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71. 发明授权

US5825470A Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US5825470A
公开(公告)日：1998-10-20
申请号：US614057
申请日：1996-03-12
申请人： Tsuneo Miyai , Yuji Imai
发明人： Tsuneo Miyai , Yuji Imai
IPC分类号： G03F7/20 , G03B27/58 , G03B27/42 , B65B21/02
CPC分类号： G03F7/707 , G03F7/7075 , G03F7/70866 , G03F7/70916 , Y10S414/137
摘要： Disclosed is an exposure apparatus comprising a substrate holder washing unit and a substrate holder storing unit. While a substrate holder exported from an exposure stage is washed in the washing unit, a clean holder previously stored in the storing unit is transported to an X stage by using a robot hand and a transport arm, and it is installed to the X stage by using an attaching/detaching mechanism. The holder can be always maintained in a clean state without stopping the apparatus for a long period of time, resulting in improvement in throughput. Also disclosed is an exposure apparatus comprising a mechanism for cleaning a substrate holder by transporting a whetstone onto the holder, engaging the whetstone with an engaging member, and rotating the whetstone by using a rotary driving unit. The exposure apparatus is provided with a unit for drawing dust emerged upon cleaning with the whetstone.
摘要翻译：公开了一种曝光装置，包括基板保持器清洗单元和基板保持器存储单元。当从曝光台输出的基板保持器在洗涤单元中洗涤时，预先存储在存储单元中的清洁保持器通过使用机器人手和输送臂被运送到X台，并且通过使用安装/拆卸机构。保持器可以始终保持在清洁状态，而不会长时间地停止装置，从而提高了生产量。还公开了一种曝光装置，其包括用于通过将磨石输送到保持器上来清洁衬底保持器的机构，将磨石与接合构件接合，并且通过使用旋转驱动单元旋转砂轮。曝光装置设置有用于在用砂轮清洁时出现灰尘的单元。

72. 发明授权

US5633698A Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US5633698A
公开(公告)日：1997-05-27
申请号：US549118
申请日：1995-10-27
申请人： Yuji Imai
发明人： Yuji Imai
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30 , G03B27/42 , G03B27/58
CPC分类号： G03F7/707 , G03F7/70716 , G03F7/70858 , G03F7/70866 , G03F7/70891 , G03F9/70 , G03F9/7026 , G03F9/7096
摘要： An exposure apparatus comprises a substrate holding portion for holding a photosensitive substrate including a surface, a substrate stage for two-dimensional positioning of the photosensitive substrate via the substrate holding portion, the substrate stage including an upper surface, and an exposure system for transferring a pattern on a mask to the photosensitive substrate by an exposing illumination light. The substrate holding portion is provided in the substrate stage so that the portion of the upper surface of the substrate stage surrounding the photosensitive substrate is substantially flush with the surface of the photosensitive substrate.
摘要翻译：曝光装置包括用于保持包括表面的感光基板的基板保持部分，用于经由基板保持部分对感光基板进行二维定位的基板台，包括上表面的基板台，以及用于转印通过曝光照明光将掩模图案掩模到感光基板上。衬底保持部设置在衬底台中，使得围绕感光衬底的衬底台的上表面的部分与感光衬底的表面基本齐平。

73. 发明授权

US5633101A Mask and projection exposure method 失效
标题翻译：面罩和投影曝光方法
公开(公告)号：US5633101A
公开(公告)日：1997-05-27
申请号：US303667
申请日：1994-09-09
申请人： Yuji Imai
发明人： Yuji Imai
IPC分类号： G03F1/40 , G03F1/50 , G03F7/20 , H01L21/027 , G03F9/00
CPC分类号： G03F7/70241 , G03F1/48 , G03F7/70866 , G03F7/70875
摘要： An exposure mask formed with a predetermined pattern for exposure on a substrate to be subjected to exposure comprises a glass substrate and a heat conductive film having a thermal conductivity higher than that of the glass substrate, wherein the heat conductive film is so formed as to cover substantially an entire surface of the glass substrate, and the pattern is so formed as to be in contact with the heat conductive film.
摘要翻译：在曝光用基板上曝光的预定图案形成的曝光掩模包括玻璃基板和导热性比玻璃基板的热导率高的导热膜，其中导热膜形成为覆盖基本上是玻璃基板的整个表面，并且图案形成为与导热膜接触。

