会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 72. 发明专利
    • Microwave excitation gas laser equipment and exposure device
    • 微波激发气体激光设备和曝光装置
    • JP2004228183A
    • 2004-08-12
    • JP2003011878
    • 2003-01-21
    • Tadahiro Omi忠弘 大見
    • OMI TADAHIROTAKEHISA KIWAMUTAKAHASHI ICHIRO
    • H01L21/027H01S3/03H01S3/0973
    • PROBLEM TO BE SOLVED: To provide microwave excitation ultraviolet laser equipment that enables continuous operation by providing a device for generating micro wave discharge in a fine and small volume in a laser gas. SOLUTION: The microwave excitation gas laser equipment is provided with a wave guide for propagating a micro wave; a gas circulation route for circulating the laser gas; and a chamber constituting part of the gas circulation route, introducing the micro wave from the wave guide and generating laser light. The micro wave excitation gas laser equipment is installed so as to extend a member consisting of a material transmitting the micro wave from the inside of a chamber side edge of the wave guide to the inside of the chamber. On the member, a taper part is provided on a first part extending to the inside of the edge of the wave guide to receive the microwave propagating the wave guide, and the microwave is discharged from a second part extending to the inside of the chamber to the inside of the chamber to excite the laser gas in the inside of the chamber. COPYRIGHT: (C)2004,JPO&NCIPI
    • 要解决的问题:提供通过提供在激光气体中以微细和小体积产生微波放电的装置来实现连续操作的微波激发紫外激光设备。

      解决方案:微波激发气体激光设备设有用于传播微波的波导; 用于循环激光气体的气体循环路线; 以及构成气体循环路线的一部分的室,引入来自波导的微波并产生激光。 微波激发气体激光设备被安装成将由波导管的腔室侧边缘的内部传递微波的材料延伸到腔室的内部。 在构件上,在延伸到波导边缘的内部的第一部分上设置锥形部分,以接收传播波导的微波,并且微波从延伸到腔室内部的第二部分排出到 腔室的内部激发室内的激光气体。 版权所有(C)2004,JPO&NCIPI

    • 75. 发明专利
    • Plasma processing apparatus
    • 等离子体加工设备
    • JP2003051493A
    • 2003-02-21
    • JP2001237880
    • 2001-08-06
    • Tadahiro OmiSharp Corpシャープ株式会社忠弘 大見
    • TADERA TAKAMITSUYAMAMOTO TATSUSHIHIRAYAMA MASAKIOMI TADAHIRO
    • H05H1/46C23C16/511H01J37/32H01L21/205H01L21/302H01L21/3065
    • H01J37/32211H01J37/32192H01J37/32266
    • PROBLEM TO BE SOLVED: To provide a plasma processing apparatus which can maintain the uniformity of plasma processing, even when the material of an object film to be processed on a large-area substrate or wafer is different or process conditions of processing of a laminated film formed of a plurality of materials change greatly.
      SOLUTION: The plasma processing apparatus is equipped with a slot plate 4, which has a slot formation part for passing a microwave from a waveguide 3 to a microwave guide-in window 11 and a slot plate drive means which drives the slot plate 4 so that it can change its position about the microwave guide-in window 11; and then the slot plate 4 moves toward and away from the microwave guide-in window 11, and at least one of the position, the number, and the area of parts passing the microwaves at the slot formation part can be changed.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了提供能够保持等离子体处理的均匀性的等离子体处理装置,即使当在大面积基板或晶片上被处理的被处理物的材料不同或处理层叠膜的处理条件 由多种材料形成的变化很大。 解决方案:等离子体处理装置配备有槽板4,槽板4具有用于使微波从波导3传递到微波导入窗口11的槽形成部分和驱动狭槽板4的槽板驱动装置, 它可以改变其关于微波导入窗口11的位置; 然后槽板4朝向和远离微波引入窗口11移动,并且可以改变通过槽形成部分处的微波的部件的位置,数量和面积中的至少一个。
    • 79. 发明专利
    • Weather-resistant lens or prism
    • 耐候镜片或镜片
    • JP2005292340A
    • 2005-10-20
    • JP2004105336
    • 2004-03-31
    • Nippon Zeon Co LtdTadahiro Omi忠弘 大見日本ゼオン株式会社
    • OMI TADAHIROTANAHASHI NAOKIFUJII TOSHIHIRO
    • G02B1/11C08J7/00G02B1/04
    • PROBLEM TO BE SOLVED: To provide a weather-resistant lens or prism having improved optical characteristics such as low reflectance and high transmittance for light as well as showing water repellency and a stain-proof effect.
