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81. 发明授权

US07332055B2 Substrate processing apparatus 有权
标题翻译：基板加工装置
公开(公告)号：US07332055B2
公开(公告)日：2008-02-19
申请号：US10209617
申请日：2002-08-01
申请人： Takehiko Orii , Tatsuya Nishida , Osamu Kuroda
发明人： Takehiko Orii , Tatsuya Nishida , Osamu Kuroda
IPC分类号： C23F1/00 , C23C16/00
CPC分类号： H01L21/6708 , B08B3/02
摘要： A substrate processing apparatus is provided. The apparatus includes a plurality of fluid suppliers 61, 61, 63 for supplying different processing fluids. In processing a wafer W, the substrate processing apparatus moves the fluid suppliers 61, 62, 63 along the peripheral part of the wafer W relatively. The fluid suppliers 61, 62, 63 are arranged in a direction extending from the circumference of the wafer W to its inside. With the arrangement, the apparatus is capable of stable processing of the wafer W in spite of rotating the wafer W at a low speed. Further, it is possible to improve a throughput of the apparatus in resist processing.
摘要翻译：提供了一种基板处理装置。该装置包括用于供应不同加工流体的多个流体供应器61,61,63。在处理晶片W时，基板处理装置沿着晶片W的周边部分相对移动流体供给部61,62,63。流体供应部61,62,63沿着从晶片W的圆周向内延伸的方向配置。通过这种布置，尽管晶片W以低速旋转，该装置能够稳定地处理晶片W. 此外，可以提高抗蚀剂处理中的装置的生产量。

82. 发明申请

US20070272480A1 Exhaust Apparatus of an Internal Combustion Engine 有权
标题翻译：内燃机排气装置
公开(公告)号：US20070272480A1
公开(公告)日：2007-11-29
申请号：US11631481
申请日：2005-06-28
申请人： Osamu Kuroda , Masashi Ota , Masayoshi Tange
发明人： Osamu Kuroda , Masashi Ota , Masayoshi Tange
IPC分类号： F01N1/00
CPC分类号： F01N3/2006 , B01D53/9454 , B01D53/9495 , F01N1/084 , F01N1/089 , F01N3/021 , F01N3/0814 , F01N3/106 , F01N3/2046 , F01N5/02 , F01N13/009 , F01N13/0093 , F01N2230/00 , F01N2330/02 , F01N2330/06 , F01N2410/02 , F01N2410/06 , F01N2470/02 , F01N2490/02 , F01N2490/06 , Y02T10/16 , Y02T10/22 , Y02T10/26
摘要： A single valve member is provided for selecting communication of one of two flow passages constituting an exhaust flow passage, and continuously providing a flow passage area of the selected one of the two flow passages. According to this valve member, a changeover of flow passage between a main flow passage with an exhaust processing device disposed therein and a bypass flow passage is performed, and each flow passage area is regulated, to meet an output requirement, exhaust processing requirement and muffling requirement, appropriately. For example, a single valve member 5 is disposed on the upstream side or downstream side of a start catalytic converter 3, whereby communication of one of a main flow passage 1 and a bypass flow passage 2 is selected, and a flow passage area of the selected passage is continuously provided.
摘要翻译：提供单个阀构件，用于选择构成排气流路的两个流动通道中的一个的连通，并且连续地提供两个流动通道中所选择的一个的流路面积。根据该阀构件，进行在配置有排气处理装置的主流路与旁通流路之间的流路的切换，并且对每个流路面积进行调节，以满足输出要求，排气处理要求和消音要求，适当。例如，在起动催化转换器3的上游侧或下游侧设置单个阀构件5，由此选择主流路1和旁通流路2中的一个的连通，并且流路面积选择的通道不断提供。

