending in a direction connecting the supporting unit and the fixed electrode, the first electrode being located to face the fixed electrode; and a stopper unit that is located above a straight line connecting the supporting unit and the fixed electrode, and is located on the substrate so as to face the first electrode.
摘要翻译：可以提供具有低操作电压，大的接触压力和大的分离力的MEMS器件。 MEMS器件包括：衬底; 设置在基板上的支撑单元; 设置在基板上的固定电极; 致动器，其包括第一电极，形成在第一电极上的第一压电膜和形成在第一压电膜上的第二电极，致动器的一端通过支撑单元固定到基板上，致动器沿着方向连接所述支撑单元和所述固定电极，所述第一电极位于与所述固定电极相对的位置; 以及位于连接支撑单元和固定电极的直线上方并且位于基板上以与第一电极相对的止动单元。

84. 发明授权

US07675393B2 MEMS switch 失效
标题翻译： MEMS开关
公开(公告)号：US07675393B2
公开(公告)日：2010-03-09
申请号：US11673984
申请日：2007-02-12
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/20 , H01H1/50 , H01H2057/006
摘要： A MEMS switch according to one aspect of the present invention comprises: a substrate; a fixing portion formed on the substrate; a movable beam including a lower electrode, a first insulation layer formed on the lower electrode, and an upper electrode formed on the first insulation layer, the movable beam having one end fixed by the fixing portion, the lower electrode and the first insulation layer having an opening going through both of the lower electrode and the first insulation layer; a fixed electrode formed on the substrate facing to a bottom surface of the other end of the movable beam, the fixed electrode facing to the opening; a contact electrode formed in the opening so as to project below the bottom surface of the movable beam and to be electrically connected to the upper electrode as well as to be insulated from the lower electrode; and a second insulation layer formed on the fixed electrode and having an opening facing to the contact electrode so as to insulate the lower electrode from the fixed electrode and to permit the contact electrode to come into contact with the fixed electrode.
摘要翻译：根据本发明的一个方面的MEMS开关包括：基板; 形成在所述基板上的固定部; 可动梁，包括下电极，形成在下电极上的第一绝缘层和形成在第一绝缘层上的上电极，可动梁的一端由固定部分固定，下电极和第一绝缘层具有穿过下电极和第一绝缘层的开口; 形成在所述基板上的固定电极，所述固定电极面对所述可动光束的另一端的底面，所述固定电极面向所述开口; 形成在所述开口中的接触电极，以便在所述可移动光束的底表面下方突出并且与所述上电极电连接并且与所述下电极绝缘; 以及形成在固定电极上并具有面向接触电极的开口以便使下电极与固定电极绝缘并允许接触电极与固定电极接触的第二绝缘层。

85. 发明授权

US07560853B2 Thin film piezoelectric resonator, method of manufacturing the same, and filter including the same 失效
标题翻译：薄膜压电谐振器及其制造方法以及包括该薄膜压电谐振器的滤波器
公开(公告)号：US07560853B2
公开(公告)日：2009-07-14
申请号：US11675811
申请日：2007-02-16
申请人： Kenya Sano , Kazuhiko Itaya , Ryoichi Ohara , Takashi Kawakubo
发明人： Kenya Sano , Kazuhiko Itaya , Ryoichi Ohara , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： H03H9/564 , H03H3/02 , H03H9/174 , H03H9/568 , H03H2003/023
摘要： A thin film piezoelectric resonator includes: a substrate having a cavity; a first dielectric layer provided on the substrate to cover the cavity; a second dielectric layer provided on the substrate and disposed in a peripheral region of the cavity, and having a thickness larger than the first dielectric layer; a first electrode provided on the first dielectric layer and above the cavity; a piezoelectric layer provided on the first electrode and disposed to extend to a region on the second dielectric layer; and a second electrode provided on the piezoelectric layer and above the first electrode.
摘要翻译：薄膜压电谐振器包括：具有空腔的基板; 设置在所述基板上以覆盖所述空腔的第一介电层; 第二电介质层，设置在所述基板上并且设置在所述空腔的周边区域中，并且具有比所述第一介电层大的厚度; 第一电极，其设置在所述第一介电层上并且在所述空腔上方; 压电层，设置在所述第一电极上并且设置成延伸到所述第二电介质层上的区域; 以及设置在所述压电层上和所述第一电极上方的第二电极。

