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81. 发明申请

WO1993019217A1 ARRANGEMENT FOR VACUUM COATING BULK GOODS 审中-公开
标题翻译：真空涂层油条的布置
公开(公告)号：WO1993019217A1
公开(公告)日：1993-09-30
申请号：PCT/DE1993000201
申请日：1993-03-03
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , GOEDICKE, Klaus , METZNER, Christoph , SCHMIDT, Jörg , HEISIG, Ullrich , SCHILLER, Siegfried , RESCHKE, Jonathan
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： C23C14/00
CPC分类号： C23C14/223 , C23C14/22
摘要： An arrangement is disclosed for coating small parts, such as scres and bolts, in a highly efficient manner as bulk goods, by high-vacuum metallizing or by vacuum sputtering, also under the effect of a plasma. A drum (1) that rotates at a high speed around a horizontal axis and upon whose inner wall the parts to be coated are held by centrifugal force is arranged inside a container. The surface of the inner wall is designed so that the parts to be coated (3) are securely held and moved together with the wall. Coating means are arranged in the drum. A scraper device (4), whose spacing from the inner wall can be adjusted at programmable time intervals, is provided in the drum and its contact surface is oriented in the direction opposite to the direction of rotation.
摘要翻译：公开了一种用于通过高真空金属化或通过真空溅射以等离子体的作用以高效率的方式涂覆小零件（如碎片和螺栓）的方式作为散装货物。在容器内布置有以水平轴线高速旋转并且通过离心力将被涂覆部件保持在其内壁上的滚筒（1）。内壁的表面被设计成使得待涂覆的部件（3）被牢固地保持并与壁一起移动。涂布装置布置在滚筒中。在滚筒中设置有与内壁间隔的刮板装置（4），该刮刀装置（4）可以以可编程的时间间隔进行调节，并且其接触表面沿与旋转方向相反的方向定向。

82. 发明申请

WO1993018069A1 PROCESS FOR GENERATING THIN, MICROPORE-FREE, CONDUCTIVE POLYMER LAYERS 审中-公开
标题翻译：生成薄膜，无微波导电聚合物层的方法
公开(公告)号：WO1993018069A1
公开(公告)日：1993-09-16
申请号：PCT/DE1993000205
申请日：1993-03-08
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , KRUSE, Alexander , HENNECKE, Manfred
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： C08F02/52
CPC分类号： C08F2/52 , H01B1/12
摘要： A process is disclosed for generating thin, micropore-free, conductive polymer layers by plasma polymerization of appropriate monomers, with formation of doped three-dimensional network structures. The doping agent is introduced into plasma polymerization in a chemically bound form to the monomer, is released therefrom under the influence of the plasma just before the polymer is formed and deposits itself in the forming plasma polymer layer.

83. 发明申请

WO1993016552A1 MULTIPLE-SAMPLING PROCESS 审中-公开
标题翻译：多采样过程
公开(公告)号：WO1993016552A1
公开(公告)日：1993-08-19
申请号：PCT/DE1993000112
申请日：1993-02-05
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , UHLEMANN, Volker , HOSTICKA, Bedrich
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： H04N05/217
CPC分类号： H04N5/3575 , G11C27/026
摘要： The invention concerns a multiple-sampling process in which a noisy signal and the noise are each sampled N times and processed to give an output signal. In order to improve the signal and noise transmission characteristics, the invention calls for interlaced sampling of the signal and noise. Subsequently, either in the case of triple sampling, a total is calculated from the signal-sampling value and a noise-sampling value,less an additional double noise-sampling value, and the output signal representing the sum of the totals is generated, or the differences between each signal-sampling value and noise-sampling value are calculated, and the output signal calculated from the sum of the differences.

84. 发明申请

WO1993015444A1 METHOD FOR THE DRY DEVELOPMENT OF A SILICON-CONTAINING LACQUER FILM SENSITIVE TO UV AND/OR ELECTRON-BEAM RADIATION 审中-公开
标题翻译：用于干燥开发含紫外线和/或电子束辐射的含硅含量薄膜的方法
公开(公告)号：WO1993015444A1
公开(公告)日：1993-08-05
申请号：PCT/DE1992000779
申请日：1992-09-10
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , KLUMPP, Armin , HACKER, Erwin
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： G03F07/36
CPC分类号： G03F7/167 , G03F7/36 , H01L21/31138
摘要： The method described has the following features: the film of lacquer comprises uniformly distributed vinyl groups, SiO2, silicon and hydrocarbon chains, the chemical behaviour of the film is modified in such a way that a latent image is produced and the latent image thus produced is developed using an etching-gas/plasma mixture, the mixture including at least two gases which are capable of converting silicon and carbon together into a volatile compound, at least one of the gases having a tendency to polymerize.

