专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

61. 发明申请

WO02100771A3 LOW-TEMPERATURE PATTERNED WAFER BONDING WITH PHOTOSENSITIVE BENZOCYLOBUTENE (BCB) AND 3D MICROELECTROMECHANICAL SYSTEMS FABRICATION 审中-公开
标题翻译：低温图案与光敏苯乙烯（BCB）和三维微电子系统制造结合
公开(公告)号：WO02100771A3
公开(公告)日：2003-10-16
申请号：PCT/US0217781
申请日：2002-06-05
申请人： UNIV MICHIGAN , CHOU TSUNG-KUAN A , NAJAFI KHALIL , BERNAL LUIS P , WASHABAUGH PETER D
发明人： CHOU TSUNG-KUAN A , NAJAFI KHALIL , BERNAL LUIS P , WASHABAUGH PETER D
IPC分类号： B81B3/00 , B81C1/00 , B81C3/00 , H01L21/30 , H01L35/24
CPC分类号： B81B7/0051 , B81B2203/0323 , B81C3/001 , B81C2203/0118 , B81C2203/019 , B81C2203/032
摘要： A method of low-temperature (150-300°C) patterned wafer bonding of complex 3D MEMS comprising providing a first pre-processed wafer (100) having a first surface and a second pre-processed wafer (102) having a second surface. Photosensitive benzocyclobutene (BCB) polymer (106) is then applied to the first surface of the first wafer (100) in a predetermined pattern to define a bonding layer. The second wafer (102) is then bonded to the first wafer (100) only along the bonding layer.
摘要翻译：复合3D MEMS的低温（150-300℃）图案化晶片接合的方法，包括提供具有第一表面的第一预处理晶片（100）和具有第二表面的第二预处理晶片（102）。然后以预定图案将感光性苯并环丁烯（BCB）聚合物（106）施加到第一晶片（100）的第一表面以限定结合层。然后，第二晶片（102）仅沿着键合层结合到第一晶片（100）。

62. 发明专利

JP2016521012A 基板開口を形成する方法有权
标题翻译：形成的衬底开口的方法
公开(公告)号：JP2016521012A
公开(公告)日：2016-07-14
申请号：JP2016516657
申请日：2014-04-24
申请人：マイクロンテクノロジー, インク. , マイクロンテクノロジー, インク.
发明人：キールバウチ，マーク
IPC分类号： H01L21/3065
CPC分类号： H01L21/76804 , B44C1/227 , B81B2203/0315 , B81B2203/0323 , B81B2203/033 , B81B2203/0338 , B81B2203/0353 , B81C1/00103 , B81C1/00531 , G02B6/136 , H01L21/3065 , H01L21/308 , H01L21/3083 , H01L21/31116 , H01L21/32 , H01L21/32136 , H01L21/32137 , H01L21/76232
摘要：基板開口を形成する方法は、基板内に複数の横並び開口を形成することを含む。直接隣接する横並び開口のうちの少なくとも幾つかは、基板内で互いに異なる深さに形成される。横並び開口間に横方向に存在する壁は、非垂直側壁表面を有するより大きい開口を形成するために除去され、壁は、除去される壁に直交し、側壁表面を通る少なくとも一つの垂直断面において除去された。【選択図】図1
摘要翻译：形成基板开口的方法包括在衬底中形成多个并排的侧孔。中的至少一些直接相邻的并排侧开口被在基板的不同深度形成。壁中存在的由侧面开口的侧面之间的横向方向上被去除，以形成具有非垂直侧壁表面上的较大开口，壁是垂直于壁被除去，通过侧壁表面的至少一个垂直剖面它已被删除。点域1

64. 发明专利

JP2007522433A The photocurable perfluoropolyether to be used as a novel material of the microfluidic device 有权
标题翻译：空值
公开(公告)号：JP2007522433A
公开(公告)日：2007-08-09
申请号：JP2006527164
申请日：2004-09-23
申请人：カリフォルニアインスティテュートオブテクノロジー , ザユニバーシティオブノースカロライナアットチャペルヒルThe University Of North Carolina At Chapel Hill , ノースカロライナ・ステイト・ユニバーシティ
发明人：ピー．ロルランドジャソン , ヤルブロウグフジャソン , エム．デシモネジョセプフ , アール．クアケステプハン , エー．スチョルズマンデレク , バンダムミカエル
IPC分类号： G01N35/08 , B29C39/10 , B29K27/12 , B29K71/00 , B81B1/00 , C08G20060101 , G01N21/78 , G01N30/88 , G01N37/00
CPC分类号： B01L3/502707 , B01L3/0268 , B01L3/502738 , B01L7/52 , B01L2200/12 , B01L2300/0816 , B01L2400/0481 , B01L2400/0655 , B81B1/006 , B81B2201/058 , B81B2203/0323 , B81C2201/034 , B82Y10/00 , B82Y40/00 , C08G18/5015 , C08G18/8116 , C08G65/007 , C08G65/33348 , C08G2650/48 , C09D163/00 , C09D171/02 , F16K99/0001 , F16K99/0015 , F16K99/0026 , F16K99/0034 , F16K99/0036 , F16K99/0042 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K99/0061 , F16K99/0065 , F16K2099/008 , F16K2099/0084 , F16K2099/0086 , G03F7/0002 , Y10T137/0396 , Y10T428/24479 , Y10T428/249954 , Y10T428/3154
摘要：耐溶媒性のあるマイクロ流体装置を作製する材料として、官能化された光硬化性ペルフルオロポリエーテルが用いられる。それらの耐溶媒性のあるマイクロ流体装置を用いて、有機溶媒などの少量の流体の流れを制御し、他のポリマー系マイクロ流体装置では追随できないマイクロスケールの化学反応を行うことができる。
【選択図】図１Ａ〜１Ｃ
摘要翻译：使用光固化全氟聚醚（PFPE）材料制造耐溶剂PFPE基微流体装置，使材料流动并在耐溶剂型PFPE基微流体装置中进行化学反应的方法，以及耐溶剂PFPE- 描述了基于微流体的微流体装置本身。在一个实施方案中，描述了一种制备光固化全氟聚醚的图案化层的方法，所述方法包括：（a）提供基材，其中所述基材包含图案化表面; （b）使全氟聚醚醚前体与基底的图案化表面接触; 和（c）光固化全氟聚醚前体以形成光固化全氟聚醚的图案化层。

