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    • 86. 发明授权
    • Semiconductor laser device and method of manufacturing the same
    • 半导体激光器件及其制造方法
    • US07903709B2
    • 2011-03-08
    • US12357282
    • 2009-01-21
    • Ryoji HiroyamaDaijiro InoueYasuyuki BesshoMasayuki Hata
    • Ryoji HiroyamaDaijiro InoueYasuyuki BesshoMasayuki Hata
    • H01S5/00
    • H01S5/34333B82Y20/00H01S5/0201H01S5/0202H01S5/0203H01S5/0425H01S5/16H01S5/22H01S5/2201
    • A semiconductor laser device includes a substrate and a semiconductor layer formed on a surface of the substrate and having a waveguide extending in a first direction parallel to the surface, wherein the waveguide is formed on a region approaching a first side from a center of the semiconductor laser device in a second direction parallel to the surface and intersecting with the first direction, a first region separated from the waveguide on a side opposite to the first side of the waveguide and extending parallel to the first direction and a first recess portion separated from the waveguide on an extension of a facet of the waveguide, intersecting with the first region and extending in the second direction are formed on an upper surface of the semiconductor laser device, and a thickness of the semiconductor layer on the first region is smaller than a thickness of the semiconductor layer on a region other than the first region.
    • 半导体激光器件包括衬底和形成在衬底的表面上的半导体层,并且具有沿平行于表面的第一方向延伸的波导,其中波导形成在从半导体的中心接近第一侧的区域 激光装置在与第一方向平行的第二方向上与第一方向相交的第一区域,与波导的与波导的第一侧相反的一侧并且平行于第一方向延伸的第一凹部, 在半导体激光器件的上表面上形成有与第一区域交叉且沿第二方向延伸的波导的小平面的延伸的波导,并且第一区域上的半导体层的厚度小于厚度 的第一区域以外的区域。
    • 89. 发明授权
    • Nitride-based semiconductor element and method of forming nitride-based semiconductor
    • 基于氮化物的半导体元件和形成氮化物基半导体的方法
    • US07829900B2
    • 2010-11-09
    • US12071978
    • 2008-02-28
    • Masayuki HataTatsuya KunisatoNobuhiko Hayashi
    • Masayuki HataTatsuya KunisatoNobuhiko Hayashi
    • H01L27/15
    • B82Y20/00H01L21/0237H01L21/02378H01L21/02381H01L21/0242H01L21/02433H01L21/0254H01L21/02576H01L21/02639H01L21/02647H01L33/007H01S5/0207H01S5/22H01S5/2214H01S5/227H01S5/34333H01S2304/12
    • A nitride-based semiconductor element having superior mass productivity and excellent element characteristics is obtained. This nitride-based semiconductor element comprises a substrate comprising a surface having projection portions, a mask layer formed to be in contact with only the projection portions of the surface of the substrate, a first nitride-based semiconductor layer formed on recess portions of the substrate and the mask layer and a nitride-based semiconductor element layer, formed on the first nitride-based semiconductor layer, having an element region. Thus, the first nitride-based semiconductor layer having low dislocation density is readily formed on the projection portions of the substrate and the mask layer through the mask layer serving for selective growth. When the nitride-based semiconductor element layer having the element region is grown on the first nitride-based semiconductor layer having low dislocation density, a nitride-based semiconductor element having excellent element characteristics can be readily obtained. The first nitride-based semiconductor layer is formed through only single growth on the substrate, whereby a nitride-based semiconductor element having excellent mass productivity is obtained.
    • 获得具有优异的质量生产率和优异的元件特性的氮化物基半导体元件。 该氮化物系半导体元件包括基板,该基板包括具有突出部的表面,形成为仅与基板的表面的突出部接触的掩模层,形成在基板的凹部的第一氮化物系半导体层 以及形成在具有元件区域的第一氮化物系半导体层上的掩模层和氮化物系半导体元件层。 因此,具有低位错密度的第一氮化物基半导体层通过用于选择生长的掩模层容易地形成在衬底和掩模层的突出部分上。 当在具有低位错密度的第一氮化物基半导体层上生长具有元素区域的氮化物基半导体元件层时,可以容易地获得具有优异元素特性的氮化物基半导体元件。 第一氮化物基半导体层仅通过基板上的单一生长形成,从而获得具有优异的批量生产率的氮化物基半导体元件。
    • 90. 发明授权
    • Semiconductor laser apparatus and fabrication method thereof
    • 半导体激光装置及其制造方法
    • US07773654B2
    • 2010-08-10
    • US11092947
    • 2005-03-30
    • Yasuyuki BesshoMasayuki HataDaijiro InoueTsutomu Yamaguchi
    • Yasuyuki BesshoMasayuki HataDaijiro InoueTsutomu Yamaguchi
    • H01S5/00
    • H01S5/4025H01L2224/32245H01L2224/48463H01L2224/73265H01S5/4087
    • A blue-violet semiconductor laser device has a first p-electrode formed on its upper surface and a first n-electrode formed on its lower surface. A red semiconductor laser device has a second n-electrode formed on its upper surface and a second p-electrode formed on its lower surface. An infrared semiconductor laser device has a third n-electrode formed on its upper surface and a third p-electrode formed on its lower surface. Solder films are partially formed on the upper surface of the first p-electrode in the blue-violet semiconductor laser device. Two of the solder films are formed with a predetermined distance between them on the upper surface of the first p-electrode. This results in a portion of the first p-electrode being exposed. The first, second and third p-electrodes of the blue-violet semiconductor laser device, red semiconductor laser device, and infrared semiconductor laser device are common electrodes.
    • 蓝紫色半导体激光器件具有在其上表面上形成的第一p电极和形成在其下表面上的第一n电极。 红色半导体激光器件具有在其上表面上形成的第二n电极和形成在其下表面上的第二p电极。 红外半导体激光器件具有在其上表面上形成的第三n电极和形成在其下表面上的第三p电极。 在蓝紫色半导体激光器件中的第一p电极的上表面部分地形成焊料膜。 两个焊料膜在第一p电极的上表面之间以它们之间的预定距离形成。 这导致第一p电极的一部分被暴露。 蓝紫色半导体激光器件的第一,第二和第三p电极,红色半导体激光器件和红外半导体激光器件是公共电极。