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    • 86. 发明专利
    • FIELD IONIZER USING
    • JPH02160339A
    • 1990-06-20
    • JP14554089
    • 1989-06-09
    • STANFORD RES INST INT
    • CHIYAARUSU EE SUPINTO
    • H01J9/02H01J27/26
    • PURPOSE: To provide an electrostatic field for ionization without causing discharge breakdown between a counter electrode and a conical stand. CONSTITUTION: This device includes a flat substrate 13, and a gas outlet 14 in the upper surface of the substrate 13 is formed by a layer made of a conducting material capable of maintaining one potential. The gas outlet 14 ends at a sharply pointed edge, i.e., an end 16, where a high electric field is generated to ionize gas passing through it. Another conducting material 17 adjacent to the outlet of the substrate 13 is also provided in the form of a layer on the substrate 13 to form a counter electrode to produce a potential difference at the gas outlet 14, thereby forming the desired electrostatic field. The interval between the counter electrode and the gas outlet 14 is narrow and has no relation with the pressure of the ambient atmosphere, therefore preventing discharge breakdown. Thereby the electrostatic field that is fundamentally of the same strength over the whole area is maintained to increase ionization efficiency.