65. 发明公开

EP2871482A1 MICROCHIP AND METHOD FOR PRODUCING MICROCHIP 有权
标题翻译： MIKROCHIP UND VERFAHREN ZUR HERSTELLUNG EINES MIKROCHIPS
公开(公告)号：EP2871482A1
公开(公告)日：2015-05-13
申请号：EP13817319.0
申请日：2013-05-09
申请人： Sony Corporation
发明人： WATANABE Hidetoshi , SEGAWA Yuji , KATO Yoshiaki
IPC分类号： G01N35/08 , B01J19/00 , G01N37/00
CPC分类号： B32B27/08 , B01L3/502707 , B01L2200/0689 , B01L2300/0816 , B01L2300/0887 , B32B3/30 , B32B27/283 , B32B37/12 , B32B2383/00 , B32B2457/00 , B81B2201/058 , B81B2203/0323 , B81B2203/0338 , B81C3/001 , B81C2203/032 , G01N2035/00158 , Y10T428/24612
摘要： There is provided a microchip including a plurality of substrate layers, and bonding layers provided at boundary surfaces between the substrate layers and configured to include a silicon compound. At least one of the bonding layers is configured to include an organic silicon compound.
摘要翻译：提供了包括多个基板层的微芯片和设置在基板层之间的边界面处的接合层，并且被配置为包括硅化合物。至少一个接合层被配置为包括有机硅化合物。

66. 发明授权

EP1694731B1 PHOTOCURABLE PERFLUOROPOLYETHERS FOR USE AS NOVEL MATERIALS IN MICROFLUIDIC DEVICES 有权
标题翻译：光固化的全氟聚醚用作微流体设备的新材料
公开(公告)号：EP1694731B1
公开(公告)日：2012-03-28
申请号：EP04784924.5
申请日：2004-09-23
申请人： UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL , CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人： DESIMONE, Joseph M. , ROLLAND, Jason P. , QUAKE, Stephen R. , SCHORZMAN, Derek A. , YARBROUGH, Jason , VAN DAM, Michael
IPC分类号： C08J5/20 , H01M4/88 , H01M8/10 , B05D5/12 , C08J5/12 , C09D171/02
CPC分类号： B01L3/502707 , B01L3/0268 , B01L3/502738 , B01L7/52 , B01L2200/12 , B01L2300/0816 , B01L2400/0481 , B01L2400/0655 , B81B1/006 , B81B2201/058 , B81B2203/0323 , B81C2201/034 , B82Y10/00 , B82Y40/00 , C08G18/5015 , C08G18/8116 , C08G65/007 , C08G65/33348 , C08G2650/48 , C09D163/00 , C09D171/02 , F16K99/0001 , F16K99/0015 , F16K99/0026 , F16K99/0034 , F16K99/0036 , F16K99/0042 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K99/0061 , F16K99/0065 , F16K2099/008 , F16K2099/0084 , F16K2099/0086 , G03F7/0002 , Y10T137/0396 , Y10T428/24479 , Y10T428/249954 , Y10T428/3154
摘要： A solvent-resistant microfluidio device (MD) is fabricated from a functionalized, photo-curable perfluoropolyether (PFPE). In one embodiment, a polymeric precursor (PP), comprising PFPE, is disposed on a patterned surface (PS) of a substrate (S), having raised protrusions (P). Ultraviolet light (UV) is applied to yield a patterned layer (PL) of photo-cured PFPE having recesses (R) comprising at least one channel (CH). Patterned layer (PL) is removed from patterned surface (PS) of substrate (S) to yield microfluidic device (MD).

