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    • 82. 发明授权
    • Tapered thermal actuator
    • 锥形热致动器
    • US06820964B2
    • 2004-11-23
    • US10293077
    • 2002-11-13
    • Christopher N. DelametterDavid P. TrauernichtJohn A. LebensEdward P. FurlaniStephen F. Pond
    • Christopher N. DelametterDavid P. TrauernichtJohn A. LebensEdward P. FurlaniStephen F. Pond
    • B41J204
    • B41J2/14427
    • An apparatus for a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bending portion extending from the base element and a free end portion residing in a first position. The thermo-mechanical bending portion has a base end width, wb, adjacent the base element and a free end width, wf, adjacent the free end portion wherein the base end width is substantially greater than the free end width. The thermal actuator further comprises apparatus adapted to apply a heat pulse directly to the thermo-mechanical bending portion causing the deflection of the free end portion of the cantilevered element to a second position. The width of the thermo-mechanical bending portion may reduce substantially quadratically or in an inverse power fashion as a function of the distance away from the base element or in at least one step reduction. The apparatus adapted to apply a heat pulse may comprise a thin film resistor. Alternatively, the thermo-mechanical bending portion may comprise a layer of electrically resistive material having a heater resistor formed therein to which is applied an electrical pulse to cause rapid deflection of the free end portion and ejection of a liquid drop.
    • 公开了一种用于微机械装置的热致动器的装置,特别是诸如喷墨打印头的液滴发射器。 所公开的热致动器包括基座元件和悬臂元件,悬臂元件包括从基座元件延伸的热机械弯曲部分和位于第一位置的自由端部分。 热机械弯曲部分具有与基部元件相邻的基端宽度wb和邻近自由端部分的自由端宽度wf,其中基端宽度基本上大于自由端宽度。 热致动器还包括适于将热脉冲直接施加到热机械弯曲部分的装置,导致悬臂元件的自由端部偏转到第二位置。 热机械弯曲部分的宽度可以基于距离基部元件的距离或者至少一个阶梯减小的函数基本上二次或以反向功率方式减小。 适于施加加热脉冲的装置可以包括薄膜电阻器。 或者,热机械弯曲部分可以包括具有形成在其中的加热电阻器的电阻材料层,其上施加电脉冲以引起自由端部分的快速偏转和液滴的喷射。
    • 83. 发明授权
    • Thermal actuator with spatial thermal pattern
    • US06721020B1
    • 2004-04-13
    • US10293653
    • 2002-11-13
    • Christopher N. DelametterDavid P. TrauernichtEdward P. FurlaniJohn A. Lebens
    • Christopher N. DelametterDavid P. TrauernichtEdward P. FurlaniJohn A. Lebens
    • B41J204
    • B41J2/04573B41J2/04585B41J2/04588B41J2/14427B41J2/1628B41J2/1639B41J2/1646B41J2/1648
    • An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end adjacent the base element and a free end adjacent the free end tip. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, &Dgr;T1b, that is greater than a first deflector layer free end temperature increase, &Dgr;T1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, &Dgr;T2b that is greater than a second deflector layer free end temperature increase, &Dgr;T2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant &tgr;B. The thermal actuator is activated by a heat pulses of duration &tgr;p wherein &tgr;p