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    • 84. 发明授权
    • Micro movable device and interferometer
    • 微动移动装置和干涉仪
    • US08520279B2
    • 2013-08-27
    • US12614903
    • 2009-11-09
    • Norinao KoumaOsamu TsuboiTsuyoshi Matsumoto
    • Norinao KoumaOsamu TsuboiTsuyoshi Matsumoto
    • G02B26/08
    • G02B26/0841G01J3/4535H02N1/006
    • A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.
    • 微型可移动装置包括可移动部件,固定部分和连接到可移动部件和固定部分的连接部分。 可动构件包括一对电极。 固定部分包括与可动构件的电极配合的一对电极,以产生用于在可移动构件的厚度方向上平移的驱动力。 各连接部分连接到可移动部件的连接点彼此间隔开。 当沿着两个连接点的间隔方向观察时,可动构件的电极位于两个相互间隔的连接点之间。