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81. 发明授权

US07024756B2 Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer 失效
标题翻译：制造具有可蚀刻粘合CMP停止层的垂直记录磁头极尖的方法
公开(公告)号：US07024756B2
公开(公告)日：2006-04-11
申请号：US10631706
申请日：2003-07-30
申请人： Quang Le , Jui-lung Li , Jeffrey S. Lille , Son Van Nguyen
发明人： Quang Le , Jui-lung Li , Jeffrey S. Lille , Son Van Nguyen
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/1278 , G11B5/3106 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.
摘要翻译：制造磁头组件的方法包括形成从头表面凹陷的第二极片层，在第二极片层上形成反应离子可蚀刻（可分离）极尖端形成层，形成钽的粘附/停止层（Ta），在粘合/停止层上形成光刻胶掩模，其中具有用于使粘附/阻挡层和极尖形成层图案化的开口具有另一个开口，反应离子蚀刻（RIE）通过开口至形成另一个开口，在另一个开口中形成具有位于粘附/停止层顶部之上的顶部的第二极靴极尖，并且在第二极片极尖的顶部进行化学机械抛光（CMP），直到CMP接触粘附/停止层。本发明还包括由这种方法制成的磁头。

82. 发明申请

US20060044682A1 Self aligned wrap around shield for perpendicular magnetic recording 有权
标题翻译：围绕屏蔽的自对准涡卷用于垂直磁记录
公开(公告)号：US20060044682A1
公开(公告)日：2006-03-02
申请号：US11116753
申请日：2005-04-27
申请人： Quang Le , Nian-Xiang Sun , Howard Zolla
发明人： Quang Le , Nian-Xiang Sun , Howard Zolla
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/1475 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A write element for use in perpendicular magnetic recording. The write element including a write pole and a self aligned wrap around shield that can have a trailing shield gap thickness that is different from its side shield gap thickness. The materials making up the trailing shield gap and the side shield gaps can be different materials or can be the same material deposited in two different steps. The side or wrap around portions of the trailing shield can extend down to the level of the leading edge of the write pole or can terminate at some point between the levels of the leading and trailing edge to form a partial wrap around trailing shield.
摘要翻译：在垂直磁记录中使用的写元件。包括写磁极和围绕屏蔽一个自对准包裹，可以有一个尾屏蔽间隙的厚度是从其侧面屏蔽间隙的厚度不同的写元件。的材料构成的尾屏蔽件间隙和侧屏蔽间隙可以是不同的材料，或者可以是沉积于两个不同的步骤相同的材料。侧或缠绕在尾屏蔽件的部分可以向下延伸到写入极的前缘的水平或可以在前缘和后缘的电平之间的一些点终止以形成围绕尾屏蔽件的部分包裹。

83. 发明申请

US20060000794A1 Methods of fabricating magnetic write heads with side and trailing shield structures 失效
标题翻译：制造具有侧面和后面屏蔽结构的磁性写入头的方法
公开(公告)号：US20060000794A1
公开(公告)日：2006-01-05
申请号：US10881278
申请日：2004-06-30
申请人： Quang Le
发明人： Quang Le
IPC分类号： B44C1/22 , C03C15/00
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： One illustrative method of fabricating magnetic write heads includes the acts of forming a pole tip structure at least partially over a magnetic shaping layer; forming non-magnetic materials around and over the pole tip structure; etching side shield voids within the non-magnetic materials adjacent the pole tip structure while leaving non-magnetic materials around the pole tip structure; electroplating side shield materials within the side shield voids; and forming, over the non-magnetic materials above the pole tip structure, trailing shield materials which connect with the side shield materials adjacent the pole tip structure. Preferably, the non-magnetic materials are etched with use of a reactive ion etching (RIE) process. For etching the side shield voids and electroplating the side shield materials, the method may include the additional acts of forming a stop layer over the non-magnetic materials; forming a resist layer over the stop layer; patterning side shield openings through the resist layer; etching the side shield voids in the non-magnetic materials with the patterned resist layer in place; removing the patterned resist layer; electroplating the side shield materials over the non-magnetic materials and within the side shield voids; and performing a chemical-mechanical polishing (CMP) until the stop layer is reached.
摘要翻译：一种制造磁性写入头的说明性方法包括至少部分地在磁性成形层上形成极尖结构的动作; 在极尖结构周围形成非磁性材料; 在邻近极尖结构的非磁性材料内蚀刻侧屏蔽空隙，同时在磁极端结构周围留下非磁性材料; 电镀侧屏蔽材料在侧屏蔽空隙内; 并且在磁极末端结构上方的非磁性材料上形成与屏蔽材料相邻的靠近极端结构的后屏蔽材料。优选地，使用反应离子蚀刻（RIE）工艺来蚀刻非磁性材料。为了蚀刻侧屏蔽空隙并对侧屏蔽材料进行电镀，该方法可以包括在非磁性材料上形成停止层的附加动作; 在阻挡层上形成抗蚀剂层; 图案化侧屏蔽开口穿过抗蚀剂层; 在图案化的抗蚀剂层就位的情况下蚀刻非磁性材料中的侧屏蔽空隙; 去除图案化的抗蚀剂层; 将侧屏蔽材料电镀在非磁性材料上并在侧屏蔽空隙内; 并进行化学机械抛光（CMP）直到达到停止层。

