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71. 发明申请

US20070190779A1 Diffusion Barrier Layers and Methods Comprising for Depositing Metal Films by CVD or ALD Processes 失效
标题翻译：扩散阻挡层和包括通过CVD或ALD工艺沉积金属膜的方法
公开(公告)号：US20070190779A1
公开(公告)日：2007-08-16
申请号：US11738187
申请日：2007-04-20
申请人： Diwakar Garg , Hansong Cheng , John Norman , Eduardo Machado , Pablo Ordejon
发明人： Diwakar Garg , Hansong Cheng , John Norman , Eduardo Machado , Pablo Ordejon
IPC分类号： C23C16/00
CPC分类号： H01L21/76843 , C23C14/58 , C23C14/5846 , H01L21/28556 , H01L21/3205 , H01L21/32051 , H01L21/76856 , H01L21/76876
摘要： A process is described for depositing a metal film on a substrate surface having a diffusion barrier layer deposited thereupon. In one embodiment of the present invention, the process includes: providing a surface of the diffusion barrier layer that is substantially free of an elemental metal and forming the metal film on at least a portion of the surface via deposition by using a organometallic precursor. In certain embodiments, the diffusion barrier layer may be exposed to an adhesion promoting agent prior to or during at least a portion of the forming step. Suitable adhesion promoting agents include nitrogen, nitrogen-containing compounds, carbon-containing compounds, carbon and nitrogen containing compounds, silicon-containing compounds, silicon and carbon containing compounds, silicon, carbon, and nitrogen containing compounds, or mixtures thereof. The process of the present invention provides substrates having enhanced adhesion between the diffusion barrier layer and the metal film.
摘要翻译：描述了在其上沉积有扩散阻挡层的衬底表面上沉积金属膜的方法。在本发明的一个实施方案中，该方法包括：提供基本上不含元素金属的扩散阻挡层的表面，并通过使用有机金属前体沉积在至少部分表面上形成金属膜。在某些实施方案中，扩散阻挡层可以在形成步骤的至少一部分之前或期间暴露于粘合促进剂。合适的粘合促进剂包括氮，含氮化合物，含碳化合物，含碳和氮的化合物，含硅化合物，含硅和碳的化合物，硅，碳和氮的化合物或其混合物。本发明的方法提供了在扩散阻挡层和金属膜之间具有增强的粘附性的基底。

72. 发明申请

US20060008413A1 Catalyst and process for improving the adiabatic steam-reforming of natural gas 有权
标题翻译：用于改善天然气绝热蒸汽重整的催化剂和方法
公开(公告)号：US20060008413A1
公开(公告)日：2006-01-12
申请号：US10888658
申请日：2004-07-08
申请人： Diwakar Garg , Shankar Nataraj , Kevin Fogash , James O'Leary , William Licht , Sanjay Mehta , Eugene Genkin
发明人： Diwakar Garg , Shankar Nataraj , Kevin Fogash , James O'Leary , William Licht , Sanjay Mehta , Eugene Genkin
IPC分类号： C01B3/26
CPC分类号： C10G11/02 , B01J23/78 , B01J35/10 , B01J35/1009 , B01J35/1066 , B01J35/108 , C01B3/40 , C01B2203/0233 , C01B2203/1058 , C01B2203/1094 , Y02P20/52
摘要： A process for adiabatically prereforming a feedstock, includes: providing an adiabatic reactor; providing a catalyst containing 1-20 wt. % nickel and 0.4-5 wt. % potassium, wherein the catalyst has an overall catalyst porosity of 25-50% with 20-80% of the overall catalyst porosity contributed by pores having pore diameters of at least 500 Å; providing the feedstock containing natural gas and steam, wherein the natural gas contains an initial concentration of higher hydrocarbons, and a ratio of steam to natural gas in the feedstock is from 1.5:1 to 5:1; preheating the feedstock to a temperature of 300-700° C. to provide a heated feedstock; providing the heated feedstock to the reactor; and producing a product containing hydrogen, carbon monoxide, carbon dioxide, unreacted methane, and steam, wherein said product contains a reduced concentration of higher hydrocarbons less than the initial concentration of higher hydrocarbons, to prereform the feedstock.
摘要翻译：一种用于绝热预成型原料的方法包括：提供绝热反应器; 提供含有1-20重量％镍和0.4-5重量％％的钾，其中催化剂的总催化剂孔隙率为25-50％，其中总孔催化剂孔隙率由孔径至少为500埃的孔占20-80％。提供含有天然气和蒸汽的原料，其中天然气含有高级烃的初始浓度，原料中蒸汽与天然气的比例为1.5:1至5:1; 将原料预热至300-700℃的温度以提供加热的原料; 将加热的原料提供给反应器; 并且生产含有氢，一氧化碳，二氧化碳，未反应的甲烷和蒸汽的产物，其中所述产物含有低于高级烃的初始浓度的较低浓度的高级烃，以预先反应原料。