68. 发明授权

EP1827693B1 A MICRO FLUIDIC DEVICE AND METHODS FOR PRODUCING A MICRO FLUIDIC DEVICE 有权
标题翻译：维多利亚州立大学维多利亚州ZER HERSTELLUNG EINER MIKROFLUIDVORRICHTUNG
公开(公告)号：EP1827693B1
公开(公告)日：2010-03-24
申请号：EP05812875.2
申请日：2005-12-07
申请人： Scandinavian Micro Biodevices ApS
发明人： BAU-MADSEN, Niels Kristian , BARHOLM-HANSEN, Claus , JONSMANN, Jacques , OVERBY, Bent
IPC分类号： B01L3/00
CPC分类号： B01L3/502746 , B81B2203/0323
摘要： The invention relates to a micro fluidic device comprising a flow channel with an interface between a cartridge base and a lid, as well as methods of producing it. The cartridge base comprises a channel shaped depression and the lid is bonded to said cartridge base to form the flow channel: The interface between the cartridge base and the lid, adjacent to and along with the flow channel comprises at least two, such as three or more capillary gap sections in the form of a gap between the Ii and the cartridge base, separated by a flow break section, which flow break section provides a barrier for a capillary flow of liquid along adjoining capillary gap sections. In one embodiment the surface of at least one of the cartridge base and the lid in the interface between the cartridge base and the lid in the flow break sections, adjacent to and along with the flow channel, is less hydrophilic than one or both of the surfaces of the cartridge base and the lid in said capillary gap sections. In one embodiment the bonding material has at least partly penetrated into the flow channel.
摘要翻译：微流体装置可以包括具有在盒基座和盖子之间的界面的流动通道。盒基座可以包括通道形凹陷。盖可以结合到盒基部以形成流动通道。墨盒底座和盖子之间的界面，与流动通道相邻并且与流动通道一起可以包括至少两个毛细孔隙部分，这两个毛细孔隙部分是盖子和墨盒底座之间的间隙形式，由流动断裂部分分开，断裂部分可以沿着相邻的毛细孔隙部分提供液体的毛细管流动的屏障。

69. 发明公开

EP1827693A2 A MICRO FLUIDIC DEVICE AND METHODS FOR PRODUCING A MICRO FLUIDIC DEVICE 有权
标题翻译：微流体设备和一种用于生产微流体装置
公开(公告)号：EP1827693A2
公开(公告)日：2007-09-05
申请号：EP05812875.2
申请日：2005-12-07
申请人： Inverness Medical Switzerland GmbH
发明人： BAU-MADSEN, Niels Kristian , BARHOLM-HANSEN, Claus , JONSMANN, Jacques , OVERBY, Bent
IPC分类号： B01L3/00
CPC分类号： B01L3/502746 , B81B2203/0323
摘要： The invention relates to a micro fluidic device comprising a flow channel with an interface between a cartridge base and a lid, as well as methods of producing it. The cartridge base comprises a channel shaped depression and the lid is bonded to said cartridge base to form the flow channel: The interface between the cartridge base and the lid, adjacent to and along with the flow channel comprises at least two, such as three or more capillary gap sections in the form of a gap between the Ii and the cartridge base, separated by a flow break section, which flow break section provides a barrier for a capillary flow of liquid along adjoining capillary gap sections. In one embodiment the surface of at least one of the cartridge base and the lid in the interface between the cartridge base and the lid in the flow break sections, adjacent to and along with the flow channel, is less hydrophilic than one or both of the surfaces of the cartridge base and the lid in said capillary gap sections. In one embodiment the bonding material has at least partly penetrated into the flow channel.

70. 发明申请

WO2014193569A1 METHODS OF FORMING A SUBSTRATE OPENING 审中-公开
标题翻译：形成基板开放的方法
公开(公告)号：WO2014193569A1
公开(公告)日：2014-12-04
申请号：PCT/US2014/035276
申请日：2014-04-24
申请人： MICRON TECHNOLOGY, INC.
发明人： KIEHLBAUCH, Mark
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： H01L21/76804 , B44C1/227 , B81B2203/0315 , B81B2203/0323 , B81B2203/033 , B81B2203/0338 , B81B2203/0353 , B81C1/00103 , B81C1/00531 , G02B6/136 , H01L21/3065 , H01L21/308 , H01L21/3083 , H01L21/31116 , H01L21/32 , H01L21/32136 , H01L21/32137 , H01L21/76232
摘要： A method of forming a substrate opening includes forming a plurality of side-by-side openings in a substrate. At least some of immediately adjacent side-by-side openings are formed in the substrate to different depths relative one another. Walls that are laterally between the side-by-side openings are removed to form a larger opening having a non-vertical sidewall surface where the walls were removed in at least one straight-line vertical cross-section that passes through the sidewall surface orthogonally to the removed walls.
摘要翻译：形成基板开口的方法包括在基板中形成多个并排开口。至少一些立即相邻的并排开口在衬底中相对于彼此形成不同的深度。在侧面开口之间的横向的壁被移除以形成具有非垂直侧壁表面的更大的开口，其中壁在至少一个直线垂直横截面中被移除，所述至少一个直线垂直横截面正交地穿过侧壁表面被拆除的墙壁。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式