84. 发明申请

US20050277299A1 Methods for fabricating read sensor for magnetic heads with reduced read track width 失效
标题翻译：用于制造磁头读取传感器的方法，读取磁道宽度减小
公开(公告)号：US20050277299A1
公开(公告)日：2005-12-15
申请号：US10856679
申请日：2004-05-28
申请人： Quang Le , Sue Zhang
发明人： Quang Le , Sue Zhang
IPC分类号： G11B5/31 , H01L21/311 , H01L21/314
CPC分类号： C23C16/44 , G11B5/3163 , G11B5/3169 , H01L21/3146
摘要： The fabrication of the read head sensor components where chemical mechanical polishing (CMP) stop layer is deposited above the sensor layers, a first reactive ion etch (RIE) layer and a second RIE layer are deposited, where the second RIE layer is etchable with a different ion species than the first RIE layer. A stencil layer is then deposited and patterned to create an etching stencil having the desired magnetic read track width of the sensor. An RIE step is then conducted in which the second RIE layer is etched. An RIE step for the first RIE layer is then conducted with a different ion species. Thereafter, the sensor layers are milled where the remaining portions of the first and second RIE layers act as a milling mask. A CMP assisted liftoff step is then conducted in which the remaining portions of the ion milling mask are removed.
摘要翻译：沉积化学机械抛光（CMP）停止层沉积在传感器层上方，第一反应离子蚀刻（RIE）层和第二RIE层的读取头传感器部件的制造，其中第二RIE层可以用不同的离子种类比第一个RIE层。然后沉积和图案化模板层以产生具有传感器的期望磁读取磁道宽度的蚀刻模版。然后进行RIE步骤，其中蚀刻第二RIE层。然后用不同的离子种类进行第一RIE层的RIE步骤。此后，将第一和第二RIE层的剩余部分用作铣削掩模的传感器层进行研磨。然后进行CMP辅助剥离步骤，其中除去离子铣削掩模的剩余部分。

85. 发明申请

US20050241140A1 High milling resistance write pole fabrication method for perpendicular recording 失效
标题翻译：用于垂直记录的高铣削电阻写极制造方法
公开(公告)号：US20050241140A1
公开(公告)日：2005-11-03
申请号：US10836867
申请日：2004-04-30
申请人： Amanda Baer , Quang Le , Kim Lee , Aron Pentek , Douglas Werner , Sue Zhang
发明人： Amanda Baer , Quang Le , Kim Lee , Aron Pentek , Douglas Werner , Sue Zhang
IPC分类号： G11B5/127 , G11B5/187
CPC分类号： G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10T29/49021 , Y10T29/49043
摘要： A method for constructing a tapered write pole, the method including the use of a bilayer hard mask.
摘要翻译：一种用于构造锥形写入极的方法，该方法包括使用双层硬掩模。

86. 发明申请

US20050219747A1 Trailing edge taper design and method for making a perpendicular write head with shielding 有权
标题翻译：后缘锥形设计和垂直写头的屏蔽方法
公开(公告)号：US20050219747A1
公开(公告)日：2005-10-06
申请号：US10815286
申请日：2004-03-31
申请人： Yimin Hsu , Quang Le , Jui-Lung Li , Ian McFadyen , James Nix , Neil Robertson , Mason Williams
发明人： Yimin Hsu , Quang Le , Jui-Lung Li , Ian McFadyen , James Nix , Neil Robertson , Mason Williams
IPC分类号： G11B5/127 , G11B5/147 , G11B5/187 , G11B5/31
CPC分类号： G11B5/3146 , G11B5/1278 , G11B5/1872 , G11B5/3116
摘要： A magnetic write head for us in perpendicular magnetic recording tapered trailing shield design for improved write flux, and field gradient performance.
摘要翻译：一种用于我们的磁性写头，用于垂直磁记录锥形后屏蔽设计，用于改善写通量和场梯度性能。

87. 发明申请

US20050185334A1 Method of depositing material into high aspect ratio features 有权
公开(公告)号：US20050185334A1
公开(公告)日：2005-08-25
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
发明人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/147
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

