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    • 84. 发明申请
    • SELF-ALIGNED MEMORY ARRAY
    • 自对准存储阵列
    • WO2017052565A1
    • 2017-03-30
    • PCT/US2015/052051
    • 2015-09-24
    • INTEL CORPORATION
    • KARPOV, Elijah V.SHAH, UdayPILLARISETTY, RaviDOYLE, Brian S.
    • G11C11/16
    • G11C11/161G11C11/1659H01L27/224H01L43/08H01L43/12
    • An embodiment includes a memory array comprising: a memory cell including a switch stack in series with a memory stack; and a bit line above the memory cell and a word line below the memory cell; wherein (a) first switch stack sidewalls of the switch stack are vertically aligned with bit line sidewalls of the bit line and second switch stack sidewalls of the switch stack are vertically aligned with word line sidewalls of the word line; (b) first memory stack sidewalls of the memory stack are vertically aligned with the bit line sidewalls and second memory stack sidewalls of the memory stack are vertically aligned with the word line sidewalls. Other embodiments are described herein.
    • 实施例包括存储器阵列,其包括:存储器单元,其包括与存储器堆叠串联的开关堆叠; 以及位于存储器单元之上的位线和存储器单元下方的字线; 其中(a)开关堆叠的第一开关堆叠侧壁与位线的位线侧壁垂直对准,并且开关堆叠的第二开关堆叠侧壁与字线的字线侧壁垂直对准; (b)存储器堆叠的第一存储器堆叠侧壁与位线侧壁垂直对准,并且存储器堆叠的第二存储器堆叠侧壁与字线侧壁垂直对准。 本文描述了其它实施例。