会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 72. 发明申请
    • DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
    • 开发设备,开发方法和存储介质
    • US20110096304A1
    • 2011-04-28
    • US12904458
    • 2010-10-14
    • Hirofumi TAKEGUCHITomohiro IsekiYuichi YoshidaKousuke Yoshihara
    • Hirofumi TAKEGUCHITomohiro IsekiYuichi YoshidaKousuke Yoshihara
    • G03B27/52G03D3/00
    • G03F7/3021
    • A pretreatment process, carried out prior to a developing process, spouts pure water, namely, a diffusion-assisting liquid for assisting the spread of a developer over the surface of a wafer, through a cleaning liquid spouting nozzle onto a central part of the wafer to form a puddle of pure water. The developer is spouted onto the central part of the wafer for prewetting while the wafer is rotated at a high rotating speed to spread the developer over the surface of the wafer. The developer dissolves the resist film partly and produces a solution. The rotation of the wafer is reversed, for example, within 7 s in which the solution is being produced to reduce the water-repellency of the wafer by spreading the solution over the entire surface of the wafer. Then, the developer is spouted onto the rotating wafer to spread the developer on the surface of the wafer.
    • 在显影过程之前进行的预处理过程,喷出纯水,即用于辅助显影剂在晶片表面上的扩散的扩散辅助液体,通过清洗液喷射喷嘴到达晶片的中心部分 形成一个纯净的水坑。 将显影剂喷射到晶片的中心部分以进行预润湿,同时晶片以高转速旋转以将显影剂铺展在晶片的表面上。 显影剂部分地溶解抗蚀剂膜并产生溶液。 晶片的旋转例如在7秒内相反,其中产生溶液以通过在晶片的整个表面上扩散溶液来降低晶片的拒水性。 然后,将显影剂喷射到旋转的晶片上,以将显影剂铺展在晶片的表面上。
    • 74. 发明授权
    • Fuel cell
    • 燃料电池
    • US07722973B2
    • 2010-05-25
    • US11908609
    • 2006-03-20
    • Yuichi Yoshida
    • Yuichi Yoshida
    • H01M8/02H01M8/04H01M8/10
    • H01M8/04201H01M8/04007H01M8/04067H01M8/1011H01M2008/1095Y02E60/523
    • A membrane electrode assembly is constituted of a solid electrolyte membrane 1 made of a polymeric material, and a fuel electrode 2 and an air electrode 3 which are disposed on both sides of the solid electrolyte membrane 1. A porous membrane 8 is attached to the back surface of the fuel electrode 2, and a fuel tank 12 is formed between a casing 16 of the fuel electrode 2 side and the porous membrane 8. The fuel tank 12 is filled with liquid-retaining sheets 14. An air chamber 13 is formed on the back surface of the air electrode 3, and the air chamber 13 is filled with moisture-retaining sheets 15. A casing 17 of the air electrode 3 side is provided with a number of inlet ports 21. Further, fins 22 are formed on an outer surface of the casing 17 of the air electrode side.
    • 膜电极组件由聚合物材料制成的固体电解质膜1和设置在固体电解质膜1两侧的燃料电极2和空气电极3构成。多孔膜8附接到背面 燃料电极2的表面和燃料箱12形成在燃料电极2侧的壳体16和多孔膜8之间。燃料箱12上装满了液体保持片14.空气室13形成在 空气电极3的后表面和空气室13填充有保湿片15.空气电极3侧的壳体17设置有多个入口21.另外,翅片22形成在 空气电极侧的壳体17的外表面。
    • 77. 发明申请
    • SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
    • 基板清洗方法和基板清洗装置
    • US20090250079A1
    • 2009-10-08
    • US12400419
    • 2009-03-09
    • Kousuke YOSHIHARAYuichi YOSHIDATaro YAMAMOTO
    • Kousuke YOSHIHARAYuichi YOSHIDATaro YAMAMOTO
    • B08B7/04
    • G03F7/168B08B3/024G03F7/3021H01L21/67051
    • The present invention relates to a substrate cleaning method for cleaning a substrate whose static contact angle with respect to water is 85 degrees or more. The substrate cleaning method includes a step in which the substrate is held horizontally by a substrate holder in such a manner that a central part of the substrate and a central part in rotation correspond to each other; a step in which, while the substrate holder is being rotated about a vertical axis, a cleaning liquid is discharged from a cleaning-liquid nozzle to the central part of the substrate and is spread over all the surface of the substrate by a centrifugal force; a step in which, while the substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a distance between an interface on a side of a to-be-discharged position of the gas in the to-be-discharged position of the cleaning liquid and an interface on a side of the to-be-discharged position of the cleaning liquid in the to-be-discharged position of the gas is set between 9 mm and 15 mm; and a step in which, while the substrate holder is being continuously rotated, the to-be-discharged position of the cleaning liquid is moved toward a periphery of the substrate at a speed lower than a speed at which the dried area is spread outward.