88. 发明申请

US20050070206A1 Slider fabrication system for sliders with integrated electrical lapping guides 失效
标题翻译：滑块制造系统，用于带集成电动研磨导轨的滑块
公开(公告)号：US20050070206A1
公开(公告)日：2005-03-31
申请号：US10675043
申请日：2003-09-29
申请人： Prakash Kasiraj , Quang Le , Huey Tzeng , Xiao Wu
发明人： Prakash Kasiraj , Quang Le , Huey Tzeng , Xiao Wu
IPC分类号： B24B37/00 , B24B49/16 , G11B5/60 , B24B49/00
CPC分类号： B24B49/16 , B24B37/00 , G11B5/3169
摘要： A slider is described with a resistive electro-lapping guide (ELG), which is aligned with a structure in the write head such as the throat height or trailing shield thickness and extends from the lapping region through the ABS and is connected to pads on the surface of the slider. In a second embodiment the ELG is disposed entirely in the section of the slider which will be removed by lapping. Another embodiment of the invention is a system for single slider lapping which simultaneously monitors the resistance of the read sensor or a read head ELG and at least one ELG that is aligned with a structure in the write head. A controller uses the resistance information to implement an algorithm which decides when lapping should be terminated.
摘要翻译：使用电阻式电动研磨引导件（ELG）描述滑块，其与写入头部中的结构对准，例如喉部高度或尾部屏蔽层厚度，并从研磨区域穿过ABS延伸并连接到滑块的表面。在第二实施例中，ELG完全设置在滑块的将通过研磨去除的部分中。本发明的另一个实施例是用于单个滑块研磨的系统，其同时监视读取传感器或读取头ELG和与写入头中的结构对准的至少一个ELG的电阻。控制器使用电阻信息来实现一种算法，该算法决定何时结束研磨。

89. 发明申请

US20050045848A1 Method for patterning a self-aligned coil using a damascene process 失效
标题翻译：使用镶嵌工艺图案化自对准线圈的方法
公开(公告)号：US20050045848A1
公开(公告)日：2005-03-03
申请号：US10652878
申请日：2003-08-29
申请人： Daniel Bedell , Quang Le , Edward Lee , Son Nguyen , Vladimir Nikitin , Murali Ramasubramanian
发明人： Daniel Bedell , Quang Le , Edward Lee , Son Nguyen , Vladimir Nikitin , Murali Ramasubramanian
IPC分类号： A62C2/00 , A62D1/00 , B44C1/22 , G11B5/17 , G11B5/31 , G11B5/39 , H01F41/04
CPC分类号： G11B5/3967 , G11B5/17 , G11B5/3116 , G11B5/313 , G11B5/3136 , G11B5/3163 , H01F41/041 , Y10T29/49021
摘要： A method for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.
摘要翻译：公开了一种使用镶嵌工艺图案化自对准线圈的方法。在设置在第一极层上的第一绝缘层中形成线圈腔。隔离层/籽晶层沿绝缘层中的线圈袋的壁被沉积。在线圈袋中形成铜，并在绝缘层上形成铜。铜平坦化到绝缘层。自对准线圈工艺将更多的铜包装到相同的线圈袋中，并松弛线圈对准公差。由于在写入期间线圈的间隔更加有效和均匀以减少头部的积聚，所以防止了突起。

90. 发明申请

US20050024779A1 Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer 失效
标题翻译：制造具有可蚀刻粘合CMP停止层的垂直记录磁头极尖的方法
公开(公告)号：US20050024779A1
公开(公告)日：2005-02-03
申请号：US10631706
申请日：2003-07-30
申请人： Quang Le , Jui-Iung Li , Jeffrey Lille , Son Nguyen
发明人： Quang Le , Jui-Iung Li , Jeffrey Lille , Son Nguyen
IPC分类号： G11B5/127 , G11B5/31
CPC分类号： G11B5/1278 , G11B5/3106 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.
摘要翻译：制造磁头组件的方法包括形成从头表面凹陷的第二极片层，在第二极片层上形成反应离子可蚀刻（可分离）极尖端形成层，形成钽的粘附/停止层（Ta），在粘合/停止层上形成光刻胶掩模，其中具有用于使粘附/阻挡层和极尖形成层图案化的开口具有另一个开口，反应离子蚀刻（RIE）通过开口至形成另一个开口，在另一个开口中形成具有位于粘附/停止层顶部之上的顶部的第二极靴极尖，并且在第二极片极尖的顶部进行化学机械抛光（CMP），直到CMP接触粘附/停止层。本发明还包括由这种方法制成的磁头。

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