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71. 发明申请

US20050005994A1 Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller 有权
标题翻译：在配备有流量控制器的气体供给设备的同时向室供给气体的方法
公开(公告)号：US20050005994A1
公开(公告)日：2005-01-13
申请号：US10495641
申请日：2003-01-20
申请人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama
发明人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama
IPC分类号： H01L21/205 , G05D7/06 , B67C3/00
CPC分类号： G05D7/0664 , Y10T137/7759 , Y10T137/7761
摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).
摘要翻译：一种用于在从配备有流量控制器的气体供给设备进入腔室的情况下，以期望的流量比Q1 / Q2精确而快速地分配处理气体的规定量Q的方法。当通过多个分支供应管线和固定到所述流体控制器的淋浴板以期望的流量比Q1 / Q2从装备有流量控制器的气体供应设备分配到减压室C中时，供应指定量的气体在多个分支供给线GL1和GL2中设置有压力分离量控制器FV1和FV2。通过来自分割量控制板FRC的初始流量设定信号来开始分控数量控制器FV1和FV2的打开控制，以完全打开具有较高流量和压力P3'的压力型分配量控制器的控制阀CV，并且在控制阀CV的下游侧的P3“被调节，从而通过在淋浴板（3,4）上形成的喷孔（3a，4a）分隔成室C，从而提供气体的总量Q = Q1 + Q2，由公式Q1 = C1P3'和Q2 = C2P3“表示的期望分割量Q1和Q2（其中C1和C2是取决于孔口的横截面面积或其上游侧的气体温度的常数）。

72. 发明授权

US06820632B2 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
标题翻译：平行分流式流体供给装置和流体切换式压力式流量控制方法以及用于同一流体供给装置的流体切换型压力式流量控制系统
公开(公告)号：US06820632B2
公开(公告)日：2004-11-23
申请号：US10162552
申请日：2002-06-06
申请人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
发明人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
IPC分类号： G05D706
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要翻译：一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处达到特定延迟时间At的设定流量Qs。本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

73. 发明授权

US06422264B1 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
公开(公告)号：US06422264B1
公开(公告)日：2002-07-23
申请号：US09734640
申请日：2000-12-13
申请人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
发明人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
IPC分类号： G05D706
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

74. 发明授权

US09169558B2 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US09169558B2
公开(公告)日：2015-10-27
申请号：US13203866
申请日：2009-11-06
申请人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyomogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyomogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： C23C16/455 , H01L21/67
CPC分类号： C23C16/45561 , H01L21/67017 , Y10T137/0396
摘要： To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.
摘要翻译：提供能够减少空间的流体控制装置，同时降低成本。流体控制装置具有流体控制单元和流体引入单元。流体引入单元被分为三部分：设置在入口侧的第一和第二入口侧截止/打开部分，每个由2×N / 2构成，设置在第一和第二入口侧截止/打开之间零件和流体控制单元。

75. 发明授权

US08662471B2 Solenoid valve 有权
标题翻译：电磁阀
公开(公告)号：US08662471B2
公开(公告)日：2014-03-04
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ome，1KHz的等效串联电阻为0.03 为0.09Omega，并且包括比表面积为1〜500m 2 / g的玻璃碳制的可极化电极。

76. 发明申请

US20120223265A1 CAM CONTROL VALVE 有权
标题翻译： CAM控制阀
公开(公告)号：US20120223265A1
公开(公告)日：2012-09-06
申请号：US13389671
申请日：2010-11-05
申请人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K31/524 , F16K31/04 , F16K7/16
CPC分类号： F16K7/16 , F16K31/047 , F16K31/52408
摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.
摘要翻译：凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分的支撑框架并拧入电机支架。

77. 发明申请

US20110121217A1 SOLENOID VALVE 有权
标题翻译：电磁阀
公开(公告)号：US20110121217A1
公开(公告)日：2011-05-26
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ω，OHgr为1KHz的等效串联电阻 0.03〜0.09＆OHgr，并且包括由比表面积为1〜500m 2 / g的玻璃碳制成的极化电极。