74. 发明授权

US5581324A Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors 失效
标题翻译：热失真补偿投影曝光方法及半导体制造装置
公开(公告)号：US5581324A
公开(公告)日：1996-12-03
申请号：US446511
申请日：1995-05-22
申请人： Tsuneo Miyai , Yuji Imai , Tetsuo Taniguchi , Kousuke Suzuki
发明人： Tsuneo Miyai , Yuji Imai , Tetsuo Taniguchi , Kousuke Suzuki
IPC分类号： G03F7/20 , G03B27/42 , G03B27/52
CPC分类号： G03F7/70875 , G03F7/70258 , G03F7/70866 , G03F7/70983
摘要： A projection exposure apparatus has a light source for emitting illumination light, an illumination optical system for illuminating a mask, on which a predetermined pattern is formed, with the illumination light, and a projection optical system for forming an image of the pattern on a photosensitive substrate, and images the image of the pattern on the photosensitive substrate in a predetermined imaging state. The apparatus also includes a temperature measurement sensor for measuring a change in temperature of the mask, a control system for calculating the change amount of the imaging state caused by the change in temperature, and a correction system for correcting the change in imaging state.
摘要翻译：投影曝光装置具有用于发射照明光的光源，用于照亮其上形成有预定图案的掩模的照明光学系统与照明光，以及用于在感光体上形成图案的图像的投影光学系统衬底，并以预定的成像状态将图案的图像在感光衬底上成像。该装置还包括用于测量掩模温度变化的温度测量传感器，用于计算由温度变化引起的成像状态的变化量的控制系统和用于校正成像状态变化的校正系统。

75. 发明授权

US5569930A Substrate height position detecting apparatus wherein a stop plate transmits a pattern of oblique light beams which are reflected by the substrate 失效
标题翻译：基板高度位置检测装置，其中止挡板透射由基板反射的倾斜光束的图案
公开(公告)号：US5569930A
公开(公告)日：1996-10-29
申请号：US333291
申请日：1994-11-01
申请人： Yuji Imai
发明人： Yuji Imai
IPC分类号： G01B11/00 , G03F7/20 , G03F7/207 , G03F9/00 , H01L21/027 , H01L21/68 , G01N21/86
CPC分类号： G03F7/70858 , G03F7/70866 , G03F9/70
摘要： To detect the height position of a substrate, a stop-plate having a plurality of slits applies light beams of elongated cross-section to the substrate obliquely. A sensor having a plurality of sensor elements receives light beams reflected from the substrate and outputs signals for controlling the height of the substrate. Additional light beams and sensor elements may be provided to output information regarding the direction of height deviation and the amount of height deviation.
摘要翻译：为了检测基板的高度位置，具有多个狭缝的止动板将斜长的横截面的光束倾斜地施加到基板。具有多个传感器元件的传感器接收从基板反射的光束并输出用于控制基板的高度的信号。可以提供附加的光束和传感器元件以输出关于高度偏差的方向和高度偏差量的信息。

