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71. 发明专利

JP2001050161A GAS TRANSFER MACHINE 失效
公开(公告)号：JP2001050161A
公开(公告)日：2001-02-23
申请号：JP22276199
申请日：1999-08-05
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： KOJIMA YOSHINORI , NAKAZAWA TOSHIHARU , SEKIGUCHI SHINICHI , NOMICHI SHINJI
IPC分类号： F04B39/00 , F04C18/00 , F04C29/00 , F04D17/16 , F04D25/06 , F04D29/00 , H02K3/44 , H02K5/128 , H02K7/14 , H02K19/10 , H02K21/14
摘要： PROBLEM TO BE SOLVED: To make a gas transfer machine highly stable for even corrosive transfer gas and adaptive to a high speed operation by a compact structure. SOLUTION: In a gas transfer machine for transferring gas by performing a rotation operation for a rotor 1, a motor for driving the rotor 1 is provided with a member 11A for isolating a stator 6 and the inside of a motor rotor chamber 14. A motor rotor 7 has a structure that the rotor 7 is directly connected with an extension of a pump drive shaft 2 and the motor rotor 7 has a reluctance shape having a salient pole part of a magnetic material.

72. 发明专利

JP2000018189A TURBO MOLECULAR PUMP 失效
公开(公告)号：JP2000018189A
公开(公告)日：2000-01-18
申请号：JP18419398
申请日：1998-06-30
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： MIYAMOTO MATSUTARO , SOFUGAWA TAKUJI , NAKAZAWA TOSHIHARU
IPC分类号： F04D27/00 , F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump having rotor temperature detection means capable of accurately detecting the rotor temperature of a turbo molecular pump in operation, without contacting therewith. SOLUTION: In a turbo molecular pump having temperature detection means for detecting a temperature of a rotor rotating at a high speed, at least two displacement sensors 22, 23 for detecting axial displacement of a rotor R are provided, so as to detect the temperature of the rotor R from the detected displacement of the rotor R.

73. 发明专利

JPH11230167A MAGNETIC BEARING DEVICE 失效
公开(公告)号：JPH11230167A
公开(公告)日：1999-08-27
申请号：JP4624598
申请日：1998-02-10
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： SEKIGUCHI SHINICHI , NAKAZAWA TOSHIHARU , KAWAMURA TAKESHI
IPC分类号： F16C32/04
摘要： PROBLEM TO BE SOLVED: To enlarge adhering width of a magnetic body dust with keeping five axis control without specifically enlarging a magnetic bearing. SOLUTION: This bearing device is so constituted that a circulating fan 2 is installed in an airtight container l into which process gas 3 mixed with magnetic dust is filled and a rotor of the circulating fan 2 is supported by a five axis control magnetic bearing. In this case, radial magnetic bearings 4, 5 of the five axis control magnetic bearing is constituted with a passive type magnetic bearing having a stator side permanent magnet and a rotor side permanent magnet and an active type magnetic bearing having a stator side electromagnet and a rotor side magnetic pole, the active type magnetic bearing is installed on the airtight container 1 side, and clearance between a stator side electromagnet and the rotor side magnetic pole of the active type magnetic bearing is larger than clearance between the stator side permanent magnet and the rotor side permanent magnet of the passive type magnetic bearing.

74. 发明专利

JPH11198026A POLISHING DEVICE 失效
公开(公告)号：JPH11198026A
公开(公告)日：1999-07-27
申请号：JP2032098
申请日：1998-01-16
申请人： EBARA CORP
发明人： KAWASAKI HIROYUKI , NAKAZAWA TOSHIHARU
IPC分类号： B24B37/005 , B24B37/07 , B24B37/30 , H01L21/304 , B24B37/00 , B24B37/04
摘要： PROBLEM TO BE SOLVED: To conduct polishing, with the distribution of pressing force to an object to be polished kept in an optimum condition, by controlling the pressing force of a top ring for holding the object to be polished. SOLUTION: A polishing device is provided with a turntable 2 with a polishing surface 1 and a top ring 3 for holding an object W to be polished, both of which are rotated, sliding between the polishing surface 1 and the surface to be polished of the object W to be polished, for polishing (the latter surface). In the polishing device, a load applying part to the top ring 3 is provided with a magnetic load applying device 11 incorporating a piezoelectric- crystal element for detecting the pressing force imposed on the object W to be polished, while the magnetic load applying device 11 consists of a magnetic disc 16 fixed to the top ring 3 and electromagnets 14a, 14b, which drive the magnetic disc 16 by means of the magnetic force in a non-contact manner. By controlling the magnetic force of the electromagnets 14a, 14b, based on the signal from the piezoelectric-crystal element, the pressing force of the top ring 3 to the object W to be polished can be controlled.