83. 发明授权

US07250622B2 Apparatus for and method of reading and erasing radiation image information 失效
标题翻译：读取和擦除放射线图像信息的装置和方法
公开(公告)号：US07250622B2
公开(公告)日：2007-07-31
申请号：US11038259
申请日：2005-01-21
申请人： Masakazu Nakajo , Yasunori Ohta , Osamu Kuroda , Yuzuru Ohtsuka , Yoshihiro Ishikawa , Hideki Suzuki
发明人： Masakazu Nakajo , Yasunori Ohta , Osamu Kuroda , Yuzuru Ohtsuka , Yoshihiro Ishikawa , Hideki Suzuki
IPC分类号： G01N23/04 , B65H5/06 , B65H7/00
CPC分类号： G03B42/04
摘要： After a housing of a cassette is opened by a suction cup, then a stimulable phosphor sheet is removed from the cassette by a shiftable roller and then fed in an auxiliary scanning direction by a feed mechanism. While being fed in the auxiliary scanning direction, the stimulable phosphor sheet is irradiated with a laser beam emitted from a stimulating optical system. Light emitted from the stimulable phosphor sheet upon exposure to the laser beam is guided through a light guide to a photoelectric transducer. After the recorded radiation image information is read from the stimulable phosphor sheet, the stimulable phosphor sheet is stored back into the cassette, and erasing light from erasing light sources is applied to the stimulable phosphor sheet in the cassette to erase remaining radiation image information from the stimulable phosphor sheet.
摘要翻译：在通过吸盘打开盒子的外壳之后，通过可移动的辊将可刺激的磷光体片从盒子中取出，然后通过进给机构在辅助扫描方向上进给。在辅助扫描方向上进给时，用刺激光学系统发射的激光照射可刺激的荧光体片。在激光束照射时从可刺激的荧光体片发出的光被引导通过光导至光电换能器。在从可刺激的荧光体片材读取记录的放射线图像信息之后，将可刺激的荧光体片材储存回盒子中，并将擦除光源的光擦除到盒中的可刺激的荧光粉片上以从其中消除剩余的辐射图像信息可刺激的荧光粉片。

84. 发明申请

US20070105380A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
公开(公告)号：US20070105380A1
公开(公告)日：2007-05-10
申请号：US11616138
申请日：2006-12-26
申请人： Takehiko Orii , Tatsuya Nishida , Osamu Kuroda
发明人： Takehiko Orii , Tatsuya Nishida , Osamu Kuroda
IPC分类号： H01L21/302
CPC分类号： H01L21/67051 , C03C23/0075 , H01L21/67028 , H01L21/67178 , Y10S134/901 , Y10S134/902
摘要： The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chemical liquid, is accommodated in a housing. The processing fluid supply unit accommodated in the housing is advanced into the processing space through the opening of the enclosure structure to feed the processing fluid onto the substrate supported by the substrate support member.

85. 发明申请

US20060229032A1 RFID transceiver device 有权
公开(公告)号：US20060229032A1
公开(公告)日：2006-10-12
申请号：US11209627
申请日：2005-08-24
申请人： Teruhisa Ninomiya , Yusuke Kawasaki , Osamu Kuroda , Yoshinori Tanaka
发明人： Teruhisa Ninomiya , Yusuke Kawasaki , Osamu Kuroda , Yoshinori Tanaka
IPC分类号： H04B1/46
CPC分类号： H04B1/525 , G06K7/0008
摘要： An RFID transceiver device is capable of high sensitivity reception, by the reduction of noise, irrespective of the distance to the tag. The RFID transceiver device includes a delay circuit between a local oscillation circuit and a demodulation circuit, wherein the amount of delay of the delay circuit is set to a magnitude corresponding to the path difference between the path of leakage, via a duplexer into the demodulation circuit, of transmission signal output from the local oscillation circuit for transmission, and the path of direct input of the local oscillation signal from the local oscillation circuit to the demodulation circuit.