76. 发明授权

US5473166A Inclination detecting apparatus having an intensity adjusting unit 失效
标题翻译：具有强度调节单元的倾斜检测装置
公开(公告)号：US5473166A
公开(公告)日：1995-12-05
申请号：US330826
申请日：1994-10-27
申请人： Yuji Imai , Shinji Wakamoto
发明人： Yuji Imai , Shinji Wakamoto
IPC分类号： G01B11/26 , G03F9/00 , H01L21/027 , H01L21/68 , G01N21/86
CPC分类号： G03F9/70
摘要： An inclination detecting device has a light emitting system for emitting a parallel light flux to a substrate; a light receiving system for condensing the light reflected from the substrate, detecting the reflected light photoelectrically and outputting a photoelectric signal in accordance with the intensity of the reflected light; a stop member for changing at least one of the shape and the size of an illumination area of the parallel light flux on the substrate; an adjusting unit for changing the intensity of the photoelectric signal in accordance with the change of at least one of the shape and the size of the illumination area defined by the stop member; and a unit for detecting an inclination of the substrate with respect to a predetermined reference plane based on the photoelectric signal from the light receiving system.
摘要翻译：倾斜检测装置具有用于向基板发射平行光通量的发光系统; 光接收系统，用于会聚从基板反射的光，根据反射光的强度检测反射光并输出光电信号; 用于改变所述基板上的平行光束的照明区域的形状和尺寸中的至少一个的停止构件; 调整单元，用于根据由停止构件限定的照明区域的形状和尺寸中的至少一个的变化来改变光电信号的强度; 以及用于基于来自光接收系统的光电信号来检测基板相对于预定参考平面的倾斜度的单元。

77. 发明授权

US5469237A Data printing apparatus 失效
标题翻译：数据打印设备
公开(公告)号：US5469237A
公开(公告)日：1995-11-21
申请号：US164402
申请日：1993-12-08
申请人： Junichi Itoh , Yuta Sato , Minoru Matsuzaki , Masaharu Hamada , Yuji Imai
发明人： Junichi Itoh , Yuta Sato , Minoru Matsuzaki , Masaharu Hamada , Yuji Imai
IPC分类号： G03B17/24 , G03B17/52
CPC分类号： G03B17/24 , G03B2217/243
摘要： A data printing apparatus of this invention controls the emission timing or the emission interval of a light-emitting means on the basis of a signal according to traveling of a sheet film along a traveling path so as to print data free from blurring of characters or a variation in interval between characters on the sheet film having no perforations. After an exposure operation is ended, the apparatus feeds the sheet film from an exposure position along a spool wall. Light corresponding to digital numerals representing a date is emitted by light-emitting elements, and the date to be printed by the light-emitting elements is focused on the sheet film by an optical system. The date on the sheet film is printed during traveling of the sheet film along the spool wall. The apparatus also includes a photoreflector, arranged in a traveling chamber of the film, for detecting an emulsion portion on which an object image from a photographing lens is exposed, and the remaining frame portion on the basis of a difference in reflectance, and a timer for measuring a moving time from when the frame portion is detected by the photoreflector until the emulsion portion is detected thereby, and controls the emission timings of the light-emitting elements on the basis of the moving time.
摘要翻译：本发明的数据打印装置基于根据片材沿着行进路径行进的信号来控制发光装置的发射定时或发射间隔，以便打印没有字符模糊的数据或在没有穿孔的薄膜上的字符之间的间隔的变化。在曝光操作结束之后，该装置沿着卷轴壁从曝光位置供给薄膜。对应于表示日期的数字数字的光由发光元件发射，并且由发光元件打印的日期通过光学系统聚焦在薄膜上。在薄膜沿着卷轴壁行进期间印刷薄膜上的日期。该装置还包括布置在胶片的移动室中的光反射器，用于检测来自拍摄镜头的物体图像被暴露在其上的乳液部分，并且基于反射率差异的剩余帧部分和定时器用于测量从光反射器检测到帧部分直到检测到乳剂部分为止的移动时间，并且基于移动时间来控制发光元件的发射定时。