      SOLUTION: A lens or prism base material comprising an alicyclic structure-containing polymeric resin is heated in an inert gas atmosphere and left to stand in an atmosphere containing fluorine gas so as to bring the fluorine gas into contact with the surface of the lens or prism base material. Then the lens or prism base material is re-heated in an inert gas atmosphere to obtain the weather-resistant lens or prism having a phase of the alicyclic structure-containing polymeric resin having a higher fluorine atom content than in the inner layer region of the lens or prism onto the surface layer region of the lens or prism comprising the alicyclic structure-containing polymeric resin.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供具有改善的光学特性如抗反射率低和光透射率高的耐候性透镜或棱镜,以及具有防水性和防污效果。 解决方案:将含有脂环结构的聚合物树脂的透镜或棱镜基材在惰性气体气氛中加热,在含氟气体的气氛中放置,使氟气与 透镜或棱镜基材。 然后将透镜或棱镜基材在惰性气体气氛中再加热,得到耐候性透镜或棱镜,该透镜或棱镜的含氟聚合物树脂的相位比氟原子含量高于在 透镜或棱镜到包含含脂环结构的聚合物树脂的透镜或棱镜的表面层区域上。 版权所有(C)2006,JPO&NCIPI
    • 80. 发明专利
    • Mold or stamper made of resin
    • 树脂模具或压印机
    • JP2005288803A
    • 2005-10-20
    • JP2004105255
    • 2004-03-31
    • Nippon Zeon Co LtdTadahiro Omi忠弘 大見日本ゼオン株式会社
    • OMI TADAHIROTANAHASHI NAOKITAKAHASHI HARUHIKO
    • B29C33/38B29C45/26G11B7/26
    • B29C33/38B29C45/2632
    • PROBLEM TO BE SOLVED: To provide a mold or stamper which has a high light transmittance, exhibits furthermore high mold releasing properties or water repellency, and has no problem on releasing of a laminated film or the like.
      SOLUTION: The mold or stamper with a phase of an alicyclic structure-containing polymer resin containing higher fluorine atom content than that of the inner layer part of the mold or stamper on the surface layer part of the mold or stamper consisting of the alicyclic structure-containing polymer resin, is obtained by heating a base material of the mold or stamper consisting of the alicyclic structure-containing polymer resin in an inert gas atmosphere or under vacuum, bringing the surface of the base material of the mold or stamper into contact with fluorine gas by leaving the base material of the mold or stamper in a fluorine gas-containing atmosphere, and then, re-heating the base material of the mold or stamper in the inert gas atmosphere or under vacuum.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提供具有高透光率的模具或压模,表现出更高的脱模性或防水性,并且层压膜等的释放没有问题。 解决方案:含有比含有模具或压模的内层部分的氟原子含量高的含脂环结构的聚合物树脂的相的模具或压模在由模具或压模组成的模具或压模的表面层部分上 含脂环结构的聚合物树脂通过在惰性气体气氛或真空中加热由含脂环式结构的聚合物树脂组成的模具或压模的基材,使模具或压模的基材的表面进入 通过将模具或压模的基材留在含氟气体的气氛中与氟气接触,然后在惰性气体气氛中或在真空下再加热模具或压模的基材。 版权所有(C)2006,JPO&NCIPI