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    • 77. 发明公开
    • 다층박막의 탄성계수 측정 방법
    • 多层薄膜的弹性模量评估方法
    • KR1020100048799A
    • 2010-05-11
    • KR1020080108114
    • 2008-10-31
    • 한국과학기술연구원
    • 한준현문명운한승희지광구
    • G01L1/00G02F1/13G01N3/00
    • PURPOSE: A coefficient of elasticity method of measurement of a multi-layered thin film which measures the modulus of elasticity is provided to measure the apparent modulus of elasticity of the multi-layered thin film using the wrinkle pitch of a single layered thin film layer and multilayer foil film layer. CONSTITUTION: Compressive stress is added to the multi-layered thin film sample in which a multi-layered thin film(1) is formed on a substrate. Wrinkle is formed on the multi-layered thin film surface of the multi-layered thin film sample. A wrinkle pitch(3) formed on the multi-layered thin film surface, and the through-thickness of the multi-layered thin film and coefficient of elasticity of substrate are measured. The apparent modulus of elasticity of the multi-layered thin film is obtained using a measured value.
    • 目的:提供测量弹性模量的多层薄膜的弹性测量系数,以使用单层薄膜层的褶皱间距来测量多层薄膜的表观弹性模量, 多层箔膜层。 构成:在基板上形成多层薄膜(1)的多层薄膜样品中加入抗压应力。 在多层薄膜样品的多层薄膜表面上形成皱纹。 测量形成在多层薄膜表面上的皱纹间距(3)和多层薄膜的贯穿厚度以及基板的弹性系数。 使用测定值求出多层薄膜的表观弹性模量。
    • 79. 发明授权
    • 이온 빔을 이용한 폴리머 표면 형상의 제어 방법 및 이에의해 제조된 표면에 잔물결 패턴이 형성된 폴리머와, 그응용들
    • 使用离子束聚合物的表面形态控制方法及其表面纹理上的纹理图案的聚合物的方法及其应用
    • KR100851892B1
    • 2008-08-13
    • KR1020070056900
    • 2007-06-11
    • 한국과학기술연구원
    • 문명운한준현이광렬한승희
    • H01J37/30H01J37/317H01L21/265
    • A method for controlling morphology of a surface of a polymer using an ion beam and a polymer with a ripple pattern on a surface fabricated thereby, and applications thereof are provided to form a nano-size pattern of a particular shape in a desired region by changing an irradiation time and an incident angle. A focused ion beam(4) is irradiated obliquely in an incident angle(2) of a constant angle on an irradiation region(5) of an upper surface of a polymer substrate(3) in order to form a ripple pattern. A hierarchical structure having two or more different periods is formed in the ripple pattern by adjusting a beam irradiation time. The ripple pattern is oriented in a particular direction. The width and height of the ripple pattern are controlled by adjusting at least one of the incident angle and an irradiation time of the ion beam and intensity of an acceleration voltage.
    • 使用离子束和由其制造的表面上的波纹图案的聚合物控制聚合物的形态的方法及其应用被提供以通过改变在所需区域中形成特定形状的纳米尺寸图案 照射时间和入射角度。 在聚合物基板(3)的上表面的照射区域(5)上以一定角度的入射角(2)倾斜地照射聚焦离子束(4),以形成波纹图案。 通过调整光束照射时间,在波纹图案中形成具有两个或更多个不同周期的分层结构。 波纹图案朝向特定的方向。 通过调节入射角和离子束的照射时间和加速电压的强度中的至少一个来控​​制波纹图案的宽度和高度。