85. 发明申请

WO1993015443A1 METHOD OF APPLYING A LACQUER FILM SENSITIVE TO UV AND/OR ELECTRON-BEAM RADIATION 审中-公开
标题翻译：对UV和/或电子束辐射敏感的涂层薄膜的方法
公开(公告)号：WO1993015443A1
公开(公告)日：1993-08-05
申请号：PCT/DE1992000777
申请日：1992-09-10
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , KLUMPP, Armin , HACKER, Erwin
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： G03F07/16
CPC分类号： G03F7/0757 , G03F7/167 , H01L21/3121
摘要： Lacquer films sensitive to ultraviolet (UV) and/or electron beam radiation are applied to substrates as masking layers by a process known as the "spin on process". This invention is a new method of applying a lacquer film sensitive to UV and/or electron beam radiation. A vinyl-containing substance and a linear or cyclic siloxane are vaporized and then deposited onto the substrate to be masked. In the preferred embodiment of the invention, the substances utilized are octamethylcyclotetrasiloxane and trivinylmethylsilane.

86. 发明申请

WO1993009469A1 EXPOSURE DEVICE 审中-公开
标题翻译：曝光装置
公开(公告)号：WO1993009469A1
公开(公告)日：1993-05-13
申请号：PCT/DE1991000859
申请日：1991-10-30
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , VOGT, Holger , KÜCK, Heinz , HESS, Günther , GEHNER, Andreas
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： G03F01/00
CPC分类号： G03F7/70283 , G03F7/70291 , G03F7/70358
摘要： An exposure device (1) useful for producing originals (6) or for directly exposing electronic elements has a light source (2) and a pattern generator (3). In order to shorten the required write or exposure time with an exposure device (1) having a simplified structure, the pattern generator (3) has an optical schlieren system (15, 17) and an active, matrix-addressable surface light modulator (13). The surface light modulator (13) has a reflecting surface whose addressed areas diffractively reflect incident light and whose non-addressed surface areas reflect incident light without diffraction. The schlieren system (15, 17) has a schlieren objective (15), a projection objective (16) and a reflecting device (17) which directs the light from the light source (2) onto the surface of the surface light modulator (13). The schlieren objective (15) is arranged at a short distance from the surface light modulator (13), in relation to its focal depth. A focussing device (4c) focusses the light from the light source (2) in at least one point (P) spaced apart from the reflecting device (17). At least one virtual punctual light source (P') can be associated to the point (P) by reflection of the point (P) on the reflecting device (17). A filtering device (18) is arranged on the diffraction plane of the virtual punctual light source (P'), between the schlieren objective (15) and the projection objective (16), and a movable positioning table (7) is provided, upon which the original (6), the electronic element or the structure may be secured.
摘要翻译：用于产生原稿（6）或直接暴露电子元件的曝光装置（1）具有光源（2）和图案发生器（3）。为了通过具有简化结构的曝光装置（1）缩短所需的写入或曝光时间，图案发生器（3）具有光学均匀系统（15,17）和有源矩阵寻址表面光调制器（13））。表面光调制器（13）具有反射表面，其寻址区域衍射地反射入射光，并且其未寻址的表面区域反射入射光而不衍射。分光光度计系统（15,17）具有均匀物镜（15），投影物镜（16）和反射装置（17），其将来自光源（2）的光引导到表面光调制器（13）的表面上）。散射物镜（15）相对于其焦深设置在与表面光调制器（13）相距很短的距离处。聚焦装置（4c）将来自光源（2）的光聚焦在与反射装置（17）间隔开的至少一个点（P）中。通过反射装置（17）上的点（P）的反射，至少一个虚拟准时光源（P'）可以与点（P）相关联。过滤装置（18）被布置在虚拟准时光源（P'）的衍射平面上，在施胶物镜（15）和投影物镜（16）之间，并且提供可动定位台（7）原始（6），电子元件或结构可以被固定。

