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    • 84. 发明授权
    • Conveyance system
    • 运输系统
    • US07278812B2
    • 2007-10-09
    • US11045787
    • 2005-01-28
    • Takumi MizokawaMakoto OmoriYuzo TakakadoHitoshi Kawano
    • Takumi MizokawaMakoto OmoriYuzo TakakadoHitoshi Kawano
    • B65G49/07
    • H01L21/67173H01L21/67259H01L21/67727H01L21/67736
    • A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which one or more wares are processed. A hermetically closed chamber is provided that defines an isolated environment inside which a controlled atmosphere. At least one guide path is provided inside the hermetically closed chamber. At least one mobile element is movable inside the hermetically closed chamber along the at least one guide path to transport one or more wafers from one wafer processing apparatus to another. A plurality of position sensors that detect positions of the at least one mobile element are deployed along each of the at least one guide path in such a manner that they are deployed at intervals close together when near the wafer processing apparatuses and deployed at wider intervals elsewhere. In another aspect, the guide rails may be constructed of a plurality of connectable rail units. Because the guide rail can be disconnected and/or connected between rail units having position sensors, rearrangement and/or reattachment of the plurality of position sensors is not necessary when changing a configuration and/or extending the layout of the guide rail.
    • 描述了一种晶片传送系统,用于传输在被处理一个或多个晶片的多个晶片处理设备中经历同时进行不同处理的一个或多个晶片。 提供了一个密封的腔室,其限定了一个隔离的环境,其中受控气氛。 至少一个引导路径设置在气密封闭的室内。 至少一个移动元件可以沿着至少一个引导路径在气密封闭的腔室内移动,以将一个或多个晶片从一个晶片处理设备传送到另一个。 检测至少一个移动元件的位置的多个位置传感器沿着至少一个引导路径中的每一个被展开,使得它们在靠近晶片处理设备并以更宽的间隔在其他地方展开 。 在另一方面,导轨可以由多个可连接的轨道单元构成。 由于导轨可以在具有位置传感器的轨道单元之间断开和/或连接,所以在改变构造和/或延伸导轨的布局时,不需要多个位置传感器的重排和/或重新附接。
    • 90. 发明授权
    • Overhead hoist transfer
    • 高架起重机转运
    • US6092678A
    • 2000-07-25
    • US323833
    • 1999-06-02
    • Hitoshi KawanoMasanao MurataSusumu NakagawaMotonori InagakiToshiyuki Takaoka
    • Hitoshi KawanoMasanao MurataSusumu NakagawaMotonori InagakiToshiyuki Takaoka
    • B25J13/08B65G17/20B66C13/18B66C13/48
    • H01L21/67733H01L21/67736H01L21/681
    • In an overhead hoist transfer having a moving carriage with a hand portion, which holds a load, elevatably suspended therefrom; and a means for teaching an appointed stop position on a placement base, on which said load is placed, to said moving carriage, LEDs 7a and 7b are installed at the hand portion 6, and a position detecting portion 12 consisting of a lens 12a and PSD 12b is installed at the placement base 53 side, in order to automatically and accurately enable a teaching of position correcting data in a short time without use of any manpower. Further, a teaching portion is installed, which detects a deviation between the present stop position and the above appointed stop position on the basis of the relative position of the hand portion 6 with respect to the placement base, which is obtained by the position detecting portion 12, and carries out a teaching to the moving carriage by, for example, radio, whereby it is not necessary for an operator to carry out a teaching by actually moving the hand portion, wherein it is possible to accurately carry out a teaching of position correcting data in a short time.
    • 在具有具有手部的移动的支架的顶架式起重机转移中,其保持负载,可升降地悬挂在其上; 以及用于在所述移动托架上放置所述载荷的放置基座上指定指定的停止位置的装置,LED 7a和7b安装在手部6处,以及位置检测部分12,由透镜12a和 PSD 12b安装在放置基座53侧,以便在短时间内自动且准确地实现位置校正数据的教导而不使用任何人力。 此外,安装示教部,其基于由手部6相对于配置基座的相对位置来检测当前停止位置与上述指定停止位置之间的偏差,该位置由位置检测部 如图12所示,通过例如无线电向移动托架进行教导,由此操作者不需要通过实际移动手部来执行教导,其中可以准确地执行位置的教导 在短时间内纠正数据。