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    • 79. 发明授权
    • Torque sensor with a bridge-circuit of thick film resistors
    • 具有厚膜电阻桥式电路的转矩传感器
    • US06675663B1
    • 2004-01-13
    • US09806013
    • 2001-06-28
    • Jürgen IrionArthur SchäfertBernd ThyzelKlaus Weber
    • Jürgen IrionArthur SchäfertBernd ThyzelKlaus Weber
    • G01L104
    • G01L3/108
    • A mechanical/electrical transducer which has a bridge circuit formed by electrically connecting strain-sensitive thick-film resistors by conductor tracks, the thick-film resistors being arranged directly on a metallic component to be subjected mechanically to torsional loading and lying outside an axis of the component to be loaded which is neutral with respect to bending moments, it being possible to tap an electrical signal corresponding to the strain of the thick-film resistors when the component is subjected to torsion. In a mechanical/electrical transducer in which the electrical signal is tapped with the aid of a bridge circuit and in which the production of a bridge signal due to bending moments or tensile and compressive forces is reliably prevented, in each case at least one thick-film resistor (2; 4) in one arm of the bridge circuit is at the same distance from and at an angle of the same magnitude to the neutral axis (z axis) of the component (1) to be loaded as an opposite thick-film resistor (3; 5) in the second arm of the bridge circuit.
    • 一种机械/电传感器,其具有通过导体轨迹电连接应变敏感厚膜电阻器而形成的桥接电路,所述厚膜电阻器直接布置在金属部件上,以经受机械扭转加载并位于 要加载的组件相对于弯矩是中性的,当组件受到扭转时,可以抽出对应于厚膜电阻器的应变的电信号。在机电/电传感器中,其中电 借助于桥接电路对信号进行抽头,并且可靠地防止由于弯矩或拉伸和压缩力而产生桥接信号,在每种情况下,在一个臂中至少有一个厚膜电阻器(2; 4) 桥接电路的距离与相同大小的相同距离与要组装的部件(1)的中性轴(z轴)成相同的距离,作为相反的t ick膜电阻(3; 5)桥接电路的第二臂。
    • 80. 发明授权
    • Device for conveying substrates through a substrate processing plant
    • 用于通过基板处理设备输送基板的装置
    • US06241079B1
    • 2001-06-05
    • US09403330
    • 1999-10-16
    • Klaus WeberBernd Mahner
    • Klaus WeberBernd Mahner
    • B65G1500
    • H01L21/67706G11B7/26G11B23/00H01L21/67712
    • A device for conveying substrates through a substrate treatment device has a base transport belt defining a transport plane and two lateral transport belts positioned at a first spacing above the base transport belt. The two lateral transport belts are laterally spaced at a second spacing to one another. Each one of the two lateral transport belts defines a lateral transport plane. Each one of the lateral transport planes is positioned at a slant to the transport plane of the base transport belt. The two lateral transport belts and the base transport belt have cutouts for receiving vertically poisoned substrates. At least one of the first spacing and the second spacing is changeable. Also, the slant angle between at least one of the lateral transport planes to the transport plane of the base transport belt is changeable.
    • 用于通过基底处理装置输送基材的装置具有限定输送平面的基部输送带和以基部输送带上方的第一间隔定位的两个侧向输送带。 两个横向传送带以彼此之间的第二间隔横向隔开。 两个横向传送带中的每一个限定了侧向传送平面。 横向输送平面中的每一个定位成与基部输送带的输送平面倾斜。 两个横向传送带和基部传送带具有用于接收垂直中毒基板的切口。 第一间隔和第二间隔中的至少一个是可变的。 此外,至少一个横向输送平面与基部输送带的输送平面之间的倾斜角度是可变的。