75. 发明专利

JPH07213093A DRIVING POWER-SUPPLY DEVICE OF TURBO-MOLECULAR PUMP 失效
公开(公告)号：JPH07213093A
公开(公告)日：1995-08-11
申请号：JP2190194
申请日：1994-01-21
申请人： EBARA CORP
发明人： SAITO MASANORI , NAKAZAWA TOSHIHARU
IPC分类号： F01D25/36 , H02M7/48 , H02P27/06 , H02P7/63
摘要： PURPOSE:To obtain a driving power-supply device in which useless electric power is not supplied to the side of an induction motor while the definite number of revolutions is being maintained in a rated rotation state irrespective of the load state of a turbo-molecular pump. CONSTITUTION:The driving power-supply device of a turbo-molecular pump 1 is provided with an inverter output circuit 3 which supplies AC electric power, with a timer circuit 22 which generates the sampling time, with a means 20 which detects the actual number of revolutions of the pump, with a comparison and operation circuit 21 which operates a change in the number of revolutions at every sampling time and with a voltage control circuit 12 which controls the output voltage of the inverter output circuit 3. Then, in the comparison and operation circuit 21, a change in the actual number of revolutions of the pump due to a fluctuation in the load of the pump is compared with the number of revolutions detected at every sampling time by the timer circuit 22, and the output voltage of the inverter output circuit 3 is controlled via the voltage control circuit 12 in such a way that only a minimum rotation torque which maintained the prescribed number of revolutions is supplied.

76. 发明专利

JPH05196040A MAGNETIC LEVITATION CONTROL DEVICE 失效
公开(公告)号：JPH05196040A
公开(公告)日：1993-08-06
申请号：JP746892
申请日：1992-01-20
申请人： EBARA CORP
发明人： NAKAZAWA TOSHIHARU
IPC分类号： B60L13/06 , F16C32/04
摘要： PURPOSE:To increase the stability of control by composing an electromagnet actuator which levitates a body, in a PWM method operating at a specific carrier frequency, and furthermore, providing a common oscillation circuit operating the carrier frequencies of the actuator and an object position sensor. CONSTITUTION:A tubular carrier board 10, which is a levitated object, is moved by magnetic levitation, into a tubular carrier tunnel 1 consisting of a nonmagentic substance, and while an electromagnet 4 for levitation is provided at the upper side of the carrier tunnel 1, a levitation displacement detecting sensor 8 is provided at the bottom. A carrier of a specific frequency produced by an oscillation circuit 24 is output from the sensor 8, and a sensor output signal whose wave height value is converted by the position of the carrier board 10 is output to a control circuit 21. A signal after applying a phase and gain compensation process in the control circuit 21 is input to the comparator of a PWM control circuit 22, it is compared with the frequency from the oscillation circuit 24, and the current carrying in an electromagnetic coil 5 through a PWM power 23 is controlled according to the comparison result.

77. 发明专利

JPH02223396A POWER DEVICE FOR DRIVING THREE-PHASE INDUCTION MOTOR 失效
公开(公告)号：JPH02223396A
公开(公告)日：1990-09-05
申请号：JP4218589
申请日：1989-02-21
申请人： EBARA CORP
发明人： CHINO HIROYUKI , NAKAZAWA TOSHIHARU
IPC分类号： H02P3/18
摘要： PURPOSE:To prevent a long time from being taken for a rotor before it is stopped by applying a brake to an inverter circuit by the use of a regenerative braking circuit and a DC brake from a free-run condition to a complete stop after braking action is stopped or decreased, when a three-phase induction motor is stopped. CONSTITUTION:In the case of a three-phase induction motor driving power unit using a pulse amplitude modulation(PAM) system, an output of a rectifier circuit 11 is controlled through a chopper circuit 12 to predetermined voltage supplied to an inverter circuit 13 on-off controlling switching elements Q1 to Q6 by a signal from a phase generator 17, and the voltage is converted into AC power of predetermined voltage and frequency supplied to a three-phase induction motor 22 driven. In deceleration operation, when the power unit is decreased in its output frequency, voltage between terminals a-b increases by generating action of the three-phase induction motor 22, so that power is consumed by a resistor R applying a generation brake. In low and intermediate speed operation, when generated power decreases, a DC current is allowed to flow between phases UV of the three-phase induction motor 22 applying an electromagnetic brake.