87. 发明申请

WO1993008651A1 PROCESS FOR REDUCING FREQUENCY INTERLACING DURING ACOUSTIC OR OPTICAL SIGNAL TRANSMISSION AND/OR RECORDING 审中-公开
标题翻译：在声音或光信号传输和/或记录期间减少频率相关的过程
公开(公告)号：WO1993008651A1
公开(公告)日：1993-04-29
申请号：PCT/DE1992000855
申请日：1992-10-06
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , EDLER, Bernd
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： H04B01/66
CPC分类号： H04B1/667
摘要： A process is disclosed for reducing frequency interlacing during transmission of digitized audio signals. Frequency interlacing is always to be expected when the input signal is distributed among partial bands in series connected stages. According to the invention, signals from partial bands, in which spectral components of determined frequencies form signal components, and signals from partial bands, in which these spectral components form frequency interlacing components in the stop band, are subjected to a weighted summation. After transmission, the partial band signals are subjected to the reverse operation. The process works regardless of the selected coding process and is thus universally applicable.

88. 发明申请

WO1992021957A1 PROCESS AND DEVICE FOR EMISSION SPECTROSCOPY 审中-公开
标题翻译：用于发射光谱的方法和装置
公开(公告)号：WO1992021957A1
公开(公告)日：1992-12-10
申请号：PCT/DE1992000447
申请日：1992-06-02
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , NOLL, Reinhard
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： G01N21/63
CPC分类号： G01N21/718
摘要： Process for emission spectroscopy, especially laser emission spectroscopy, in which the radiation (40) emitted by the laser-induced plasma of the material to be analysed is broken down by a spectrometer (10) and at least one part of the spectrum found is transferred to a processing device (31, 45) for element analysis. In order to obtain the best possible accuracy of measurement and speed in the process, it is conducted in such a way that the intensity of the plasma-forming laser radiation (2) is varied to generate defined plasma states dependently upon at least one emission-influencing parameter which is measured during the formation of the plasma, and the spectrum found or a part thereof is transferred to the processing device (31, 45) provided that the measured plasma parameter lies within a predetermined tolerance range (T1 ./. T2).

89. 发明申请

WO1992021052A1 ELECTROCHROMIC LIGHT VALVE AND METHOD OF MANUFACTURING IT, AS WELL AS ITS USE 审中-公开
标题翻译：电致发光阀及其制造方法，以及其使用方法
公开(公告)号：WO1992021052A1
公开(公告)日：1992-11-26
申请号：PCT/EP1992001015
申请日：1992-05-08
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , BAUR, Günter , SCHLOTTER, Peter , STRINITZ, Heinz , WEINBERG, Uta
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： G02F01/15
CPC分类号： B32B17/10036 , B32B17/10174 , B32B17/10761 , G02F1/1523 , G02F1/155 , G02F2001/1555
摘要： The invention makes available an electrochromic light valve (1) with an active electrochromic film (2) and a passive electrochromic film (3). Between the two electrochromic films is an electrolyte (4). Each of the electrochromic films is connected to an associated electrode (5, 6). The active electrochromic film can accept electrons from its electrode and ions of a particular element from the electrolyte to become reversibly coloured. The passive electrochromic film acts as a reservoir for ions of the species concerned, donating such ions to and accepting them from the electrolyte. At the operating temperature of the light valve, the passive film is supersaturated with the element which provides the ions of the species concerned. The invention also covers a method of manufacturing the electrochromic light valve and uses of the valve.

90. 发明申请

WO1992020094A1 DIRECT SUBSTRATE BONDING 审中-公开
标题翻译：直接衬底结合
公开(公告)号：WO1992020094A1
公开(公告)日：1992-11-12
申请号：PCT/DE1992000365
申请日：1992-05-08
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , QUENZER, Hans, Joachim , BENECKE, Wolfgang
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： H01L21/18
CPC分类号： H01L21/187 , H01L21/2007 , Y10S148/012 , Y10S148/135
摘要： The description relates to a process for producing a solid surface bond between two wafers, at least one of which consists of a semiconductor material, e.g. silicon. The process comprises the following steps: a film residually moistened with solvents and containing silicates or phosphates is applied to the cleaned surface of at least one wafer; both wafer surfaces, at least one of which has had a film applied to it, are brought together; both wafers, joined together, are baked at temperatures below about 420 °C.

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