会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 83. 发明申请
    • DEPOSITED SEMICONDUCTOR STRUCTURE TO MINIMIZE N-TYPE DOPANT DIFFUSION AND METHOD OF MAKING
    • 沉积半导体结构以最小化N型掺杂物扩散和制备方法
    • US20100163831A1
    • 2010-07-01
    • US12632013
    • 2009-12-07
    • S. Brad Herner
    • S. Brad Herner
    • H01L45/00
    • H01L45/08H01L27/1021H01L27/2409H01L27/2463H01L29/161H01L29/165H01L45/04H01L45/1233H01L45/145H01L45/146
    • A microelectronic structure including a layerstack is provided, the layerstack including: (a) a first layer including semiconductor material that is very heavily n-doped before being annealed, having a first-layer before-anneal dopant concentration, the first layer being between about 50 and 200 angstroms thick, wherein the first layer is above a substrate, and wherein the first layer is heavily n-doped after being annealed, having a first-layer after-anneal dopant concentration, the first-layer before-anneal dopant concentration exceeding the first-layer after-anneal concentration; (b) a second layer including semiconductor material that is not heavily doped before being annealed, having a second-layer before-anneal dopant concentration, the second layer being about as thick as the first layer, wherein the second layer is above and in contact with the first layer, and wherein the second layer includes heavily n-doped semiconductor material after being annealed, having a second-layer after-anneal dopant concentration, the second-layer after-anneal dopant concentration exceeding the second-layer before-anneal concentration; and (c) a third layer including semiconductor material that is above and in contact with the second layer and that is not heavily n-doped before or after being annealed, the third layer having a third-layer dopant concentration.
    • 提供了包括层叠的微电子结构,所述层叠包括:(a)包括半导体材料的第一层,所述第一层包括在退火之前非常重掺杂的半导体材料,具有第一层预退火掺杂剂浓度,所述第一层在约 50和200埃厚,其中第一层位于衬底之上,并且其中第一层在退火之后被重掺杂,具有第一层退火后掺杂剂浓度,第一层预退火掺杂剂浓度超过 第一层退火后浓度; (b)包含半导体材料的第二层,其在退火之前未被重掺杂,具有第二层预退火掺杂剂浓度,所述第二层约为第一层厚度,其中第二层高于并接触 并且其中所述第二层在退火之后包括重度n掺杂的半导体材料,具有第二层后退火掺杂剂浓度,所述第二层后退火掺杂剂浓度超过所述第二层预退火后浓度 ; 和(c)包含半导体材料的第三层,所述第三层包括在第二层之上并与第二层接触并且在退火之前或之后不重掺杂的半导体材料,第三层具有第三层掺杂剂浓度。