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    • 82. 发明申请
    • LARGE-AREA MAGNETRON SPUTTERING CHAMBER WITH INDIVIDUALLY CONTROLLED SPUTTERING ZONES
    • 具有独立控制的喷射区的大面积磁控溅射室
    • WO2007032858A1
    • 2007-03-22
    • PCT/US2006/032219
    • 2006-08-17
    • APPLIED MATERIALS, INC.YE, YanWHITE, John M.HOSOKAWA, AkihiroLE, Hien-Minh Huu
    • YE, YanWHITE, John M.HOSOKAWA, AkihiroLE, Hien-Minh Huu
    • C23C14/35
    • C23C14/352H01J37/3408H01J37/3444
    • The present invention generally provides a method and an apparatus for processing a surface of a substrate in a PVD chamber (20) that has a sputtering target having separately biasable sections, regions or zones (127A1 127B) to improve deposition uniformity. In one aspect, each of the target sections of the multizone target assembly are biased at a different cathodic biases by use of one or more DC or RF power sources (128A, 128B). In one aspect, each of the target sections are biased at a different cathodic biases by use of one power source and one or more resistive, capacitive and/or inductive elements. In one aspect, the multizone target assembly has one or more ports that are adapted to deliver a processing gas to the processing region of the PVD chamber. In one aspect, the multizone target assembly has one or more magnetron assemblies positioned adjacent to one or more target sections.
    • 本发明总体上提供了一种用于处理PVD室(20)中的衬底表面的方法和装置,其中溅射靶具有分开的偏压部分,区域或区域(127A1 127B),以提高沉积均匀性。 在一个方面,通过使用一个或多个DC或RF电源(128A,128B),多区域目标组件的每个目标部分被偏置在不同的阴极偏压。 在一个方面,每个目标部分通过使用一个电源和一个或多个电阻,电容和/或电感元件而被偏置在不同的阴极偏压。 在一个方面,多区域目标组件具有适于将处理气体输送到PVD室的处理区域的一个或多个端口。 在一个方面,多区域目标组件具有邻近一个或多个目标区段定位的一个或多个磁控管组件。
    • 89. 发明公开
    • INTERPOLATION FILTER SUPPORT FOR SUB-PIXEL RESOLUTION IN VIDEO CODING
    • 插值滤镜支持视频编码中的子像素分辨率
    • EP2283656A1
    • 2011-02-16
    • EP09729582.8
    • 2009-04-10
    • QUALCOMM Incorporated
    • YE, YanKARCZEWICZ, Marta
    • H04N7/26H04N7/36
    • H04N7/364H04N7/014H04N19/117H04N19/136H04N19/147H04N19/182H04N19/192H04N19/463H04N19/523
    • This disclosure describes filtering techniques applied by an encoder and a decoder during the prediction stage of a video encoding and/or decoding process. The filtering techniques may enhance the accuracy of predictive data used during fractional interpolation, and may improve predictive data of integer blocks of pixels. There are several aspects to this disclosure, including a useful twelve-pixel filter support that may be used for interpolation, techniques that use coefficient symmetry and pixel symmetry to reduce the amount of data needed to be sent between an encoder and a decoder to configure the filter support for interpolation, and techniques for filtering data at integer pixel locations in a manner that is similar to sub-pixel interpolation. Other aspects of this disclosure concern techniques for encoding information in the bitstream to convey the type of filter used, and possibly the filter coefficients used. Predictive coding of filter coefficients is also described.
    • 本公开描述了在视频编码和/或解码过程的预测阶段期间由编码器和解码器应用的过滤技术。 过滤技术可以提高在分数内插期间使用的预测性数据的准确性,并且可以改进整数像素块的预测性数据。 本发明有几个方面,包括可用于内插的有用的十二像素滤波器支持,使用系数对称性和像素对称性的技术来减少需要在编码器和解码器之间发送的数据量以配置 滤波器对内插的支持,以及以类似于子像素内插的方式在整数像素位置处对数据进行滤波的技术。 本公开的其他方面涉及用于对比特流中的信息进行编码以传达所使用的滤波器的类型以及可能使用的滤波器系数的技术。 还描述了滤波器系数的预测编码。