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    • 64. 发明申请
    • RESIN COMPOSITION FOR WIRING BOARD, RESIN SHEET FOR WIRING BOARD, COMPOSITE BODY, METHOD FOR PRODUCING COMPOSITE BODY, AND SEMICONDUCTOR DEVICE
    • 接线板用树脂组合物,导线板用树脂片,复合体,生产复合体的方法及半导体器件
    • US20110308848A1
    • 2011-12-22
    • US13148774
    • 2010-02-08
    • Yuka ItoKenichi KanedaYasuaki MitsuiIji OnozukaNoriyuki OhigashiHideki Hara
    • Yuka ItoKenichi KanedaYasuaki MitsuiIji OnozukaNoriyuki OhigashiHideki Hara
    • H05K1/18H05K3/00B32B3/00
    • H05K3/045H05K3/107H05K3/281H05K3/421H05K3/465H05K2201/0209H05K2201/09509H05K2201/09563Y10T29/49124Y10T428/24355
    • Disclosed are a composite body, a method for producing the composite body and a semiconductor device, the composite body comprising a resin layer and a fine wiring and/or via hole being formed in the resin layer, having high adhesion and high reliability, and being capable of high frequencies. Also disclosed are a resin composition and a resin sheet, both of which can provide such a composite body.The composite body comprises a resin layer and an electroconductive layer, wherein a groove having a maximum width of 1 μm or more and 10 μm or less is on a surface of the resin layer; the electroconductive layer is inside the groove; and a surface of the resin layer being in contact with the electroconductive layer has an arithmetic average roughness (Ra) of 0.05 μm or more and 0.45 μm or less, and/or wherein the resin layer has a via hole having a diameter of 1 μm or more and 25 μm or less; the electroconductive layer is inside the via hole; and a surface of the resin layer of the inside of the via hole has an arithmetic average roughness (Ra) of 0.05 μm or more and 0.45 μm or less. The resin composition comprises an inorganic filler and a thermosetting resin, wherein the inorganic filler contains coarse particles having a diameter of more than 2 μm in an amount of 500 ppm or less. The resin sheet comprises a resin layer and a substrate, wherein the resin layer is on the substrate and comprises the resin composition.
    • 公开了一种复合体,该复合体的制造方法以及半导体装置,该复合体包括树脂层和在该树脂层中形成的精细布线和/或通孔,具有高粘合性和高可靠性,并且 能够高频率。 还公开了树脂组合物和树脂片,两者都可以提供这种复合体。 复合体包括树脂层和导电层,其中在树脂层的表面上具有最大宽度为1μm以上且10μm以下的槽; 导电层在槽内; 并且与导电层接触的树脂层的表面的算术平均粗糙度(Ra)为0.05μm以上且0.45μm以下,和/或其中树脂层具有直径为1μm的通孔 以上且25μm以下; 导电层在通孔内; 通孔内侧的树脂层的表面的算术平均粗糙度(Ra)为0.05μm以上且0.45μm以下。 树脂组合物包含无机填料和热固性树脂,其中无机填料含有直径大于2μm的粗颗粒的量在500ppm以下。 树脂片包括树脂层和基材,其中树脂层在基材上并包含树脂组合物。
    • 65. 发明授权
    • Resin composition, filling material, insulating layer and semiconductor device
    • 树脂组合物,填充材料,绝缘层和半导体器件
    • US07999354B2
    • 2011-08-16
    • US12664003
    • 2008-06-11
    • Toyosei TakahashiRie TakayamaHirohisa DejimaJunya Kusunoki
    • Toyosei TakahashiRie TakayamaHirohisa DejimaJunya Kusunoki
    • H01L29/40
    • C08L63/10H01L21/76898H01L23/481H01L2224/02372H01L2224/0401H01L2224/05548H01L2224/06181H01L2224/13022H01L2224/13024H01L2224/131Y10T428/24273H01L2924/014
    • A resin composition of the present invention is used for forming a filling material which fills at least a through-hole of a semiconductor substrate, the through-hole extending through the semiconductor substrate in a thickness direction thereof and having a conductive portion therein. The resin composition is composed of: a resin having a radical-polymerizable double bond, a thermosetting resin and a resin which differs from the resin having the radical-polymerizable double bond and has an alkali-soluble group and a double bond; or a cyclic olefin resin. A filling material of the present invention is formed of a cured product of the above resin composition. An insulating layer of the present invention is formed of a cured product of the above resin composition. The insulating layer includes: a layer-shaped insulating portion provided on a surface opposite to a functional surface of the semiconductor substrate; and a filling portion integrally formed with the insulating portion and filling the through-hole. A semiconductor device of the present invention includes the above insulating layer.