78. 发明专利

JP2002089560A MAGNETICALLY LEVITATED ROTATING MACHINE 失效
公开(公告)号：JP2002089560A
公开(公告)日：2002-03-27
申请号：JP2000278815
申请日：2000-09-13
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： OYAMA ATSUSHI , NAKAZAWA TOSHIHARU , MIYAMOTO MATSUTARO
IPC分类号： F16C32/04 , F16C39/06 , H02K7/09 , H02K11/00
摘要： PROBLEM TO BE SOLVED: To provide a magnetically levitated rotating machine capable of stably detecting the displacement and the rotational frequency of a rotor and allowing an entire device to be made smaller and compacter than it was before. SOLUTION: The magnetically levitated rotating machine supports the rotor in a levitated condition by use of the magnetic force of an electromagnet or a permanent magnet. The rotor R has a position-detecting plane 33 and a recess 35 and/or a projection 34 provided on the plane. Displacement sensors 31 and 32 for detecting the displacement of the plane including the recess or the projection are provided on the fixed side and a detecting mechanism is provided for detecting the displacement of the rotor from the outputs of the displacement sensors and for detecting the rotational frequency of the rotor.

79. 发明专利

JP2001111138A EXCIMER LASER APPARATUS 失效
公开(公告)号：JP2001111138A
公开(公告)日：2001-04-20
申请号：JP28320899
申请日：1999-10-04
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： SEKIGUCHI SHINICHI , OSAWA SUSUMU , MORI SATOSHI , SATO TADASHI , NAKAZAWA TOSHIHARU
IPC分类号： H01S3/225 , F16C39/06 , H01S3/036 , H02K7/09
摘要： PROBLEM TO BE SOLVED: To provide an excimer laser apparatus in which the high-speed rotation of a circulating fan can be performed easily and in which the installation space of a bearing part and that of a motor part can be reduced. SOLUTION: This excimer laser apparatus is provided with a laser container 1, in which a laser gas including a halogen-based gas is sealed. The excimer laser apparatus is provided with a pair of main discharge electrodes 2, 2 which are positioned inside the laser container 1 and which are used to obtain discharge capable of oscillating a laser beam. The excimer laser apparatus is provided with a circulating fan 3, which comprises a shaft 4 and which creates the high-speed flow of the laser gas between the pair of main discharge electrodes 2, 2. The shaft 4 is constituted, in such a way that both ends of it are supported rotationally by rotor-stator mechanisms 11, 12. The rotor-stator mechanisms 11, 12 are constituted with rotors 11d, 12d constituted of a magnetic material attached to the shaft 4 of the circulating fan 3, with stators 11b, 12b installed in positions facing the rotors 11d, 12d, and a motor winding 14 which gives a turning force to the rotors 11d, 12d and a position control winding 15 which develops a magnetic force used to levitate and support the rotors 11d, 12d attached to the stators 11b, 12b.

80. 发明专利

JPH11173293A TURBO-MOLECULAR PUMP DEVICE 失效
公开(公告)号：JPH11173293A
公开(公告)日：1999-06-29
申请号：JP36182097
申请日：1997-12-10
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： TAIRA AKIKO , CHINO HIROYUKI , NAKAZAWA TOSHIHARU , MIYAMOTO MATSUTARO
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To eliminate a cable for connecting a pump main body and a controller, to prevent the misconnection of the cable and to dispense with the adjustment of the controller for the length of a cable by integrating the pump main body and the controller. SOLUTION: A pump main body 1 is fitted on an upper part of a controller 3. The electric systems of the pump main body 1 and the controller 3 are connected by a pump/controller connector 5. The pump main body 1 and the controller 3 are fixed by the fixing legs 6 projected from the controller 3. Further a connector 4 for supplying the power source is mounted on the controller 3. Further an external interface connector 8 is mounted on the controller 3 to provide the controller 3 with the external input and output interface function. By integrating the pump main body 1 and the controller 3 as mentioned in the above, a cable for connecting the pump main body 1 and the controller 3 can be omitted.

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