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    • 70. 发明申请
    • PROCESS AND SYSTEM FOR LASER CRYSTALLIZATION PROCESSING OF FILM REGIONS ON A SUBSTRATE TO MINIMIZE EDGE AREAS, AND STRUCTURE OF SUCH FILM REGIONS
    • 用于激光结晶处理基板上的薄膜区域以最小化边缘区域的方法和系统以及这样的薄膜区域的结构
    • WO2004017381A3
    • 2004-05-13
    • PCT/US0325954
    • 2003-08-19
    • UNIV COLUMBIAIM JAMES S
    • IM JAMES S
    • H01L21/20H01L21/336H01L21/77H01L21/84H01L29/04H01L29/786H01L21/36
    • H01L29/04B23K26/0622B23K26/066H01L21/2026H01L21/268H01L27/1285H01L27/1296H01L29/66742H01L29/78651
    • A process and system for processing a thin film sample (170) are provided. In particular, a beam generator (110) can be controlled to emit at least one beam pulse (111). The beam pulse (111) is then masked to produce at least one masked beam pulse (164), which is used to irradiate at least one portion (510) of the thin film sample (170). With the at least one masked beam pulse (164), the portion (510) of the film sample (170) is irradiated with sufficient intensity for such portion to later crystallize. This portion (510) of the film sample (170) is allowed to crystallize so as to be composed of a first area (518) and a second area (515). Upon the crystallization thereof, the first area (518) includes a first set of grains, and the second area (515) includes a second set of grains whose at least one characteristic is different from at least one characteristic of the second set of grains. The first area (518) surrounds the second area (515), and is configured to allow an active region (618) of a thin-film transistor (TFT) (610) to be provided at a distance therefrom.
    • 提供了一种用于处理薄膜样品(170)的方法和系统。 特别地,可以控制光束发生器(110)发射至少一个光束脉冲(111)。 然后对光束脉冲(111)进行掩模以产生用于照射薄膜样品(170)的至少一部分(510)的至少一个掩模束脉冲(164)。 利用至少一个掩蔽光束脉冲(164),膜样品(170)的部分(510)被照射足够的强度,以使该部分稍后结晶。 允许膜样品(170)的该部分(510)结晶以由第一区域(518)和第二区域(515)组成。 在其结晶时,第一区域(518)包括第一组晶粒,并且第二区域(515)包括第二组晶粒,其至少一个特征与第二组晶粒的至少一个特性不同。 第一区域(518)围绕第二区域(515),并且被配置为允许在距离其距离处设置薄膜晶体管(TFT)(610)的有源区域(618)。