    • 本发明的树脂组合物用于形成填充半导体衬底的至少通孔的填充材料,所述通孔在其厚度方向上延伸穿过半导体衬底并且在其中具有导电部分。 树脂组合物由具有自由基聚合性双键的树脂,热固性树脂和树脂组成,该树脂与具有自由基聚合双键的具有碱溶性基团和双键的树脂不同; 或环状烯烃树脂。 本发明的填充材料由上述树脂组合物的固化物形成。 本发明的绝缘层由上述树脂组合物的固化物形成。 绝缘层包括:设置在与半导体衬底的功能表面相对的表面上的层状绝缘部分; 以及与所述绝缘部一体形成并填充所述通孔的填充部。 本发明的半导体器件包括上述绝缘层。
    • 70. 发明授权
    • Resin composition, polyimide resin composition, polybenzoxazole resin composition, varnish, resin film and semiconductor device using the same
    • 树脂组合物,聚酰亚胺树脂组合物,聚苯并恶唑树脂组合物,清漆,树脂膜和使用其的半导体器件
    • US07652125B2
    • 2010-01-26
    • US11663854
    • 2005-09-29
    • Takashi EnokiAtsushi IzumiYumiko YamamotoTakahiro Harada
    • Takashi EnokiAtsushi IzumiYumiko YamamotoTakahiro Harada
    • C08G65/40C08G65/38
    • C08L79/08C08L79/04C09D179/04C09D179/08H01L51/052
    • A resin composition having high heat resistance and low dielectric constant after heat treatment, a varnish thereof and a semiconductor device using the same are provided by a resin composition including a compound having a structure represented by the general formula (1): wherein, “Ar” is an aromatic group; “a” is 0 or 1; R11 is an organic group having one or more carbon atoms and at least one is a group having an alicyclic structure; when “q” is an integer of 2 or more, R11s may be the same or different from each other; at least one of R1 to R5 and at least one of R6 to R10 on respective benzene rings are Ar-binding sites or R11-binding sites and the others of R1 to R5 and R6 to R10 are each hydrogen, a group having an alicyclic structure, an organic group having 1 to 10 carbon atoms, a hydroxyl group or a carboxyl group; when “a” is 0, at least one of R1 to R5 and R6 to R10 is a group having an alicyclic structure; “q” is an integer of 1 or more; and “X” is any of —O—, —NHCO—, —COHN—, —COO— and —OCO—.
    • 通过具有由通式(1)表示的结构的化合物的树脂组合物提供热处理后的耐热性和介电常数低的树脂组合物,其清漆和使用该树脂组合物的半导体装置:其中“Ar “是一个芳香族群; “a”为0或1; R11是具有一个或多个碳原子的有机基团,并且至少一个是具有脂环结构的基团; 当“q”为2以上的整数时,R 11可以相同也可以不同, R 1〜R 5中的至少一个和各苯环上的R 6〜R 10中的至少一个为Ar结合位点或R 11结合位点,其中R 1〜R 5,R 6〜R 10为氢,具有脂环结构 具有1-10个碳原子的有机基团,羟基或羧基; 当“a”为0时,R 1至R 5和R 6至R 10中的至少一个为具有脂环结构的基团; “q”为1以上的整数, “X”是-O-,-NHCO-,-COHN-,-COO-和-OCO-中的任何一个。