73. 发明授权

US5531372A Moisture-free atmosphere brazing of ferrous metals 失效
标题翻译：黑色金属无水环境钎焊
公开(公告)号：US5531372A
公开(公告)日：1996-07-02
申请号：US298004
申请日：1994-08-30
申请人： Brian B. Bonner , Diwakar Garg , Kerry R. Berger
发明人： Brian B. Bonner , Diwakar Garg , Kerry R. Berger
IPC分类号： B23K1/00 , B23K1/008 , B23K1/19 , B23K31/02 , B23K35/38
CPC分类号： B23K35/383 , B23K1/008 , B23K1/00
摘要： The present invention discloses a novel, moisture-free atmosphere for brazing carbon steels that provides good braze flow and brazed joint quality with minimum or no formation of soot on brazed joints. According to the present invention, carbon steels are brazed in continuous furnaces using a moisture-free atmosphere containing a mixture of three gases including nitrogen, hydrogen, and carbon dioxide. The key features of the invention involve (1) formation of moisture, which is needed to facilitate braze flow and to minimize formation of soot on brazed joints, in-situ in the heating zone of the furnace by the reaction between hydrogen and carbon dioxide and (2) reduction in the overall amount of a reducing gas required for brazing carbon steels by keeping moisture out of the cooling zone. The use of a moisture-free three gas atmosphere has been unexpectedly found to (1) eliminate the need of an expensive and difficult to control external humidification system, (2) provide flexibility in adjusting moisture content of the atmosphere in the heating zone of the furnace simply by adjusting the flow rate of hydrogen or carbon dioxide or both, and (3) facilitate rapid conditioning of the furnace by keeping moisture out of the cooling zone. The moisture-free atmosphere has also been unexpectedly found to provide good braze flow, fillet formation, and brazed joint quality while minimizing or eliminating formation of soot on brazed joints.
摘要翻译：本发明公开了一种用于钎焊碳钢的新型无水气氛，其在钎焊接头上具有最少或不形成烟灰的情况下提供良好的钎焊流动和钎焊接头质量。根据本发明，使用含有三种气体（包括氮气，氢气和二氧化碳）的混合物的无湿气氛将碳钢钎焊在连续炉中。本发明的主要特征包括（1）通过氢气和二氧化碳之间的反应在炉的加热区中原位形成水分，其是促进钎焊流动并且最小化钎焊接头上的烟灰形成所需要的;以及（2）通过将水分从冷却区域中除去而使碳钢钎焊所需的还原气体总量减少。已经意外地发现使用无湿气的三种气体气氛（1）消除了昂贵且难以控制的外部加湿系统的需要，（2）提供调节加热区中的气氛中的含水量的灵活性炉子简单地通过调节氢气或二氧化碳或两者的流量，和（3）通过将水分从冷却区域中除去来促进炉子的快速调节。也意外地发现无湿度的气氛提供良好的钎焊流动，圆角形成和钎焊接头质量，同时最小化或消除钎焊接头上的烟灰形成。

74. 发明授权

US5480682A Non-cryogenically generated nitrogen atmosphere for radiation curing 失效
标题翻译：非低温生成氮气氛用于辐射固化
公开(公告)号：US5480682A
公开(公告)日：1996-01-02
申请号：US296338
申请日：1994-08-25
申请人： John J. Kaiser , Diwakar Garg
发明人： John J. Kaiser , Diwakar Garg
IPC分类号： B01D53/86 , C01B21/04 , B05D3/06 , B01D59/10
CPC分类号： B01D53/8671 , C01B21/0494 , B01D2257/104 , C01B2210/0006 , C01B2210/001 , C01B2210/0014 , C01B2210/0045
摘要： The present invention discloses an improved method of producing a low-cost, nitrogen-based inert atmosphere suitable for radiation curing of resins, coatings, etc. from non-cryogenically generated nitrogen. According to the disclosed method, residual oxygen present in non-cryogenically generated nitrogen is converted to either moisture or a mixture of moisture and carbon dioxide by reaction with a reducing gas in a catalytic reactor prior to using the nitrogen-based atmosphere for radiation curing of moisture insensitive materials such as resins and coatings.
摘要翻译：本发明公开了一种生产低成本氮基惰性气氛的改进方法，适用于从非低温法生成的氮气对树脂，涂料等进行辐射固化。根据所公开的方法，在使用氮基气氛进行辐射固化之前，通过与催化反应器中的还原气体反应将存在于非低温法生成的氮中的残余氧转化为水分或水分和二氧化碳的混合物水分不敏感的材料，如树脂和涂料。

