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    • 80. 发明申请
    • DISPLAY SUBSTRATE MANUFACTURING METHOD AND VACUUM PROCESSING APPARATUS
    • 显示基板制造方法和真空处理装置
    • US20090088041A1
    • 2009-04-02
    • US12235183
    • 2008-09-22
    • Masato InoueShin Matsui
    • Masato InoueShin Matsui
    • H01J9/38H01J9/385
    • H01L21/67028H01L21/6831
    • A display substrate manufacturing method includes a placing step of placing a dummy substrate on a clamping surface, an evacuating step of evacuating the interior of a space formed between the clamping surface and dummy substrate, in order to bring the dummy substrate into tight contact with the clamping surface, a heating step of heating a base in order to facilitate removing, from the clamping surface, foreign particles sticking to the clamping surface, a transferring step of transferring the foreign particles sticking to the clamping surface from the clamping surface to the dummy substrate in tight contact with the clamping surface, and a removing step of removing, from the clamping surface, the dummy substrate to which the foreign particles are transferred in the transferring step.
    • 显示基板的制造方法包括将虚设基板放置在夹持面上的放置步骤,对形成在夹持面和虚设基板之间的空间内部抽真空的抽空工序,使虚设基板与 夹持表面,加热基底的加热步骤,以便于从夹紧表面移除粘附到夹紧表面的异物;转移步骤,将从夹紧表面粘附到夹紧表面的外来颗粒转移到虚拟基板 与夹紧表面紧密接触,以及从夹紧表面移除在转印步骤中异物转移到的虚设基板的去除步骤。