    • 本发明涉及一种清洗相对于水的静态接触角为85度以上的基板的基板清洗方法。 基板清洗方法包括以下步骤:基板由基板保持器水平地保持,使得基板的中心部分和旋转中心部分彼此对应; 在衬底保持器围绕垂直轴线旋转的同时,清洗液从清洗液喷嘴排出到基板的中心部分,并通过离心力分散在基板的所有表面上; 在基板保持器持续旋转的同时,将基板上的清洗液的排出位置变更为离开基板的中心部的偏心位置,从而从 气体喷嘴到基板的中心部分,以便在待处理气体的待排出位置的一侧的界面之间的距离处于这样的条件下形成清洁液体的干燥区域, 清洁液体的排出位置和待排出位置的清洗液体的待排出位置一侧的界面设定在9mm〜15mm之间; 以及在衬底保持器持续旋转的同时,清洗液的排出位置以比干燥区域向外扩展的速度朝向衬底的周边移动的步骤。
    • 78. 发明申请
    • Member Designing Method, Member Designing Apparatus, Computer Program Product, and Computer-Readable Recording Medium
    • 会员设计方法,会员设计设备,计算机程序产品和计算机可读记录介质
    • US20090119031A1
    • 2009-05-07
    • US11922930
    • 2006-06-28
    • Toshiyuki NiwaHiroshi YoshidaEiji IsogaiYuichi Yoshida
    • Toshiyuki NiwaHiroshi YoshidaEiji IsogaiYuichi Yoshida
    • G06F17/50G01L1/00G21C17/00G01B5/06
    • G06F17/5018B21D22/02G06F2217/41G06F2217/42Y02T10/82
    • A first step where a computer performs press forming analysis based on a shape of a formed product or a shape of a member, a blank holder force, a friction coefficient, a tensile strength of a material, a yield strength, a stress-strain relation, and a sheet thickness, as press forming conditions, to calculate sheet thickness distribution and post-formation strain distribution of the formed product; and a second step where the computer performs performance analysis based on the sheet thickness distribution, the post-formation strain distribution, and the shape of the formed product or the shape of the member, as state amounts of the formed product, to calculate performance of the member are included, in which the computer repeats the calculations performed in the process from the first step through the second step a predetermined number of times, with at least one of the press forming conditions being changed, to output an optimum press forming condition that gives a maximum value or a target value of the performance.
    • 计算机根据成形品的形状或构件的形状,坯料夹持力,摩擦系数,材料的抗拉强度,屈服强度,应力 - 应变关系等进行冲压成型分析的第一步骤 和作为压制成形条件的片材厚度,计算成形品的片材厚度分布和形成后应变分布; 以及第二步骤,其中计算机基于片材厚度分布,形成后应变分布,成形产品的形状或构件的形状,作为形成的产品的状态量进行性能分析,以计算成型产品的性能 包括成员,其中计算机在第一步骤到第二步骤的过程中重复预定次数的计算,其中至少一个冲压成形条件改变,以输出最佳压制成形条件,其中 给出性能的最大值或目标值。
    • 79. 发明申请
    • Fuel Cell
    • 燃料电池
    • US20090011304A1
    • 2009-01-08
    • US11908609
    • 2006-03-20
    • Yuichi Yoshida
    • Yuichi Yoshida
    • H01M8/10H01M8/04H01M4/00
    • H01M8/04201H01M8/04007H01M8/04067H01M8/1011H01M2008/1095Y02E60/523
    • A membrane electrode assembly is constituted of a solid electrolyte membrane 1 made of a polymeric material, and a fuel electrode 2 and an air electrode 3 which are disposed on both sides of the solid electrolyte membrane 1. A porous membrane 8 is attached to the back surface of the fuel electrode 2, and a fuel tank 12 is formed between a casing 16 of the fuel electrode 2 side and the porous membrane 8. The fuel tank 12 is filled with liquid-retaining sheets 14. An air chamber 13 is formed on the back surface of the air electrode 3, and the air chamber 13 is filled with moisture-retaining sheets 15. A casing 17 of the air electrode 3 side is provided with a number of inlet ports 21. Further, fins 22 are formed on an outer surface of the casing 17 of the air electrode side.
    • 膜电极组件由聚合物材料制成的固体电解质膜1和设置在固体电解质膜1两侧的燃料电极2和空气电极3构成。多孔膜8附接到背面 燃料电极2的表面和燃料箱12形成在燃料电极2侧的壳体16和多孔膜8之间。燃料箱12上装满了液体保持片14.空气室13形成在 空气电极3的后表面和空气室13填充有保湿片15.空气电极3侧的壳体17设置有多个入口21.另外,翅片22形成在 空气电极侧的壳体17的外表面。