75. 发明授权

US5320818A Deoxygenation of non-cryogenically produced nitrogen with a hydrocarbon 失效
标题翻译：非低温法生产的氮与烃的脱氧作用
公开(公告)号：US5320818A
公开(公告)日：1994-06-14
申请号：US995601
申请日：1992-12-22
申请人： Diwakar Garg , Brian B. Bonner , Donald P. Eichelberger
发明人： Diwakar Garg , Brian B. Bonner , Donald P. Eichelberger
IPC分类号： C01B21/04 , C01B21/00
CPC分类号： C01B21/0422 , C01B2210/0045
摘要： An improved process for deoxygenating non-cryogenically produced nitrogen with a hydrocarbon is disclosed. According to the process, non-cryogenically produced nitrogen stream containing residual oxygen impurity is 1) pre-heated, 2) mixed with a hydrocarbon, and 3) passed through a reactor packed with a platinum group of metal catalyst to reduce oxygen to very low levels by converting it to a mixture of carbon dioxide and moisture. The reactor effluent stream is optionally treated downstream to produce a nitrogen stream substantially free of moisture and carbon dioxide. The key features of the disclosed process include 1) pre-heating non-cryogenically produced nitrogen containing residual oxygen to a certain minimum temperature, 2) adding more than stoichiometric amount of a hydrocarbon to the pre-heated nitrogen stream, and 3) using a platinum group of metal catalyst to initiate and sustain the reaction between oxygen and hydrocarbon.
摘要翻译：公开了一种用烃脱氧非低温法生产的氮气的改进方法。根据该方法，含有残余氧杂质的非低温法生产的氮气流是1）预热，2）与烃混合，3）通过填充有铂族金属催化剂的反应器以将氧气降至极低将其转化为二氧化碳和水分的混合物。反应器流出物流任选地在下游处理以产生基本上不含水分和二氧化碳的氮气流。所公开的方法的主要特征包括：1）将非低温法生产的含氮残留氧预加热到一定的最低温度; 2）向预热的氮气流中加入多于化学计量的烃; 3）铂族金属催化剂起始和维持氧和烃之间的反应。

76. 发明授权

US5259893A In-situ generation of heat treating atmospheres using a mixture of non-cryogenically produced nitrogen and a hydrocarbon gas 失效
标题翻译：使用非低温法生产的氮气和烃气体的混合物原位产生热处理气氛
公开(公告)号：US5259893A
公开(公告)日：1993-11-09
申请号：US787982
申请日：1991-11-05
申请人： Brian B. Bonner , Diwakar Garg , Donald P. Eichelberger
发明人： Brian B. Bonner , Diwakar Garg , Donald P. Eichelberger
IPC分类号： C21D1/26 , B22F3/00 , B22F3/10 , B23K35/38 , C21D1/76 , C22F1/02 , C22F1/14 , C23C8/18 , C21D1/00
CPC分类号： B22F3/00 , B22F3/1007 , B23K35/38 , C21D1/76 , C22F1/02 , C22F1/14 , C23C8/18 , C21D1/26
摘要： A process for generating in-situ low-cost atmospheres suitable for annealing and heat treating ferrous and non-ferrous metals and alloys, brazing metals, sealing glass to metals, and sintering metal and ceramic powders in a continuous furnace from non-cryogenically produced nitrogen containing up to 5% residual oxygen is presented. The disclosed process involves mixing nitrogen gas containing residual oxygen with a predetermined amount of a hydrocarbon gas, feeding the gaseous mixture through a nonconventional device into the hot zone of a continuous heat treating furnace, converting residual oxygen to an acceptable form such as a mixture of moisture and carbon dioxide, a mixture of moisture, hydrogen, carbon monoxide, and carbon dioxide, or a mixture of carbon monoxide, moisture, and hydrogen, and using the resultant gaseous mixture for annealing and heat treating metals and alloys, brazing metals, sintering metal and ceramic powders, and sealing glass to metals.
摘要翻译：一种生产适用于退火和热处理黑色金属和有色金属和合金，钎焊金属，密封玻璃与金属以及在连续炉中烧结金属和陶瓷粉末的非低温生成氮气的方法含有高达5％的残余氧气。所公开的方法包括将含有残留氧的氮气与预定量的烃气混合，将气态混合物通过非常规装置进入连续热处理炉的热区，将残余氧转化为可接受的形式，例如水分和二氧化碳，水分，氢气，一氧化碳和二氧化碳的混合物，或一氧化碳，水分和氢气的混合物，并使用得到的气体混合物进行退火和热处理金属和合金，钎焊金属，烧结金属和陶瓷粉末，以及将金属密封玻璃。