86. 发明授权

US07436103B2 Variable inductor element and mobile wireless apparatus 失效
标题翻译：可变电感器元件和移动无线设备
公开(公告)号：US07436103B2
公开(公告)日：2008-10-14
申请号：US11646624
申请日：2006-12-28
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H02N2/00 , H01L41/08
CPC分类号： H01F21/04 , H01F17/0006 , H01L41/0946 , H02N2/10
摘要： A variable inductor element has a substrate, a first inductor element which is fixedly arranged on the substrate, a second inductor element which is supported by the substrate, is magnetically coupled with the first inductor element and variably control a mutual conductance with the first inductor element, and at least one piezoelectric actuator pair which torsionally drives the second inductor element.
摘要翻译：可变电感器元件具有衬底，固定地布置在衬底上的第一电感器元件，由衬底支撑的第二电感器元件，与第一电感器元件磁耦合并且可变地控制与第一电感器元件的互导以及至少一个扭转地驱动第二电感器元件的压电致动器对。

87. 发明申请

US20080238257A1 MEMS DEVICE AND PORTABLE COMMUNICATION TERMINAL WITH SAID MEMS DEVICE 失效
标题翻译：具有标定MEMS器件的MEMS器件和便携式通信终端
公开(公告)号：US20080238257A1
公开(公告)日：2008-10-02
申请号：US12040582
申请日：2008-02-29
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/083 , H01L41/047 , H01L41/053
CPC分类号： H01L41/094 , B81B3/001 , B81B2201/014 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01H2059/0072
摘要： It is made possible to provide a MEMS device that has a low operation voltage, a large contact pressure force, and a large separation force. A MEMS device includes: a substrate; a supporting unit that is provided on the substrate; a fixed electrode that is provided on the substrate; an actuator that includes a first electrode, a first piezoelectric film formed on the first electrode, and a second electrode formed on the first piezoelectric film, one end of the actuator being fixed onto the substrate with the supporting unit, the actuator extending in a direction connecting the supporting unit and the fixed electrode, the first electrode being located to face the fixed electrode; and a stopper unit that is located above a straight line connecting the supporting unit and the fixed electrode, and is located on the substrate so as to face the first electrode.
摘要翻译：可以提供具有低操作电压，大的接触压力和大的分离力的MEMS器件。 MEMS器件包括：衬底; 设置在基板上的支撑单元; 设置在基板上的固定电极; 致动器，其包括第一电极，形成在第一电极上的第一压电膜和形成在第一压电膜上的第二电极，致动器的一端通过支撑单元固定到基板上，致动器沿着方向连接所述支撑单元和所述固定电极，所述第一电极位于与所述固定电极相对的位置; 以及位于连接支撑单元和固定电极的直线上方并且位于基板上以与第一电极相对的止动单元。

88. 发明申请

US20080074006A1 MICRO-ELECTROMECHANICAL DEVICE 失效
标题翻译：微电子器件
公开(公告)号：US20080074006A1
公开(公告)日：2008-03-27
申请号：US11686731
申请日：2007-03-15
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/047
CPC分类号： B81B3/0072 , B81B2201/032 , H01G5/16 , H01G5/18 , H01L41/0946 , H01L41/0953
摘要： A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.
摘要翻译：微机电装置包括第一压电致动器和第二压电致动器。第一压电致动器包括固定在基板上的第一光束和从第一连接端到第一工作端平行于第一光束延伸的第二光束。第二压电致动器包括固定在基板上的与第一光束间隔开的第三光束和从第二连接端到第二工作端平行于第三光束延伸的第四光束。第二工作端在与基板的表面垂直的方向上面向第一工作端。

