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    • 74. 发明申请
    • RF RECEIVER SWITCHES
    • 射频接收器开关
    • WO2004006276A2
    • 2004-01-15
    • PCT/US2003/019567
    • 2003-06-20
    • SUPERCONDUCTOR TECHNOLOGIES, INC.
    • SAITO, Elna, R.HEY-SHIPTON, Gregory, L.COSTA, James, R.BILSKI, Stacey, M.
    • H01H
    • H01P1/127H04B1/036
    • RF switches and methods of use are provided. In one embodiment, a RF switch includes first and second switch assemblies, each comprising an elongate member and a magnetic housing on an end of the member. The magnet is disposed between contact pads for first and second circuits, and an electromagnetic source is coupled to the assemblies. Each switch has a first and second state. Another RF switch of the present invention includes a rotor, an elongate member disposed centrally through the rotor, an actuator coupled to the member and configured to rotate the member and the rotor, and a contact on the rotor that may touch a substrate. The contact is used to complete a first path or a second path.
    • 提供RF开关和使用方法。 在一个实施例中,RF开关包括第一和第二开关组件,每个开关组件包括在构件的端部上的细长构件和磁性壳体。 磁体设置在用于第一和第二电路的接触焊盘之间,并且电磁源耦合到组件。 每个开关具有第一和第二状态。 本发明的另一RF开关包括转子,通过转子中心设置的细长构件,联接到构件并被构造成旋转构件和转子的致动器以及转子上可接触衬底的触点。 该联系人用于完成第一条路径或第二条路径。
    • 75. 发明申请
    • ANCHORS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICES
    • 微电子机械系统(MEMS)装置的锚杆
    • WO2003043095A2
    • 2003-05-22
    • PCT/US2002/027821
    • 2002-08-29
    • SUPERCONDUCTOR TECHNOLOGIES, INC.
    • PROPHET, Eric, M.
    • H01L29/82
    • B81B3/0078B81B2203/0307H01G5/16H01H59/0009
    • The present invention provides an anchor system for securing a MEMS device to a substrate comprising multiple anchors. A MEMS structure, built in accordance with the one embodiment of the invention, comprises a flexible beam suspended over a substrate and a base attached to each end of the beam. Each base is supported above the substrate by multiple anchors attached to the surface of the substrate. Each anchor further comprises anchor legs along its sides that support the base off of the substrate. In one embodiment, the anchors of each base are located away from the interface between the beam and the base. In another embodiment, the lengths of the anchor legs of the anchors are made longer along a direction of good side-wall step coverage than along a direction of poor side-wall step coverage.
    • 本发明提供一种用于将MEMS装置固定到包括多个锚固件的基板的锚定系统。 根据本发明的一个实施例构建的MEMS结构包括悬挂在基板上的柔性梁和附接到梁的每个端部的基座。 每个基底通过附接到基底表面的多个锚固件支撑在基底上。 每个锚还包括沿其侧面的锚腿,其支撑基底离开基底。 在一个实施例中,每个基座的锚定件远离梁和基座之间的界面。 在另一个实施例中,沿着良好的侧壁台阶覆盖的方向使得锚的锚腿的长度比沿着差的侧壁台阶覆盖的方向更长。
    • 79. 发明申请
    • SUPERCONDUCTING DELAY LINE
    • 超级延时线
    • WO1992020078A2
    • 1992-11-12
    • PCT/US1992003862
    • 1992-05-08
    • SUPERCONDUCTOR TECHNOLOGIES INC.
    • SUPERCONDUCTOR TECHNOLOGIES INC.FORSE, Roger, JamesSKOGLUND, David, Lee
    • H01D09/00
    • H01P9/006
    • A superconducting delay line utilizes a meandering conductor on a substrate, a thin dielectric coating and a ground plane adjacent the conductor having portions selectively removed so as to control the impedance of the device. In the preferred embodiment, the superconducting microwave delay line is constructed having an epitaxial superconducting conductor and a portion of the ground plane coplanar with the conductor, both formed on the substrate, with the remainder of the ground plane formed by interconnections between the coplanar ground plane. Superconducting epitaxial films may be patterned to provide the conductor and coplanar portions of the ground plane. Metal interconnects disposed on the coplanar portions of the ground plane bridge over the conductor, and the impedance of the device is adjusted by varying the coverage of the conductor by the interconnects. In another embodiment, a single ground plane has sections removed adjacent the conductor to adjust the impedance to substantially 50 ohms. A superconducting epitaxial film is patterned to form a conductor, a dielectric insulator covers the conductor and substrate and a ground plane having removed portions is disposed above the insulator. Superconductive delay lines of this invention may have a 20 GHz bandwidth and a Q exceeding 1,800.
    • 超导延迟线使用基板上的曲折导体,薄介电涂层和邻近导体的接地平面,该导体具有被选择性地去除的部分,以便控制器件的阻抗。 在优选实施例中,超导微波延迟线被构造成具有外延超导导体,并且与导体共面的接地平面的一部分都形成在基板上,其中接地平面的其余部分由共面接地层 。 可以对超导外延膜进行图案化以提供接地平面的导体和共面部分。 设置在导体上的接地平面桥的共面部分上的金属互连,并且通过互连改变导体的覆盖度来调节器件的阻抗。 在另一个实施例中,单个接地平面具有相邻于导体去除的部分,以将阻抗调节至基本为50欧姆。 将超导外延膜图案化以形成导体,绝缘体绝缘体覆盖导体和衬底,并且具有去除部分的接地平面设置在绝缘体上方。 本发明的超导延迟线可以具有20GHz带宽和Q超过1,800。