78. 发明授权

US5374554A Microorganism and process for preparing D-biotin using the same 失效
标题翻译：微生物和使用其制备D-生物素的方法
公开(公告)号：US5374554A
公开(公告)日：1994-12-20
申请号：US4111
申请日：1993-01-13
申请人： Saburo Komatsubara , Yuji Imai , Makoto Masuda , Naoki Sakurai
发明人： Saburo Komatsubara , Yuji Imai , Makoto Masuda , Naoki Sakurai
IPC分类号： C12N1/21 , C12N15/52 , C12P17/18 , C12R1/43 , C12N15/00
CPC分类号： C12R1/43 , C12N15/52 , C12P17/186
摘要： A microorganism derived from a host microorganism capable of producing d-biotin by introducing a recombinant plasmid being incorporated with a biotin gene cloned from a microorganism of the genus Serratia capable of producing d-biotin and further integrating an exogenous biotin gene into the chromosome, and a process for preparing d-biotin which comprises cultivating the microorganism in a culture medium so that d-biotin is formed and accumulated in the culture medium and collecting the d-biotin. The microorganism of the invention has an extremely high productivity of d-biotin, and hence, d-biotin can be produced in a large amount by cultivating the microorganism of the invention.
摘要翻译：从能够产生d生物素的宿主微生物得到的微生物，通过引入重组质粒，该重组质粒与能够产生d生物素的沙雷杆菌属的微生物克隆的生物素基因并进一步将外源生物素基因整合到染色体中，以及一种制备D-生物素的方法，其包括在培养基中培养微生物，使得d-生物素在培养基中形成并积聚并收集d-生物素。本发明的微生物具有非常高的d生物素的生产率，因此通过培养本发明的微生物可以大量生产d生物素。

79. 发明授权

US5019845A Flash device for camera 失效
标题翻译：照相机闪光灯
公开(公告)号：US5019845A
公开(公告)日：1991-05-28
申请号：US537040
申请日：1990-06-12
申请人： Yasuo Asakura , Yuji Imai , Yuji Kobayashi
发明人： Yasuo Asakura , Yuji Imai , Yuji Kobayashi
IPC分类号： G03B15/05
CPC分类号： G03B15/05 , G03B2215/051 , G03B2215/0553
摘要： A flash device for a camera comprises a plurality of flash light emitting portions having different flash illumination angles. A single common electric charge storage supplies energy to each of the flash light emitting portions. Each of a plurality of triggers corresponds to one of flash light emitting portions. In response to the focal length of a taking lens disposed in the camera, a controller determines which of a plurality of the flash light emitting portions to be fired and trigger the appropriate trigger corresponding to the flash light emitting portion to be fired.
摘要翻译：用于相机的闪光装置包括具有不同闪光照明角度的多个闪光发光部。单个公共电荷存储器向每个闪光发光部分供应能量。多个触发器中的每一个对应于闪光发光部分中的一个。响应于设置在相机中的拍摄镜头的焦距，控制器确定要被点燃的多个闪光发光部分中的哪一个，并且触发与闪光发光部分相对应的适当的触发。

80. 发明授权

US4924253A Drive apparatus for a focusing lens 失效
标题翻译：用于聚焦透镜的驱动装置
公开(公告)号：US4924253A
公开(公告)日：1990-05-08
申请号：US181308
申请日：1988-04-13
申请人： Yuji Imai , Kazuyuki Iwasa
发明人： Yuji Imai , Kazuyuki Iwasa
IPC分类号： G03B13/36 , G02B7/28 , G02B7/32
CPC分类号： G02B7/32
摘要： A focusing lens drive apparatus in which an adjusting value for adjusting an fc error in an EEPROM of a digital memory has been stored, determines an amount of driving a focusing lens, when a CPU receives a measured range data from an AFIC, by calculation based on the measured range data and the adjusting value stored in the digital memory and drives the focusing lens by controlling a lens drive mechanism in accordance with the determined amount of driving the focusing lens. In addition, in a camera with a zoom lens and a camera of the two focus switching type, a plurality of adjusting values are stored in the digital memory in response to information of focal length.Furthermore, such adjusting values are stored in the digital memory to adjust an fc error as well as an AF error in a range finder.
摘要翻译：已经存储了用于调整数字存储器的EEPROM中的fc误差的调整值的聚焦透镜驱动装置，当CPU从AFIC接收到测量范围数据时，确定聚焦透镜的驱动量，通过基于计算对测量范围数据和存储在数字存储器中的调节值进行控制，并通过根据确定的聚焦透镜的驱动量来控制透镜驱动机构来驱动聚焦透镜。此外，在具有变焦镜头和两焦点切换类型的照相机的相机中，响应于焦距的信息将多个调整值存储在数字存储器中。此外，这样的调整值被存储在数字存储器中以调整测距仪中的fc误差以及AF误差。

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