86. 发明申请

US20060060805A1 Apparatus for and method of reading and erasing radiation image information 失效
标题翻译：读取和擦除放射线图像信息的装置和方法
公开(公告)号：US20060060805A1
公开(公告)日：2006-03-23
申请号：US11230484
申请日：2005-09-21
申请人： Yuzuru Ohtsuka , Masakazu Nakajo , Osamu Kuroda , Yoshihiro Ishikawa , Hideki Suzuki , Yasunori Ohta
发明人： Yuzuru Ohtsuka , Masakazu Nakajo , Osamu Kuroda , Yoshihiro Ishikawa , Hideki Suzuki , Yasunori Ohta
IPC分类号： G03B42/08
CPC分类号： G03B42/045 , G03B42/08
摘要： A plurality of stacked cassettes are loaded into a cassette loader, and the cassettes loaded in the cassette loader are changed in attitude and stocked in an erected state in a stock unit. After the cassettes are processed, they are discharged in an erected state into a cassette discharger.
摘要翻译：将多个堆叠的盒装载到盒式装载机中，并且装载在盒式装载机中的盒状态改变，并且在库存单元中以直立状态存放。在盒子被处理之后，它们以直立状态被排放到盒式放电器中。

87. 发明申请

US20060060804A1 Apparatus for and method of reading and erasing radiation image information 失效
标题翻译：读取和擦除放射线图像信息的装置和方法
公开(公告)号：US20060060804A1
公开(公告)日：2006-03-23
申请号：US11227165
申请日：2005-09-16
申请人： Yuzuru Ohtsuka , Masakazu Nakajo , Osamu Kuroda , Yoshihiro Ishikawa , Hideki Suzuki , Yasunori Ohta
发明人： Yuzuru Ohtsuka , Masakazu Nakajo , Osamu Kuroda , Yoshihiro Ishikawa , Hideki Suzuki , Yasunori Ohta
IPC分类号： G01N23/04
CPC分类号： G01T1/2014 , G01N23/04 , G01T1/2016
摘要： A cassette is delivered from a cassette loader through a stock unit to a releasing unit. After a stimulable phosphor panel is supplied from the cassette to a reading unit by an unlocking mechanism and a panel ejecting mechanism, the cassette is fed to a position below an erasing unit so as to wait for the stimulable phosphor panel. After recorded radiation image information is read from the stimulable phosphor panel by the reading unit, the stimulable phosphor panel is fed to the erasing unit, which erases remaining radiation image information from the stimulable phosphor panel. Thereafter, the stimulable phosphor panel is stored back into the waiting cassette, which is delivered to a cassette discharger.
摘要翻译：盒式磁带从盒装载机通过库存单元传送到释放单元。在通过解锁机构和面板弹出机构将可刺激的荧光体面板从盒子提供到读取单元之后，盒被馈送到擦除单元下方的位置，以等待可刺激的荧光体面板。在通过读取单元从可刺激的荧光体面板读取记录的放射线图像信息之后，将可刺激的荧光体面板馈送到擦除单元，从而擦除来自可刺激的荧光体面板的剩余的辐射图像信息。此后，可刺激的荧光体面板被储存回等待盒中，该等待盒被输送到盒式放电器。

88. 发明申请

US20050156126A1 Apparatus for and method of reading and erasing radiation image information 失效
标题翻译：读取和擦除放射线图像信息的装置和方法
公开(公告)号：US20050156126A1
公开(公告)日：2005-07-21
申请号：US11038259
申请日：2005-01-21
申请人： Masakazu Nakajo , Yasunori Ohta , Osamu Kuroda , Yuzuru Ohtsuka , Yoshihiro Ishikawa , Hideki Suzuki
发明人： Masakazu Nakajo , Yasunori Ohta , Osamu Kuroda , Yuzuru Ohtsuka , Yoshihiro Ishikawa , Hideki Suzuki
IPC分类号： G21K4/00 , G01T1/00 , G03B42/02 , G03B42/04 , G03B42/08 , H04N1/04
CPC分类号： G03B42/04
摘要： After a housing of a cassette is opened by a suction cup, then a stimulable phosphor sheet is removed from the cassette by a shiftable roller and then fed in an auxiliary scanning direction by a feed mechanism. While being fed in the auxiliary scanning direction, the stimulable phosphor sheet is irradiated with a laser beam emitted from a stimulating optical system. Light emitted from the stimulable phosphor sheet upon exposure to the laser beam is guided through a light guide to a photoelectric transducer. After the recorded radiation image information is read from the stimulable phosphor sheet, the stimulable phosphor sheet is stored back into the cassette, and erasing light from erasing light sources is applied to the stimulable phosphor sheet in the cassette to erase remaining radiation image information from the stimulable phosphor sheet.
摘要翻译：在通过吸盘打开盒子的外壳之后，通过可移动的辊将可刺激的磷光体片从盒子中取出，然后通过进给机构在辅助扫描方向上进给。在辅助扫描方向上进给时，用刺激光学系统发射的激光照射可刺激的荧光体片。在激光束照射时从可刺激的荧光体片发出的光被引导通过光导至光电换能器。在从可刺激的荧光体片材读取记录的放射线图像信息之后，将可刺激的荧光体片材储存回盒子中，并将擦除光源的光擦除到盒中的可刺激的荧光粉片上以从其中消除剩余的辐射图像信息可刺激的荧光粉片。

