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    • 73. 发明授权
    • Normally-off gallium nitride-based semiconductor devices
    • 通常的氮化镓基半导体器件
    • US08802516B2
    • 2014-08-12
    • US12657757
    • 2010-01-27
    • Jamal Ramdani
    • Jamal Ramdani
    • H01L21/336H01L21/338H01L31/0336
    • H01L29/225H01L29/2003H01L29/66462H01L29/7786
    • A method includes forming a relaxed layer in a semiconductor device. The method also includes forming a tensile layer over the relaxed layer, where the tensile layer has tensile stress. The method further includes forming a compressive layer over the relaxed layer, where the compressive layer has compressive stress. The compressive layer has a piezoelectric polarization that is approximately equal to or greater than a spontaneous polarization in the relaxed, tensile, and compressive layers. The piezoelectric polarization in the compressive layer could be in an opposite direction than the spontaneous polarization in the compressive layer. The relaxed layer could include gallium nitride, the tensile layer could include aluminum gallium nitride, and the compressive layer could include aluminum indium gallium nitride.
    • 一种方法包括在半导体器件中形成松弛层。 该方法还包括在松弛层上形成拉伸层,其中拉伸层具有拉伸应力。 该方法还包括在松弛层上形成压缩层,其中压缩层具有压应力。 压缩层具有大致等于或大于松弛,拉伸和压缩层中的自发极化的压电极化。 压缩层中的压电极化可能与压缩层中的自发极化方向相反。 松弛层可以包括氮化镓,拉伸层可以包括氮化镓铝,并且压缩层可以包括铝铟镓氮。
    • 74. 发明授权
    • Backside stress compensation for gallium nitride or other nitride-based semiconductor devices
    • 氮化镓或其他氮化物基半导体器件的背面应力补偿
    • US08785305B2
    • 2014-07-22
    • US12927931
    • 2010-11-30
    • Jamal Ramdani
    • Jamal Ramdani
    • H01L21/20H01L21/36
    • H01L21/02667H01L21/02381H01L21/02458H01L21/0254H01L21/02592H01L21/02595H01L21/02658H01L29/2003H01L29/7787
    • A method includes forming a stress compensation layer over a first side of a semiconductor substrate and forming a Group III-nitride layer over a second side of the substrate. Stress created on the substrate by the Group III-nitride layer is at least partially reduced by stress created on the substrate by the stress compensation layer. Forming the stress compensation layer could include forming a stress compensation layer from amorphous or microcrystalline material. Also, the method could include crystallizing the amorphous or microcrystalline material during subsequent formation of one or more layers over the second side of the substrate. Crystallizing the amorphous or microcrystalline material could occur during subsequent formation of the Group III-nitride layer and/or during an annealing process. The amorphous or microcrystalline material could create no or a smaller amount of stress on the substrate, and the crystallized material could create a larger amount of stress on the substrate.
    • 一种方法包括在半导体衬底的第一侧上形成应力补偿层,并在衬底的第二面上形成III族氮化物层。 通过III族氮化物层在衬底上产生的应力通过应力补偿层在衬底上产生的应力至少部分地减小。 形成应力补偿层可以包括从非晶或微晶材料形成应力补偿层。 此外,该方法可以包括在随后在衬底的第二侧上形成一层或多层之后使无定形或微晶材料结晶。 在随后形成III族氮化物层和/或退火过程期间,可能发生非晶或微晶材料的结晶。 无定形或微晶材料在基底上不会产生或少量的应力,并且结晶的材料可能在基底上产生更大量的应力。
    • 80. 发明申请
    • Magneto-electric sensor with injected up-conversion or down-conversion
    • 具有注入上变频或下变频的磁电传感器
    • US20110148403A1
    • 2011-06-23
    • US12927205
    • 2010-11-09
    • Lawrence H. ZuckermanMichael X. MaidaDennis M. MonticelliJames B. WieserJamal Ramdani
    • Lawrence H. ZuckermanMichael X. MaidaDennis M. MonticelliJames B. WieserJamal Ramdani
    • G01N27/72
    • A61B5/04007A61B5/7239A61B5/743
    • A method includes generating an electrical signal representing a magnetic field using a magnetic field sensor having alternating layers of magneto-strictive material and piezo-electric material. The method also includes performing up-conversion or down-conversion so that the electrical signal representing the magnetic field has a higher or lower frequency than a frequency of the magnetic field. The up-conversion or down-conversion is performed before the magnetic field is converted into the electrical signal. The up-conversion or down-conversion could be performed by repeatedly sensitizing and desensitizing the magnetic field sensor. This could be done using a permanent magnet and an electromagnet, an electromagnet without a permanent magnet, or a movable permanent magnet. The up-conversion or down-conversion could also be performed by chopping the magnetic field. The chopping could involve intermittently shielding the magnetic field sensor from the magnetic field or moving the magnetic field sensor with respect to the magnetic field.
    • 一种方法包括使用具有交替的磁致伸缩材料层和压电材料的磁场传感器来产生表示磁场的电信号。 该方法还包括执行上变频或下变频,使得表示磁场的电信号具有比磁场频率更高或更低的频率。 在磁场转换成电信号之前执行上转换或下变频。 上转换或下转换可以通过使磁场传感器反复敏感和脱敏来进行。 这可以使用永磁体和电磁体,没有永磁体的电磁体或可动永磁体来完成。 也可以通过切割磁场来执行上变频或下变频。 斩波可能会将磁场传感器与磁场间断地屏蔽或相对于磁场移动磁场传感器。