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    • 71. 发明授权
    • Object observing apparatus, object observing method, and storage medium
    • 物体观测装置,物体观察方法和存储介质
    • US09297752B2
    • 2016-03-29
    • US14388358
    • 2013-04-04
    • ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL
    • Takeaki ShimokawaTakashi KosakaOkito YamashitaMasaaki Sato
    • G01D18/00G01N21/47A61B10/00A61B5/00
    • G01N21/4785A61B5/0042A61B5/0073A61B5/0091A61B10/0041G01N2201/121G01N2201/12753
    • In order to solve a problem that a local optical characteristic-changed region inside an object cannot be accurately estimated, an object observing apparatus includes: a light intensity information acquiring unit that acquires light intensity information received by each light-receiving probe; a light intensity change information acquiring unit that acquires, for each probe set, light intensity change information, from reference light intensity information and light intensity information; an estimating unit that acquires three-dimensional optical characteristic-changed region information, using the light intensity change information; and an output unit that outputs the optical characteristic-changed region information; the estimating unit including a correcting part that performs correction according to sensitivity attenuation in accordance with a depth; and a sparseness applying part that introduces sparseness for improving a space resolution, thereby acquiring the optical characteristic-changed region information. Accordingly, it is possible to accurately estimate a local optical characteristic-changed region inside an object.
    • 为了解决不能准确地估计对象内的局部光学特性变化区域的问题,物体观测装置包括:光强度信息获取单元,其获取由各受光探针接收的光强度信息; 光强度变化信息获取单元,对于每个探针组,从参考光强度信息和光强度信息获取光强度变化信息; 估计单元,使用光强度变化信息获取三维光学特性变化区域信息; 以及输出单元,其输出所述光学特性变化区域信息; 所述估计单元包括根据深度执行根据灵敏度衰减的校正的校正部分; 以及引入稀疏性以提高空间分辨率的稀疏性施加部,从而获取光学特性变化区域信息。 因此,可以精确地估计物体内部的局部光学特性变化区域。
    • 76. 发明授权
    • Method and system to compensate for lamp intensity differences in a photolithographic inspection tool
    • 补偿光刻检测工具灯强度差异的方法和系统
    • US07680321B2
    • 2010-03-16
    • US12101260
    • 2008-04-11
    • David DixonLloyd Lee
    • David DixonLloyd Lee
    • G06K9/00
    • G01N21/95607G01N21/278G01N21/93G01N21/9501G01N2021/8416G01N2201/0695G01N2201/12753
    • An after develop inspection tool considers tool-to-tool variability when determining confidence score for wafers under inspection. A golden wafer is used to calculate a RGB signature as well as the slope of the individual RGB curves for different lamp intensities. These slopes are normalized in order to generate a compensation factor for red values and blue values within a signature. When a wafer is subsequently inspected at an ADI station using a different lamp, the test wafer RGB signature is likely captured at a different lamp intensity. Consequently, when comparing the signatures, the golden wafer RGB signature is adjusted by the compensation factors, based on the different lamp's intensity setting, and this adjusted RGB signature is then used to determine whether a defect exists on the test wafer.
    • 在确定检查中的晶片的置信度得分后,开发后的检查工具会考虑刀具对刀具的变异性。 使用金色晶片来计算RGB特征以及不同灯泡强度的各个RGB曲线的斜率。 这些斜率被归一化以便在签名中产生红色值和蓝色值的补偿因子。 当使用不同的灯随后在ADI站检查晶片时,可能以不同的灯强度捕获测试晶片RGB特征。 因此,当比较签名时,基于不同的灯的强度设置,通过补偿因子来调整金色晶片RGB签名,然后使用该调整的RGB签名来确定在测试晶片上是否存在缺陷。
    • 80. 发明授权
    • Apparatus for monitoring a guard window of an arc sensor
    • 用于监测电弧传感器的防护窗的装置
    • US5337148A
    • 1994-08-09
    • US952501
    • 1992-12-02
    • Nobutoshi ToriiRyo NiheiHiroshi Wakio
    • Nobutoshi ToriiRyo NiheiHiroshi Wakio
    • B23K9/32B23K9/10G01J1/00G01J1/04G01J1/18G01J1/42G01N21/15G01N21/59
    • G01J1/18B23K9/10G01N2021/157G01N2021/5957G01N2201/12753
    • The purpose of the invention is to properly determine the replacement time of a guard window of an arc sensor using an original function of the arc sensor.The apparatus for monitoring a guard window of an arc sensor according to the present invention is provided with an arc sensor guard window (28) mounted on an arc sensor unit (20) and a standard reflecting plate (30) located at a position a determined distance from the front surface of the guard window (28). And the apparatus detects the reflected light (27) from the standard reflecting plate (30) when a laser beam (26) scans the standard reflecting plate (30), before the guard window (28) is used for an arc welding operation. The apparatus memorizes the quantity of detected light reception as the first quantity. The apparatus then detects the reflected light (27) from the standard reflecting plate (30) in the same way as before, after the guard window (28) is used for an arc welding operation. The apparatus memorizes the quantity of detected light reception as the second quantity of detected light reception as the second quantity. Based on the difference between the first quantity and the second quantity, the condition of the guard window (28) is checked and it is determined whether or not the guard window (28) should be replaced.
    • PCT No.PCT / JP92 / 00409 Sec。 371日期1992年12月2日 102(e)日期1992年12月2日PCT提交1992年4月2日PCT公布。 出版物WO92 / 17754 日期为1992年10月15日。本发明的目的是使用电弧传感器的原始功能来适当地确定电弧传感器的防护窗的更换时间。 根据本发明的用于监测电弧传感器的防护窗的装置设置有安装在电弧传感器单元(20)和标准反射板(30)上的电弧传感器防护窗(28),该标准反射板位于确定的位置 距保护窗(28)前表面的距离。 并且当激光束(26)在保护窗(28)用于电弧焊接操作之前扫描标准反射板(30)时,该装置从标准反射板(30)检测反射光(27)。 该装置将检测到的光接收量存储为第一数量。 然后,在将防护窗(28)用于电弧焊接操作之后,装置以与之前相同的方式从标准反射板(30)检测反射光(27)。 该装置将检测到的光接收量作为第二数量存储为第二检测光接收量。 基于第一数量和第二数量之间的差异,检查保护窗(28)的状况,并确定是否应更换防护窗(28)。