89. 发明授权

US6068002A Cleaning and drying apparatus, wafer processing system and wafer processing method 失效
标题翻译：清洗干燥装置，晶圆加工系统及晶圆加工方法
公开(公告)号：US6068002A
公开(公告)日：2000-05-30
申请号：US46566
申请日：1998-03-24
申请人： Yuji Kamikawa , Osamu Kuroda , Kenji Soejima , Tsuyoshi Nomura
发明人： Yuji Kamikawa , Osamu Kuroda , Kenji Soejima , Tsuyoshi Nomura
IPC分类号： H01L21/00 , B08B3/04
CPC分类号： H01L21/67028 , H01L21/67781 , Y10S134/902
摘要： A drying unit is disposed above a cleaning tank containing a cleaning liquid for cleaning semiconductor wafers W. A wafer boat holding semiconductor wafers moves between the cleaning tank and the drying unit. The drying unit has a fixed base surrounding an opening formed in the cleaning tank, a liftable top cover placed on the fixed base, and an O-ring interposed between the fixed base and the liftable top cover. The liftable top cover can be moved vertically by a first lifting means.
摘要翻译：干燥单元设置在包含用于清洁半导体晶片W的清洁液体的清洗槽的上方。保持半导体晶片的晶片舟皿在清洁槽和干燥单元之间移动。干燥单元具有围绕形成在清洗槽中的开口的固定基座，设置在固定基座上的可升降顶盖以及置于固定基座和可升降顶盖之间的O形环。可升降顶盖可以通过第一提升装置垂直移动。

90. 发明授权

US5559555A Apparatus for performing exposure control pertaining to the luminance level of an object 失效
标题翻译：用于执行与物体的亮度水平有关的曝光控制的装置
公开(公告)号：US5559555A
公开(公告)日：1996-09-24
申请号：US442495
申请日：1995-05-16
申请人： Shuji Shimizu , Osamu Kuroda , Yasutaka Ito , Yoshikazu Takahashi
发明人： Shuji Shimizu , Osamu Kuroda , Yasutaka Ito , Yoshikazu Takahashi
IPC分类号： H04N5/232 , H04N5/235 , H04N5/238
CPC分类号： H04N5/2327 , H04N5/23248 , H04N5/23258 , H04N5/23274 , H04N5/2352
摘要： An exposing apparatus comprises: a lens group to fetch a light from an object; an iris to adjust a light amount from the lens group; an image pickup device to convert the light which passed through the iris into the electric signal; a detecting circuit to detect a luminance signal level from an output signal from the image pickup device; a reference level signal setting circuit to set an exposure control reference value to control the iris; an exposure control reference value modulating circuit to modulate the exposure control reference value when the iris is controlled; and a control circuit to set the exposure control reference value in correspondence to the luminance signal level when an output level of the detecting circuit is larger than a set value.
摘要翻译：曝光装置包括：用于从物体取出光的透镜组; 调整透镜组的光量的虹膜; 将通过虹膜的光转换成电信号的图像拾取装置; 检测电路，用于根据来自图像拾取装置的输出信号检测亮度信号电平; 基准电平信号设定电路，设定曝光控制基准值以控制所述光圈; 曝光控制基准值调制电路，用于当所述光圈被控制时调制所述曝光控制基准值; 以及控制电路，用于当检测电路的输出电平大于设定值时，根据亮度信号电平设定曝光控制基准值。

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