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    • 74. 发明授权
    • Plasma generation apparatus
    • 等离子体发生装置
    • US09377004B2
    • 2016-06-28
    • US14631142
    • 2015-02-25
    • IMAGINEERING, INC.
    • Yuji Ikeda
    • H05H1/46F02P23/04F02P3/01F02P9/00F02M27/08
    • F02P23/045F02M27/08F02P3/01F02P9/007H05H1/46H05H2001/463H05H2001/466H05H2001/4682
    • The present invention addresses the issue of improving generation efficiency of plasma in relation to usage power in a plasma generation apparatus. The present invention is directed to a plasma generation apparatus provided with an electromagnetic wave emission antenna and a discharge electrode. The plasma generation apparatus includes a plasma control device that controls generation of plasma, and is characterized that the plasma control device causes the electromagnetic wave emission antenna to intermittently emit electromagnetic waves by way of a drive sequence control. Especially, the plasma control device may preferably control an oscillating frequency, a power, output timing, a pulse width, a pulse cycle, and a duty cycle of the electromagnetic waves.
    • 本发明涉及等离子体发生装置中的使用功率相对于提高等离子体的发电效率的问题。 本发明涉及一种具有电磁波发射天线和放电电极的等离子体发生装置。 等离子体产生装置包括等离子体控制装置,其控制等离子体的产生,其特征在于等离子体控制装置使得电磁波发射天线通过驱动顺序控制间歇地发射电磁波。 特别地,等离子体控制装置可以优选地控制电磁波的振荡频率,功率,输出定时,脉冲宽度,脉冲周期和占空比。