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    • 80. 发明申请
    • BURIED TRACES FOR SEALED ELECTROSTATIC MEMBRANE ACTUATORS OR SENSORS
    • 用于密封静电膜驱动器或传感器的浸入轨迹
    • US20100077609A1
    • 2010-04-01
    • US12240251
    • 2008-09-29
    • Peter M. GULVINPeter J. Nystrom
    • Peter M. GULVINPeter J. Nystrom
    • H05K3/10
    • B41J2/14314B41J2/1621B41J2/1629B41J2/1639Y10T29/49155
    • In accordance with the invention, there are micro-electromechanical devices and methods of fabricating them. An exemplary micro-electromechanical device can include a first dielectric layer; a buried conductive trace disposed over the first dielectric layer, such that the buried conductor trace is electrically connected to an outside power source; a second dielectric layer disposed over the buried conductive trace; at least one conductive electrode disposed over the second dielectric layer and electrically connected to the buried conductive trace; and at least one conductive membrane including membrane anchors disposed over the second dielectric layer, such that the at least one conductive membrane is electrically isolated from the at least one conductive electrode and the buried conductor trace, wherein the at least one conductive electrode is electrically connected to the power source through the buried conductive trace.
    • 根据本发明,存在微机电装置及其制造方法。 示例性的微机电装置可以包括第一电介质层; 设置在所述第一介电层上的掩埋导电迹线,使得所述掩埋导体迹线电连接到外部电源; 设置在所述掩埋导电迹线上的第二电介质层; 至少一个导电电极设置在所述第二电介质层上并电连接到所述掩埋的导电迹线; 以及至少一个导电膜,包括设置在所述第二介电层上的膜锚,使得所述至少一个导电膜与所述至少一个导电电极和所述掩埋导体迹线电隔离,其中所述至少一个导电电极电连接 通过埋地导电迹线到电源。