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    • 82. 发明授权
    • Gas sensor control apparatus
    • 气体传感器控制装置
    • US07872480B2
    • 2011-01-18
    • US12197495
    • 2008-08-25
    • Kenji KatoHisashi SasakiKoji Shiotani
    • Kenji KatoHisashi SasakiKoji Shiotani
    • G01N27/04
    • G01N27/4067F02D41/1494G01N27/4065
    • A gas sensor control apparatus for controlling a gas sensor includes a resistance detection unit and a heater control unit. The resistance detection unit detects a resistance of an object cell of the gas sensor. When the resistance of the object cell is lower than a predetermined threshold, the heater control unit controls energization of a heater such that the resistance detected by the resistance detection unit is a first predetermined resistance. Subsequently, after elapse of a predetermined time, the heater control unit further controls energization of the heater in such a manner that the resistance detected by the resistance detection unit is a second predetermined resistance of a resistance value that is higher than that of the first predetermined resistance.
    • 用于控制气体传感器的气体传感器控制装置包括电阻检测单元和加热器控制单元。 电阻检测单元检测气体传感器的对象单元的电阻。 当对象单元的电阻低于预定阈值时,加热器控制单元控制加热器的通电,使得由电阻检测单元检测的电阻为第一预定电阻。 随后,在经过预定时间之后,加热器控制单元进一步控制加热器的通电,使得由电阻检测单元检测到的电阻是比第一预定值高的电阻值的第二预定电阻 抵抗性。
    • 84. 发明申请
    • METHOD FOR FORMING SILICON-BASED THIN FILM BY PLASMA CVD METHOD
    • 通过等离子体CVD法形成硅基薄膜的方法
    • US20100210093A1
    • 2010-08-19
    • US12513362
    • 2007-10-29
    • Kenji KatoEiji Takahashi
    • Kenji KatoEiji Takahashi
    • H01L21/205
    • C23C16/505C23C16/24H01L21/02532H01L21/0262H01L31/1804Y02E10/547Y02P70/521
    • In the method for forming a silicon-based thin film by the plasma CVD method using high-frequency excitation, a polycrystalline silicon-based thin film having high degree of crystallization is formed relatively at a low temperature, economically, and productively.The polycrystalline silicon-based thin film is formed in such a state that the pressure of gas during formation of the film is selected and determined from the range of 0.0095 Pa to 64 Pa; the ratio (Md/Ms) of a supply flow rate Md of a diluting gas to a supply flow rate Ms of a film-forming material gas introduced into a deposition chamber is selected and determined from the range of 0 to 1200; the high-frequency power density is selected and determined from the range of 0.0024 W/cm3 to 11 W/cm3; the plasma potentials during formation of the film is maintained to 25 V or lower, and the electron density in the plasma is maintained to 1×1010 electrons/cm3 or higher; and the combination of those pressures and the like is such a combination that attains the ratio (Ic/Ia=degree of crystallization) of Ic derived from the crystallized silicon component to Ia derived from the amorphous silicon component in the evaluation of the crystallizability of silicon in the film by the laser Raman scattering spectroscopy is 8 or higher.
    • 在通过使用高频激发的等离子体CVD法形成硅基薄膜的方法中,经济地且高效地相对地在低温下形成具有高结晶度的多晶硅基薄膜。 形成多晶硅系薄膜的状态是,从0.0095Pa〜64Pa的范围选择并确定膜形成时的气体压力; 稀释气体的供给流量Md与导入淀积室的成膜材料气体的供给流量Ms的比(Md / Ms)从0〜1200的范围选择并确定; 从0.0024W / cm 3至11W / cm 3的范围选择和确定高频功率密度; 膜形成期间的等离子体电位维持在25V以下,等离子体中的电子密度维持在1×10 10电子/ cm 3以上。 并且这些压力等的组合是这样的组合,其在评估硅的结晶性中达到了从结晶硅组分衍生的Ia与来自非晶硅组分的Ia的比(Ic / Ia =结晶度) 在电影中由激光拉曼散射光谱法测定8或更高。
    • 86. 发明申请
    • NOx SENSOR AND PRODUCTION METHOD THEREOF
    • NOx传感器及其生产方法
    • US20090188813A1
    • 2009-07-30
    • US12358678
    • 2009-01-23
    • Kenji KatoHisashi SasakiKoji Shiotani
    • Kenji KatoHisashi SasakiKoji Shiotani
    • G01N27/26
    • G01N33/0037G01N27/4074G01N27/4075G01N27/417Y02A50/245
    • A NOx sensor includes a sensor element equipped with first and second pumping cells to define first and second measurement chambers. The first pumping cell exerts an oxygen pumping action against the first measurement chamber to adjust the oxygen concentration in the gas under measurement within the first measurement chamber to a given level. The second pumping cell exerts an oxygen pumping action against the second measurement chamber to produce a pumping cell current according to the NOx concentration in the gas under measurement. When the moisture content of the gas under measurement changes from 2 vol % to 8 vol %, the NOx sensor allows a variation of NOx concentration detection value based on the pumping cell current in such a manner that the NOx concentration detection value reaches a transient peak value of 20 ppm or smaller and converges to ±5 ppm of a reference value within 5 seconds.
    • NOx传感器包括配备有第一和第二泵浦单元以限定第一和第二测量室的传感器元件。 第一泵送单元对第一测量室施加氧气抽吸作用,以将在第一测量室内测量的气体中的氧浓度调节到给定的水平。 第二泵送单元对第二测量室施加氧气抽吸作用,以根据测量气体中的NOx浓度产生泵浦电池电流。 当测量气体的水分含量从2vol%变化到8vol%时,NOx传感器允许基于泵浦单元电流的NOx浓度检测值的变化,使得NOx浓度检测值达到瞬时峰值 值在20ppm以下,并且在5秒内收敛到参考值的±5ppm。
    • 88. 发明授权
    • Sensing circuit for vibration type of angular rate sensor
    • 角速度传感器振动型感应电路
    • US07513140B2
    • 2009-04-07
    • US11249133
    • 2005-10-13
    • Kenji Kato
    • Kenji Kato
    • G01P21/00G01P3/44
    • G01C19/56
    • A sensing circuit for a vibration type of angular rate sensor comprises a vibrator, driving unit, follow-up signal forming unit, normal voltage-range setting unit, and determining unit. The driving unit drives the vibrator to vibrate at a predetermined amplitude by using, as a feedback signal, an error voltage signal in which an amplitude of vibration of the vibrator is reflected. The follow-up signal forming unit forms, by using the error voltage signal, a follow-up signal following up the error voltage signal at changes which are gentler than changes in the error signal. The normal voltage-range setting unit sets a range of a normal voltage for the error voltage signal by using the follow-up signal. The determining unit determines whether or not the sensor circuit is in a malfunctioning condition, by using an estimation as to whether or not the error voltage signal is within the range of the normal voltage.
    • 用于振动型角速率传感器的感测电路包括振动器,驱动单元,跟随信号形成单元,正常电压范围设定单元和确定单元。 驱动单元通过使用其中振动器的振动幅度被反射的误差电压信号作为反馈信号来驱动振动器以预定的振幅振动。 后续信号形成单元通过使用误差电压信号形成跟随误差电压信号的跟随信号,该变化比误差信号的变化更为温和。 正常电压范围设定单元通过使用跟随信号来设定误差电压信号的正常电压的范围。 通过使用关于误差电压信号是否在正常电压的范围内的估计来确定传感器电路是否处于故障状态。