77. 发明授权

US5186973A HFCVD method for producing thick, adherent and coherent polycrystalline diamonds films 失效
标题翻译：用于生产厚的，粘附的和一致的多晶金刚石膜的HFCVD方法
公开(公告)号：US5186973A
公开(公告)日：1993-02-16
申请号：US582439
申请日：1990-09-13
申请人： Diwakar Garg , Wilman Tsai , Fred M. Kimock , Robert L. Iampietro , Paul N. Dyer
发明人： Diwakar Garg , Wilman Tsai , Fred M. Kimock , Robert L. Iampietro , Paul N. Dyer
IPC分类号： C23C16/27
CPC分类号： C23C16/279 , C23C16/271 , Y10T428/30
摘要： A method for depositing a thick, adherent and coherent polycrystalline diamond (PCD) film onto a metallic substrate using a deposition rate of no greater than 0.4 .mu.m per hour. The resulting PCD Film has a smooth surface finish, enhanced crystal orientation in comparision to industrial grade diamond powder particularly in the (220) and (400) directions, and excellent electrical and thermal properties. The method enables one to deposit PCD films having a thickness of at least 12 microns for applications on flat as well as curved substrates having wide use in the electronics industry. Thick PCD films of this invention have been found to be ideal for dissipating heat from radio frequency (RF) and microwave (MW) devices.
摘要翻译：使用不大于0.4微米/小时的沉积速率将厚的粘附和粘附多晶金刚石（PCD）膜沉积到金属基底上的方法。所得到的PCD膜具有光滑的表面光洁度，与工业级金刚石粉末相比具有更好的晶体取向，特别是（220）和（400）方向，以及优异的电气和热性能。该方法使得能够沉积具有至少12微米厚度的PCD膜用于在电子工业中广泛使用的平面以及弯曲基板上的应用。已经发现本发明的厚PCD膜对于从射频（RF）和微波（MW）装置散热是理想的。

78. 发明授权

US5052339A Radio frequency plasma enhanced chemical vapor deposition process and reactor 失效
标题翻译：射频等离子体增强化学气相沉积工艺和反应器
公开(公告)号：US5052339A
公开(公告)日：1991-10-01
申请号：US598500
申请日：1990-10-16
申请人： George Vakerlis , Ward D. Halverson , Diwakar Garg , Paul N. Dyer
发明人： George Vakerlis , Ward D. Halverson , Diwakar Garg , Paul N. Dyer
IPC分类号： C23C16/44 , C23C16/455 , C23C16/509 , H01J37/32
CPC分类号： C23C16/4558 , C23C16/5093 , H01J37/32082 , H01J37/32091 , H01J37/32568 , H01J2237/2001 , H01J2237/332 , H01J2237/3321
摘要： An improved capacitively coupled radio frequency-plasma enhanced chemical vapor deposition (PECVD) apparatus and process are disclosed for depositing a uniform coating of material on substrates. The apparatus includes a secondary electrode defining a reaction zone within an outer chamber and an RF electrode in concert with the secondary electrode for generating a plasma within the reaction zone. The electrode comprising a base and a finger extending through the reaction zone for distributing a plasma field uniformly throughout the reaction zone. The process comprises heating a substrate to a deposition temperature in the range of about 300.degree. to 650.degree. C. Reactant gases are introduced into the PECVD reactor and a coating of about 0.2 to about 20 .mu.m is deposited onto the heated substrate. This low temperature process is particularly adapted to coating three-dimensional objects of metals, metal alloys and mixtures of metals.
摘要翻译：公开了一种改进的电容耦合射频等离子体增强化学气相沉积（PECVD）装置和方法，用于在衬底上沉积均匀的材料涂层。该装置包括限定外部室内的反应区的次级电极和与该次级电极协调的RF电极，用于在反应区内产生等离子体。所述电极包括延伸穿过所述反应区的基部和手指，用于均匀地分布整个反应区中的等离子体场。该方法包括将基底加热到约300至650℃范围内的沉积温度。将反应物气体引入PECVD反应器中，并将约0.2至约20μm的涂层沉积在加热的基底上。该低温工艺特别适用于涂覆金属，金属合金和金属混合物的三维物体。

