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    • 72. 发明授权
    • Driver
    • 司机
    • US08022597B2
    • 2011-09-20
    • US12532878
    • 2007-03-30
    • Jun Suzuki
    • Jun Suzuki
    • H01L41/08
    • G11B9/02B82Y10/00G11B9/1436
    • A driving apparatus (100) is provided with: a base portion (110); a stage portion (130) on which a driven object (12) is mounted and which can be displaced; an elastic portion (120) which connects the base portion and the stage portion and which has elasticity to displace the stage portion in one direction; a first applying device (141, 142, 143, 22) for applying an excitation force for displacing the stage portion such that the stage portion is resonated in the one direction (Y axis) at a resonance frequency determined by the stage portion and the elastic portion; and a second applying device (161, 162, 22) for applying a driving force for displacing, in a stepwise manner or in a continuous manner, the stage portion or the driven object mounted on the stage in other direction (X axis).
    • 驱动装置(100)具有:基部(110); 其中安装有被驱动物体(12)并能够移动的台部部分(130) 弹性部分(120),其连接所述基部和所述台部部分,并且具有弹性以在一个方向上移动所述台部部分; 第一施加装置(141,142,143,22),用于施加用于使所述载物台部分移位的激励力,使得所述载物台部分以由所述载物台部分确定的共振频率沿所述一个方向(Y轴)共振,并且所述弹性体 一部分; 以及第二施加装置(161,162,22),用于施加驱动力,以逐步的方式或以连续的方式移动安装在载物台上的台架部分或从动对象的另一方向(X轴)。
    • 76. 发明授权
    • Driving apparatus
    • 驱动装置
    • US07893642B2
    • 2011-02-22
    • US12532797
    • 2007-03-30
    • Jun Suzuki
    • Jun Suzuki
    • G05B11/01
    • G11B9/1436B82Y10/00G11B9/02
    • A driving apparatus (100p, 100s) is provided with: a base portion (110); a stage portion (130) on which a driven object (12) is mounted and which can be displaced; an elastic portion (120) which has elasticity to displace the stage portion in one direction (Y axis); a first applying device (151-2, 152-2, 22) for applying an excitation force for displacing the stage portion such that the stage portion is resonated in the one direction at a resonance frequency determined by the stage portion and the elastic portion; and a second applying device (151-1, 152-1, 22) for applying a driving force for displacing, in a stepwise manner or in a continuous manner, the stage portion or the driven object mounted on the stage portion in other direction (X axis), wherein the stage portion or another stage portion mounted on the stage portion as the driven object is divided into a plurality of stage fractions.
    • 驱动装置(100p,100s)具有:基部(110); 其中安装有被驱动物体(12)并能够移动的台部部分(130) 弹性部分(120),其在一个方向(Y轴)上具有使所述台部分移动的弹性; 第一施加装置(151-2,152-2,22),用于施加用于使所述载物台部分移位的激励力,使得所述载物台部分以由所述载物台部分和所述弹性部分确定的共振频率沿所述一个方向共振; 以及第二施加装置(151-1,152-1,22),用于施加驱动力,以逐步的方式或以连续方式移动安装在台架部分上的平台部分或被驱动物体沿另一个方向( X轴),其中安装在作为被驱动对象的台部上的台部或其他台部被分割成多个台阶。
    • 77. 发明授权
    • Driving apparatus
    • 驱动装置
    • US07884526B2
    • 2011-02-08
    • US12532794
    • 2007-03-30
    • Jun Suzuki
    • Jun Suzuki
    • H02N2/00
    • G11B9/1454G11B9/02
    • A driving apparatus (100j) is provided with: a base portion (110); a stage portion (130) on which a driven object (12) is mounted and which can be displaced; an elastic portion (120) which connects the base portion and the stage portion and which has elasticity to displace the stage portion in one direction (Y axis); a first applying device (161, 162, 22) for applying an excitation force for displacing the stage portion such that the stage portion is resonated in the one direction at a resonance frequency determined by the stage portion and the elastic portion; and a frequency adjusting device (170) for dynamically adjusting the resonance frequency.
    • 驱动装置(100j)具有:基部(110); 其中安装有被驱动物体(12)并能够移动的台部部分(130) 弹性部(120),其连接所述基部和所述台部,并且具有弹性以使所述台部沿一个方向(Y轴)移位; 第一施加装置(161,162,22),用于施加用于使所述载物台部分移位的激励力,使得所述载物台部分以由所述载物台部分和所述弹性部分确定的共振频率沿所述一个方向共振; 以及用于动态调整谐振频率的频率调节装置(170)。
    • 79. 发明申请
    • PHOTODETECTOR
    • 照相机
    • US20110024855A1
    • 2011-02-03
    • US12922805
    • 2009-03-16
    • Jun SuzukiFumikazu OjimaRyusuke Kitaura
    • Jun SuzukiFumikazu OjimaRyusuke Kitaura
    • H01L31/02
    • H01L27/1446G01J5/20H01L27/14669H01L37/00
    • An infrared detector (1) having a bolometer element (11) and a reference element (21) is provided with a bolometer thin film (22) supported on a surface of a substrate (10) while spaced apart from the surface of the substrate (10), a metal film (23) for heat dissipation formed on the substrate (10)-side surface of the bolometer thin film (22) through an insulating film (31), and a plurality of metal columns (25) connected thermally with the metal film (23) for heat dissipation and the substrate (10). Since heat generated from a light receiving portion (22a) by infrared rays is dissipated efficiently to the substrate (10) through the insulating film (31), the metal film (23) for heat dissipation, the metal columns (25), and a metal film (24) for heat dissipation on the side of the substrate, only temperature variation caused by variation in use environment can be measured accurately, and downsizing can be achieved while reducing the influence of temperature variation in use environment efficiently.
    • 具有测辐射热计元件(11)和参考元件(21)的红外检测器(1)设置有与基板表面间隔开的支撑在基板(10)的表面上的测辐射热计薄膜(22) 10),通过绝缘膜(31)形成在测辐射热计薄膜(22)的基板(10)侧表面上的用于散热的金属膜(23),以及多个金属柱(25),其与 用于散热的金属膜(23)和基板(10)。 由于通过红外线从光接收部分(22a)产生的热量通过绝缘膜(31)有效地散发到基板(10),所以用于散热的金属膜(23),金属柱(25)和 在基板侧散热的金属膜(24),只能精确地测量由使用环境的变化引起的温度变化,能够有效地减小使用环境的温度变化的影响,从而实现小型化。