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    • 87. 发明授权
    • Insulated gate semiconductor device
    • 绝缘栅半导体器件
    • US06930352B2
    • 2005-08-16
    • US10463613
    • 2003-06-18
    • Wataru SaitoIchiro OmuraSatoshi Aida
    • Wataru SaitoIchiro OmuraSatoshi Aida
    • H01L29/06H01L29/08H01L29/10H01L29/739H01L29/78H01L29/76
    • H01L29/7802H01L29/0634H01L29/0847H01L29/0878H01L29/1095H01L29/7397H01L29/7813
    • An insulated gate semiconductor device includes a control electrode having a trench type structure formed on the surface of a first semiconductor layer of a first conductivity type via a gate insulation film and disposed in a lattice shape, the control electrode having a plurality of first control electrode sections and a plurality of second control electrode sections which intersect with the plurality of first control electrode sections, respectively, and a plurality of fifth semiconductor layers of a second conductivity type which are provided on an interface of the first semiconductor layer in contact with the plurality of second control electrode sections, and connected to at least one of a plurality of second semiconductor layers of the second conductivity type, the fifth semiconductor layers having impurity concentration lower than that of the plurality of second semiconductor layers.
    • 一种绝缘栅半导体器件,包括:控制电极,具有通过栅极绝缘膜形成在第一导电类型的第一半导体层的表面上并且格栅形状的沟槽型结构,所述控制电极具有多个第一控制电极 分别与多个第一控制电极部分相交的多个第二控制电极部分和多个第二导电类型的第五半导体层,其设置在第一半导体层的与多个第一控制电极部分接触的界面上 的第二控制电极部分,并且连接到第二导电类型的多个第二半导体层中的至少一个,所述第五半导体层的杂质浓度低于多个第二半导体层的杂质浓度。