89. 发明申请

US20080047816A1 MEMS SWITCH 审中-公开
标题翻译： MEMS开关
公开(公告)号：US20080047816A1
公开(公告)日：2008-02-28
申请号：US11779367
申请日：2007-07-18
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01H1/04 , B81B3/00
CPC分类号： H01H1/0036 , H01H1/023 , H01H1/04 , H01H2001/0052 , H01H2057/006
摘要： A Micro-Electro-Mechanical System (MEMS) switch includes: a substrate; a fixed electrode provided on the substrate; and a beam fixed to the substrate and including a movable electrode disposed to face the fixed electrode. The beam is capable of being bent and displaced in a direction of the substrate to allow the movable electrode to directly contact with the fixed electrode. At least one of the fixed electrode and the movable electrode contains Au, and the other contains at least one metal selected from a group consisting of Ir, Rh, Os, Ru, Re and Te as a main component.
摘要翻译：微机电系统（MEMS）开关包括：基板; 设置在基板上的固定电极; 以及固定到所述基板并且包括设置成面对所述固定电极的可动电极的光束。光束能够在基板的方向上弯曲和位移，以允许可动电极与固定电极直接接触。固定电极和可动电极中的至少一个包含Au，另一方含有选自由Ir，Rh，Os，Ru，Re和Te组成的组中的至少一种金属作为主要成分。

90. 发明申请

US20070151429A1 Bar material supply device of numerically controlled automatic lathe 有权
标题翻译：数控自动车床棒料供料装置
公开(公告)号：US20070151429A1
公开(公告)日：2007-07-05
申请号：US10579747
申请日：2004-11-22
申请人： Takaichi Nakaya , Takashi Kawakubo , Tadahiro Iida , Youhei Nonaka
发明人： Takaichi Nakaya , Takashi Kawakubo , Tadahiro Iida , Youhei Nonaka
IPC分类号： B23B13/00
CPC分类号： B23B13/128 , B23B13/021 , Y10T82/2514 , Y10T82/2518 , Y10T82/2521
摘要： There is provided a bar material supply device of a simple configuration suited to machining of a bar material without increasing machining cost even when a short bar material such as an end material is machined. The bar material supply device includes a stocker 12 for supplying a bar material w on an axis C of a spindle 230, a base 10 attached to a head stock 220, a push rod 15 disposed in the base 10 to move back and forth on the axis C and to push the bar material w fed from the stocker 12, a push rod guide 11 disposed in the base 10 to guide the back-and-forth movement of the push rod 15, a plurality of rollers arranged on both sides of the axis C of the base 10 to hold the push rod 15 on the axis C therebetween, one of the plurality of rollers being constituted as a driving roller 135 which is rotated by a driving body disposed in the base, and at least one of the other rollers excluding the driving roller 135 being constituted as a driven roller 132 which is rotated without any slippage with the push rod 15, and rotation detection means 133 for detecting the rotation of the driven roller 132.
摘要翻译：提供了一种简单配置的棒材料供应装置，即使在诸如端材料的短棒材料被加工时，也可以不增加加工成本而适用于棒材的加工。棒材供给装置包括用于在主轴230的轴线C上供给棒料w的储料器12，附接到头料220的基座10，设置在基座10中的推杆15，并且推动从储料器12供给的棒材w;设置在基座10中的引导杆11，用于引导推杆15的往复运动;多个辊，基座10的轴线C，以将推杆15保持在其间的轴线C上，多个辊中的一个被构造为由设置在基座中的驱动体旋转的驱动辊135，并且至少一个不包括驱动辊135的辊被构成为与推杆15无任何滑动而旋转的从动辊132，以及用于检测从动辊132的旋转的旋转检测装置133。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式