79. 发明授权

US4927713A High erosion/wear resistant multi-layered coating system 失效
标题翻译：高侵蚀/耐磨多层涂层系统
公开(公告)号：US4927713A
公开(公告)日：1990-05-22
申请号：US389206
申请日：1989-08-02
申请人： Diwakar Garg , Ernest L. Wrecsics , Leslie E. Schaffer , Carl F. Mueller , Paul N. Dyer , Keith R. Fabregas
发明人： Diwakar Garg , Ernest L. Wrecsics , Leslie E. Schaffer , Carl F. Mueller , Paul N. Dyer , Keith R. Fabregas
IPC分类号： C23C16/00 , C23C16/14 , C23C16/30 , C23C16/32 , C23C28/00
CPC分类号： C23C28/00 , C23C16/14 , C23C16/30 , Y10T428/12576 , Y10T428/12583 , Y10T428/12632 , Y10T428/1284
摘要： An improved highly erosive and abrasive wear resistant multi-layered coating system on a substrate which provides protection against impact of large particles is disclosed comprising a plurality of composite layers. In each of the composite layers, the first layer closest to the substrate comprises tungsten of sufficient thickness to confer substantial erosion and abrasion wear resistance characteristics to the coating system and a second layer deposited on the first layer comprises a mixture of tungsten and tungsten carbide and the tungsten carbide comprises W.sub.2 C, W.sub.3 C, or a mixture of both. Because the resulting coating system has enhanced high cycle fatigue strength over the substrate, the coating system is especially useful on such structures as turbine blades and similar articles of manufacture where such high stress cycles occur during normal operation. Also dislcosed is the method for preparing such improved composite coating systems.
摘要翻译：公开了一种改进的高侵蚀性和磨蚀性耐磨多层涂层系统，其在基板上提供防止大颗粒冲击的保护，其包括多个复合层。在每个复合层中，最靠近基底的第一层包括足够厚度的钨，以赋予涂层体系显着的侵蚀和磨损耐磨特性，而沉积在第一层上的第二层包括钨和碳化钨的混合物，以及碳化钨包括W2C，W3C或两者的混合物。由于所得到的涂层体系在衬底上具有增强的高循环疲劳强度，所以涂覆系统在诸如涡轮机叶片和类似的制品之类的结构中是特别有用的，其中在正常操作期间发生如此高的应力循环。制备这种改进的复合涂层体系的方法也是一个缺点。

80. 发明授权

US4873152A Heat treated chemically vapor deposited products 失效
标题翻译：热处理化学气相沉积产品
公开(公告)号：US4873152A
公开(公告)日：1989-10-10
申请号：US157550
申请日：1988-02-17
申请人： Diwakar Garg , Paul N. Dyer , Duane Dimos
发明人： Diwakar Garg , Paul N. Dyer , Duane Dimos
IPC分类号： C23C16/14 , C23C16/01 , C23C16/30 , C23C16/56
CPC分类号： C23C16/56 , C23C16/30 , Y10T428/12576 , Y10T428/12583 , Y10T428/1284 , Y10T428/12944
摘要： "A coated substrate product is described wherein the outer coating on the substrate is comprised of a chemically vapor deposited and heat treated mixture of tungsten and tungsten carbide. The tungsten carbide phase consists of W.sub.2 C or W.sub.3 C or a mixture of W.sub.2 C and W.sub.3 C. During the heat treating, the coated substrate is heated to the deposition temperature or not substantially above the deposition temperature in a non-reactive atmosphere. The heat treating temperature is sufficient to confer a desired improvement in erosive and abrasive wear resistance in the outer coating but does not result in substantial degradation of the mechanical properties of the substrate or in formation of undesirable inter-metallic layers".

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