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    • 72. 发明申请
    • BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
    • 背面照明图像传感器及其制造方法
    • US20120009720A1
    • 2012-01-12
    • US13177253
    • 2011-07-06
    • Eun-Sub SHIMJung-Chak AhnBum-Suk KimKyung-Ho Lee
    • Eun-Sub SHIMJung-Chak AhnBum-Suk KimKyung-Ho Lee
    • H01L31/0232
    • H01L27/1464H01L27/14625H01L27/14685H01L27/14687
    • A method of manufacturing a backside illuminated image sensor, including forming a first isolation layer in a first semiconductor layer, such that the first isolation layer defines pixels of a pixel array in the first semiconductor layer, forming a second semiconductor layer on a first surface of the first semiconductor layer, forming a second isolation layer in the second semiconductor layer, such that the second isolation layer defines active device regions in the second semiconductor layer, forming photo detectors and circuit devices by implanting impurities into a first surface of the second semiconductor layer, the first surface of the second semiconductor layer facing away from the first semiconductor layer, forming a wiring layer on the first surface of the second semiconductor layer, and forming a light filter layer on a second surface of the first semiconductor layer.
    • 一种制造背面照射图像传感器的方法,包括在第一半导体层中形成第一隔离层,使得第一隔离层限定第一半导体层中的像素阵列的像素,在第一半导体层的第一表面上形成第二半导体层 所述第一半导体层在所述第二半导体层中形成第二隔离层,使得所述第二隔离层限定所述第二半导体层中的有源器件区域,通过将杂质注入到所述第二半导体层的第一表面中来形成光检测器和电路器件 所述第二半导体层的第一表面背离所述第一半导体层,在所述第二半导体层的所述第一表面上形成布线层,并且在所述第一半导体层的第二表面上形成滤光器层。
    • 75. 发明申请
    • PHOTOSENSORS INCLUDING PHOTODIODE CONTROL ELECTRODES AND METHODS OF OPERATING SAME
    • 包括光电子控制电极的光电传感器及其操作方法
    • US20110156105A1
    • 2011-06-30
    • US13041973
    • 2011-03-07
    • Yi-tae KimJung-chak Ahn
    • Yi-tae KimJung-chak Ahn
    • H01L31/113
    • H01L31/103H04N5/3597H04N5/361H04N5/3745
    • A sensor includes a substrate, a floating diffusion node in the substrate, a photodiode in the substrate laterally spaced apart from the floating diffusion region and a transfer transistor coupling the photodiode and the floating diffusion region. The sensor further includes a photodiode control electrode disposed on the photodiode and configured to control a carrier distribution of the photodiode responsive to a control signal applied thereto. The floating diffusion region may have a first conductivity type, the photodiode may include a first semiconductor region of a second conductivity type disposed on a second semiconductor region of the first conductivity type, and the photodiode control electrode may be disposed on the first semiconductor region. The photodiode may be configured to receive incident light from a side of the substrate opposite the photodiode control electrode. The transfer transistor may include a gate electrode on a channel region in the substrate and the photodiode control electrode and the transfer transistor gate electrode may be separately controllable. In further embodiments, the photodiode control electrode comprises an extension of the transfer transistor gate electrode.
    • 传感器包括衬底,衬底中的浮动扩散节点,与浮动扩散区域横向间隔开的衬底中的光电二极管和耦合光电二极管和浮动扩散区域的传输晶体管。 传感器还包括设置在光电二极管上的光电二极管控制电极,其被配置成响应于施加到其上的控制信号来控制光电二极管的载流子分布。 浮置扩散区域可以具有第一导电类型,光电二极管可以包括设置在第一导电类型的第二半导体区域上的第二导电类型的第一半导体区域,并且光电二极管控制电极可以设置在第一半导体区域上。 光电二极管可以被配置为从基板的与光电二极管控制电极相对的一侧接收入射光。 转移晶体管可以包括在衬底中的沟道区上的栅极电极,并且光电二极管控制电极和转移晶体管栅极电极可以是单独可控的。 在另外的实施例中,光电二极管控制电极包括传输晶体管栅电极的延伸部分。
    • 76. 发明授权
    • Photosensors including photodiode control electrodes and methods of operating same
    • 光电传感器包括光电二极管控制电极和操作方法
    • US07910872B2
    • 2011-03-22
    • US12132814
    • 2008-06-04
    • Yi-tae KimJung-chak Ahn
    • Yi-tae KimJung-chak Ahn
    • H01L27/00
    • H01L31/103H04N5/3597H04N5/361H04N5/3745
    • A sensor includes a substrate, a floating diffusion node in the substrate, a photodiode in the substrate laterally spaced apart from the floating diffusion region and a transfer transistor coupling the photodiode and the floating diffusion region. The sensor further includes a photodiode control electrode disposed on the photodiode and configured to control a carrier distribution of the photodiode responsive to a control signal applied thereto. The photodiode may include a first semiconductor region of a first conductivity type disposed on a second semiconductor region of a second conductivity type, the floating diffusion region may have the second conductivity type and the photodiode control electrode may be disposed on the first semiconductor region. The photodiode may be configured to receive incident light from a side of the substrate opposite the photodiode control electrode. The transfer transistor may include a gate electrode on a channel region in the substrate and the photodiode control electrode and the transfer transistor gate electrode may be separately controllable. In further embodiments, the photodiode control electrode comprises an extension of the transfer transistor gate electrode.
    • 传感器包括衬底,衬底中的浮动扩散节点,与浮动扩散区域横向间隔开的衬底中的光电二极管和耦合光电二极管和浮动扩散区域的传输晶体管。 传感器还包括设置在光电二极管上的光电二极管控制电极,其被配置为响应于施加到其上的控制信号来控制光电二极管的载流子分布。 光电二极管可以包括设置在第二导电类型的第二半导体区域上的第一导电类型的第一半导体区域,浮动扩散区域可以具有第二导电类型,并且光电二极管控制电极可以设置在第一半导体区域上。 光电二极管可以被配置为从基板的与光电二极管控制电极相对的一侧接收入射光。 转移晶体管可以包括在衬底中的沟道区上的栅电极,并且光电二极管控制电极和转移晶体管栅电极可以是单独可控的。 在另外的实施例中,光电二极管控制电极包括传输晶体管栅电极的延伸部分。