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    • 83. 发明授权
    • Method of determining movement sequence and apparatus for realizing it
    • 确定运动顺序的方法和实现它的装置
    • US06844917B2
    • 2005-01-18
    • US10423956
    • 2003-04-28
    • Koji Yoshida
    • Koji Yoshida
    • G03F7/20G03F7/22G06F15/18G06N3/00H01L21/02H01L21/027G03B27/42
    • G03F7/70616G03F7/70358G03F7/70425G03F7/70691G03F7/70716
    • A movement sequence determining method of obtaining a preferred solution of movement sequence within a predetermined time and an apparatus for realizing it, includes at least an arithmetic step of generating a group including plural movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of plural process areas as well as scan directions of local areas in the plural process areas, and selecting a movement sequence in which a movement operation between plural process areas is completed in a shortest time, from the group generated, and a prestep of producing a movement time management table storing movement times, each from a movement start position to a movement end position, in unit lengths between process areas.
    • 一种在预定时间内获得移动顺序的优选方案的移动顺序确定方法和用于实现该移动顺序的装置,至少包括一个运算步骤,用于生成包括可以执行的多个移动序列的组, 序列候选,每个表示多个处理区域的访问顺序以及多个处理区域中的局部区域的扫描方向,并且从组中选择其中在最短时间内完成多个处理区域之间的移动操作的移动顺序 并且产生以处理区域之间的单位长度生成从移动开始位置到移动结束位置的移动时间的移动时间管理表的预设。
    • 87. 发明授权
    • Method of determining movement sequence and apparatus for realizing it
    • 确定运动顺序的方法和实现它的装置
    • US06576919B1
    • 2003-06-10
    • US09031514
    • 1998-02-27
    • Koji Yoshida
    • Koji Yoshida
    • G01N2186
    • G03F7/70616G03F7/70358G03F7/70425G03F7/70691G03F7/70716
    • The present invention relates to a movement sequence determining method of obtaining a preferred solution of movement sequence within a predetermined time and an apparatus for realizing it so that a movement sequence, indicating a visit order of plural process areas having degrees of freedom in scan directions of local areas being objects of a predetermined process of exposure, inspection, or the like, can be achieved in a shortest time. The method comprises at least an arithmetic step of generating a group including plural movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of plural process areas as well as scan directions of local areas in the plural process areas, and selecting a movement sequence in which a movement operation between plural process areas is completed in a shortest time, from the group generated, and a prestep of producing a movement time management table storing movement times, each from a movement start position to a movement end position, in unit lengths between process areas. Accordingly, a resultant solution of movement sequence includes information concerning the visit order of process areas and the scan direction of each process area. The apparatus comprises at least an arithmetic section for carrying out the arithmetic step, and a memory for storing the movement time management table.
    • 本发明涉及一种在预定时间内获得移动序列的优选方案的移动顺序确定方法和用于实现它的装置,使得指示扫描方向上具有自由度的多个处理区域的访问顺序的移动顺序 可以在最短时间内实现作为曝光,检查等的预定处理对象的局部区域。 该方法至少包括一个算术步骤,用于生成包括可以被执行的多个移动序列的组,该运动序列包括运动序列候选组中的每一个运动序列,每组运动序列候选指示多个处理区域的访问顺序以及在该区域中的局部区域的扫描方向 多个处理区域,并且从生成的组中选择其中在最短时间内完成多个处理区域之间的移动操作的移动顺序,以及生成存储移动时间的移动时间管理表的预定步骤,每个移动时间管理表从移动开始位置 到运动结束位置,处理区域之间的单位长度。 因此,所得到的移动顺序的解决方案包括关于处理区域的访问顺序和每个处理区域的扫描方向的信息。 该装置至少包括用于执行算术步骤的算术部分和用于存储移动时间管理表的存储器。
    • 88. 发明授权
    • Optical module, board mounted optical module, and assembly method of optical module
    • 光模块,板载光模块,光模组装方式
    • US06488416B1
    • 2002-12-03
    • US09662338
    • 2000-09-14
    • Masato ShishikuraKoji YoshidaKimio TatsunoHirohisa Sano
    • Masato ShishikuraKoji YoshidaKimio TatsunoHirohisa Sano
    • G02B642
    • G02B6/4201G02B6/4292
    • A conventional problem is to provide an optical module capable of being reflow mounted together with electronic components collectively, and, at the same time, securing a mechanical strength that can bear a large stress at the time of an attachment/detachment of the optical fiber. A solution to the above-mentioned problem can be attained by using an optical connector removable type optical module for reflow mounting having a fixing structure for fixing itself to a mount board, including a receptacle part installed to an optical module 19 to which an optical connector 1 is detachably connected; electric terminals 4 for reflow mounting that are arranged corresponding to lands 8 on a mount board 6; and stud parts 5 that are able to fit in fixing holes 7 on the mount board 6.
    • 常规的问题是提供一种能够一体地与电子部件一起回流安装的光学模块,同时确保在光纤的安装/拆卸时可承受较大应力的机械强度。 对于上述问题的解决方案可以通过使用用于回流安装的光学连接器可拆卸型光学模块来实现,该光学连接器可拆卸型光学模块具有用于将自身固定到安装板上的固定结构,其包括安装到光学模块19的插座部分,光学连接器 1可拆卸地连接; 用于回流安装的电端子4,其对应于安装板6上的焊盘8; 以及能够装配在安装板6上的固定孔7中的螺柱部件5。
    • 89. 发明授权
    • Switching power supply with delay circuit for light-load period
    • 开关电源带有延迟电路,用于轻载周期
    • US06452816B2
    • 2002-09-17
    • US09867038
    • 2001-05-29
    • Masaaki KuranukiKoji Yoshida
    • Masaaki KuranukiKoji Yoshida
    • H02M3335
    • H02M3/3376
    • In an isolation type DC-DC converter for performing full-wave rectification in the secondary of a transformer, two switching sections 11 and 13 alternately switch ON and OFF, thereby reversing the current I3 flowing through a primary winding 3a of the transformer 3. A switching control circuit 7 outputs switching signals G1 and G3 to the switching sections 11 and 13, respectively, thereby controlling the switching of the switching sections. A load current sensing section 9 senses the amount of load current, then compares it with a predetermined threshold value. When the amount of load current sensed is smaller than the threshold value, a delay circuit 8 delays the switching signals G1 and G3 to the switching sections 11 and 13 for a predetermined delay time. The delay time is set to be substantially equal to ¼ of the resonance period determined by the self-inductance of the primary winding 3a of the transformer 3.
    • 在用于在变压器次级中进行全波整流的隔离型DC-DC转换器中,两个开关部11和13交替地接通和断开,从而使流过变压器3的初级绕组3a的电流I3反转。 开关控制电路7将切换信号G1,G3分别输出到切换部11,13,由此控制切换部的切换。 负载电流检测部分9感测负载电流的量,然后将其与预定的阈值进行比较。 当检测到的负载电流量小于阈值时,延迟电路8将开关信号G1和G3延迟到开关部分11和13一段预定的延迟时间。 延迟时间被设定为基本上等于由变压器3的初级绕组3a的自感确定的谐振周期的1/4。