78. 发明授权

US07669455B2 Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device 有权
标题翻译：用于压力传感器，压力控制装置和压力式流量控制装置的自动零点校正装置
公开(公告)号：US07669455B2
公开(公告)日：2010-03-02
申请号：US10561602
申请日：2004-06-10
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Shoichi Hino , Eiji Takahashi , Makoto Saegusa , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama , Katsuyuki Sugita
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Shoichi Hino , Eiji Takahashi , Makoto Saegusa , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama , Katsuyuki Sugita
IPC分类号： G01F19/00
CPC分类号： G01L19/02 , G01L9/065 , G01L19/0023 , G05D7/0635
摘要： The invention provides an automatic zero point correction device that includes a pressure sensor, wherein output from the sensor is outputted and the sensor output is inputted to a time-varying zero point drift correction means of the sensor; a sensor output judgement means of the time-varying zero point drift correction means, wherein the sensor output judgement means operates to make a judgement determining whether the sensor output is larger than a set value; and operating condition judgement means of the time-varying zero point drift correction means, wherein the operating condition judgement means judges operating conditions of the sensor, wherein the time-varying zero point drift correction means operates to cancel time-varying zero point drift of the sensor when the sensor output judgement means determines sensor output is larger than the set value and the operating condition judgement means determines operating conditions of the sensor are within previously set operating conditions.
摘要翻译：本发明提供了一种自动零点校正装置，其包括压力传感器，其中输出来自传感器的输出，并且传感器输出被输入到传感器的时变零点漂移校正装置; 时变零点漂移校正装置的传感器输出判断装置，其中传感器输出判断装置进行判断，判断传感器输出是否大于设定值; 以及时变零点漂移校正装置的操作条件判断装置，其中操作条件判断装置判断传感器的操作条件，其中时变零点漂移校正装置操作以消除时变零点漂移校正装置的时变零点漂移传感器输出判断装置确定传感器输出大于设定值，并且操作条件判断装置确定传感器的操作条件在预先设定的操作条件下。

79. 发明申请

US20060236781A1 Differential pressure type flowmeter and differential pressure type flowmeter controller 有权
标题翻译：差压式流量计和差压式流量计控制器
公开(公告)号：US20060236781A1
公开(公告)日：2006-10-26
申请号：US10563226
申请日：2004-06-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
IPC分类号： G01F1/37
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A cost reduction can be achieved by making a differential pressure type flowmeter simple in structure, and highly accurate flow rate measurements can be attained over the wide flow rate range of 100% to 1% with errors E of less than 1 (% SP) both in real time and in a state of inline. To achieve the ends, a differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P1 on the upstream side of an orifice, a detector to detect a fluid pressure P2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P1, pressure P2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1·P1/√{square root over ( )}T·((P2/P1)m−(P2/P1)n)1/2 (where C1 is a proportional constant, and m and n are constants).
摘要翻译：通过使差压式流量计结构简单，可以实现成本降低，并且在100％至1％的宽流量范围内可以获得高精度的流量测量，误差E小于1（％SP），均为在实时和处于内联状态。为了实现这一目的，差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1> 1的检测器，检测流体压力P 2 在孔的下游侧具有用于检测孔口上游侧的流体温度T的检测器，以及控制计算电路，其通过使用压力P <0而计算通过孔口的流体流量Q，使用上述检测器检测到的SUB> 1 <！ - SIPO - >压力P <2>和温度T，并且上述流体的流量Q用等式Q = （P（（P 2/2 / P 1））（P 2 / P 1/2）其中C 1 ）其中C 1 是比例常数，m和n是常数）。

80. 发明申请

US20050109967A1 Valve with an integral orifice 有权
公开(公告)号：US20050109967A1
公开(公告)日：2005-05-26
申请号：US11011379
申请日：2004-12-15
申请人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
IPC分类号： F04F1/08 , F16K7/14 , F16K7/16 , F16K25/00 , F16K27/00 , F16K31/02 , F16K47/00 , H04B17/00 , H04W4/22 , H04W48/12 , H04W74/08
CPC分类号： F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要： A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

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