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    • 72. 发明授权
    • Migratable backup and restore
    • 可迁移备份和还原
    • US07797278B2
    • 2010-09-14
    • US10861857
    • 2004-06-04
    • Hiroshi KatohHirokazu MiyamoriKei WatanabeNaoki Yamakoshi
    • Hiroshi KatohHirokazu MiyamoriKei WatanabeNaoki Yamakoshi
    • G06F7/00G06F17/00
    • G06F21/6218
    • A backup system for backing up target data stored in an information processing device comprises a backup program stor for retaining a backup program, a read authentication information stor for retaining read authentication information, a backup function sender which transfers the backup program and the read authentication information to the device, and a data stor which retains the target data to be transferred to the backup system by the device which has executed the backup program, wherein the backup program is invoke-able on the device by a user of the device, and comprises a read authentication mechanism for obtaining permission to read the target data from the device by causing the read authentication information to be authenticated, and a transfer mechanism for causing the device to read the target data and transfer the target data to the backup system.
    • 用于备份存储在信息处理设备中的目标数据的备份系统包括用于保留备份程序的备份程序存储器,用于保留读取认证信息的读取认证信息存储器,传送备份程序的备份功能发送器和读取认证信息 以及数据存储器,其通过已经执行所述备份程序的设备保留要传送到所述备份系统的目标数据,其中所述备份程序可由所述设备的用户在所述设备上调用,并且包括 读取认证机制,用于通过使读取的认证信息被认证来获得从设备读取目标数据的许可;以及传送机制,用于使设备读取目标数据并将目标数据传送到备份系统。
    • 73. 发明授权
    • Method of fabricating semiconductor device
    • 制造半导体器件的方法
    • US07781301B2
    • 2010-08-24
    • US12536631
    • 2009-08-06
    • Kei WatanabeAkifumi GawaseKenichi Otsuka
    • Kei WatanabeAkifumi GawaseKenichi Otsuka
    • H01L21/76
    • H01L21/7682H01L21/76807H01L21/76832H01L21/76835
    • A method of fabricating a semiconductor device according to one embodiment includes: forming an interlayer sacrificial film and an insulating film located thereon above a semiconductor substrate having a semiconductor element, the interlayer sacrificial film having a wiring provided therein; etching the insulating film, or, etching the insulating film and the interlayer sacrificial film to form a trench reaching the interlayer sacrificial film; forming a gas permeable film in the trench; gasifying and removing the interlayer sacrificial film through the trench and the gas permeable film; and forming a sealing film on the gas permeable film for sealing the vicinity of an opening of the trench after removing the interlayer sacrificial film.
    • 根据一个实施例的制造半导体器件的方法包括:在具有半导体元件的半导体衬底之上形成层间牺牲膜和绝缘膜,所述层间牺牲膜具有设置在其中的布线; 蚀刻绝缘膜,或者蚀刻绝缘膜和层间牺牲膜以形成到达层间牺牲膜的沟槽; 在沟槽中形成透气膜; 通过沟槽和透气膜气化和去除层间牺牲膜; 在透气膜上形成密封膜,用于在除去层间牺牲膜之后密封沟槽的开口附近。
    • 76. 发明授权
    • Substrate holding device
    • 基板保持装置
    • US07644968B2
    • 2010-01-12
    • US10586654
    • 2005-01-21
    • Yasuo HirookaYasuhiko HashimotoKei Watanabe
    • Yasuo HirookaYasuhiko HashimotoKei Watanabe
    • B25J15/00B65G49/07
    • H01L21/68707Y10S294/902Y10S414/141
    • A supporting structure is mounted on a hand body facing a circumferential edge of a substrate from below the substrate to support the substrate. First and second guiding members are mounted on the hand body, and having guiding surfaces in contact with an imaginary cylinder having an axis aligned with a reference axis of the hand body. First and second movable members are capable of moving in an imaginary plane perpendicular to the reference axis and are disposed on the radially outer-side of the circumferential edge of the substrate so as to face the circumferential edge. A driving unit simultaneously displaces the first and second movable members in the imaginary plane. The first and second guiding members and the first and second movable members are spaced apart on the circumference of the imaginary cylinder at intervals greater than the length of the arc of a segment in a substrate holding state.
    • 支撑结构从基板的下方安装在面向基板的周缘的手体上以支撑基板。 第一引导构件和第二引导构件安装在手柄上,并且具有与具有与手柄的基准轴线对准的轴线的假想气缸接触的引导表面。 第一和第二可移动构件能够在垂直于参考轴线的虚拟平面中移动,并且设置在基板的周向边缘的径向外侧上以面向周向边缘。 驱动单元同时在假想平面中移动第一和第二可动构件。 第一和第二引导构件以及第一和第二可移动构件在假想圆柱的圆周上以基片保持状态下的段的弧的长度间隔开。
    • 77. 发明申请
    • Substrate Holding Device
    • 基板保持装置
    • US20070216179A1
    • 2007-09-20
    • US10586654
    • 2005-01-21
    • Yasuo HirookaYasuhiko HashimotoKei Watanabe
    • Yasuo HirookaYasuhiko HashimotoKei Watanabe
    • H01L21/687
    • H01L21/68707Y10S294/902Y10S414/141
    • The present device includes a supporting structure (23) mounted on a hand body (22) so as to face a circumferential edge of a substrate from below the substrate to support it, first and second guiding members (51a, 51b) mounted on the hand body (22) and respectively having guiding surfaces (53a, 53b) in contact with an imaginary cylinder having an axis aligned with a reference axis (L1) of the hand body (22and having a radius equal to that of the substrate, first and second movable members (24, 25) capable of moving in an imaginary plane perpendicular to the reference axis (L1) and disposed on the radially outer side of the circumferential edge of the substrate so as to face the circumferential edge thereof, and driving means (26) for simultaneously displacing the first and second movable members (24, 25) in the imaginary plane. The first and second guiding members (51a, 51b) and the first and second movable member (24, 25) are spaced apart on the circumference of the imaginary cylinder at circumferential intervals greater than the length of the arc of a segment cut to form a circumferential cut part in a substrate holding state where the substrate is held by at least either of the first and second guiding members (51a, 51b) and at least either of the first and second movable members (24, 25).
    • 本装置包括安装在手柄(22)上的支撑结构(23),以从基板的下方面对基板的周缘,以支撑其;安装在基板上的第一和第二引导构件(51a,51b) 手体(22),并且分别具有与具有与手柄(22)的参考轴线(L 1)对准的轴线的虚拟圆筒接触的引导表面(53a,53b),其半径等于 基板,能够在与基准轴线(L1)垂直的虚拟平面中移动并且设置在基板的周向边缘的径向外侧上的基板,第一和第二可移动部件(24,25),以面对周缘 第一和第二引导构件(51a,51b)以及第一和第二可移动构件(24,25),用于将第一和第二可移动构件(24,25) 25)间隔开 假想圆柱体的圆周间隔大于切割成形成圆周切割部分的圆弧长度的圆周间隔的基底保持状态,其中基底由第一和第二引导部件(51a, 51b)和第一和第二可动构件(24,25)中的至少一个。