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    • 64. 发明授权
    • Nonvolatile memory device having source and drain of memory cells
integrally formed with data-source lines
    • 具有与数据源线一体形成的存储单元的源极和漏极的非易失性存储器件
    • US5548146A
    • 1996-08-20
    • US470008
    • 1995-06-06
    • Kenichi KurodaKazuyoshi ShibaAkinori Matsuo
    • Kenichi KurodaKazuyoshi ShibaAkinori Matsuo
    • H01L21/8247G11C16/04H01L27/115H01L29/788H01L29/792
    • G11C16/0491H01L27/115H01L27/11526H01L27/11546H01L29/7883
    • A semiconductor substrate of a first conductivity type has formed on its main surface a floating gate through a first gate insulating film and has further formed over the floating gate a control gate through a second gate insulating film. In one of a paired source and drain and across which there is provided the floating gate insulatedly above the main surface of the substrate, a semiconductor region of second conductivity type having a lower impurity concentration than that of the paired source and drain is formed in a portion of the substrate overlapping the floating gate. A nonvolatile memory device thus constructed has its writing operation carried out by extracting electrons from the floating gate to the other of the paired source and drain having a semiconductor region of the second conductivity type, having a higher impurity concentration, by an F-N tunneling of electrons flowing through the first gate insulating film and its erasing operation carried out by injecting from the paired source and drain or the semiconductor substrate into the floating gate by the F-N tunneling of electrons flowing through the first gate insulating film. Data lines or source lines can be shared between memory cells adjacent to each other in a word line direction so that the memory cells can be substantially small-sized. The writing operation and the erasing operation can be carried out by the tunnel current so that the corresponding, necessary high voltages can be generated by the internal circuits.
    • 第一导电类型的半导体衬底在其主表面上通过第一栅极绝缘膜形成浮栅,并且还通过第二栅极绝缘膜在浮栅上形成控制栅极。 在成对的源极和漏极中的一个中,在衬底的主表面上绝缘地设置浮置栅极,形成具有比成对的源极和漏极的杂质浓度低的第二导电类型的半导体区域 衬底的一部分与浮动栅极重叠。 如此构造的非易失性存储器件的写入操作是通过将电子从浮栅提取到具有具有较高杂质浓度的第二导电类型的半导体区域的成对源极和漏极中的另一个,通过电子的FN隧穿 流过第一栅极绝缘膜及其擦除操作,其通过由穿过第一栅极绝缘膜的电子的FN隧穿而从成对的源极和漏极或半导体衬底注入到浮置栅极中进行。 数据线或源极线可以在字线方向上彼此相邻的存储单元之间共享,使得存储器单元可以基本上小型化。 可以通过隧道电流进行写入操作和擦除操作,使得内部电路可以产生相应的必要的高电压。
    • 65. 发明授权
    • Semiconductor memory device having an arrangement to reduce stresses on
non-selected ferroelectric capacitors while achieving high integration
    • 半导体存储器件具有减少未选择的铁电电容器的应力同时实现高集成度的装置
    • US5524093A
    • 1996-06-04
    • US394248
    • 1995-02-24
    • Kenichi Kuroda
    • Kenichi Kuroda
    • G11C14/00G11C11/22H01L21/8246H01L21/8247H01L27/10H01L27/105H01L27/115H01L29/788H01L29/792G11C7/00
    • H01L27/11502G11C11/22
    • A high integration semiconductor memory device which can reduce stresses placed on non-selected ferroelectric capacitors. A plurality of subblock memory circuits are provided wherein first electrodes forming a plurality of ferroelectric capacitors are respectively provided at first address selection switches, a plurality of other electrodes arranged side by side in the horizontal direction are provided so as to meet at right angles to the first electrodes, and the plurality of ferroelectric capacitors are formed at points where the first electrodes and the other electrodes respectively intersect. Different addresses are respectively assigned to the first address selection lines of the respective subblock memory circuits and common addresses are respectively assigned to the second address selection lines of the plurality of subblock memory circuits, thereby forming a shared address selection circuit. The first address selection line, first switching elements and one second address selection line can be used to develop polarization in the ferroelectric capacitors. Further, the remaining second address selection lines are supplied with such a non-selected potential that a voltage applied to the ferroelectric capacitors reaches substantially half the voltage applied to the selected ferroelectric capacitor. On the other hand, when the first address selection line is brought into a non-selected state and the first switching elements are brought into an OFF state, the plurality of second address selection lines are supplied with such a non-selected potential that the voltage applied to the ferroelectric capacitors reach zero.
    • 一种高集成半导体存储器件,其可以降低施加在非选择的铁电电容器上的应力。 提供了多个子块存储器电路,其中在第一地址选择开关处分别设置形成多个铁电电容器的第一电极,在水平方向上并排布置的多个其它电极被设置为与 第一电极和多个铁电电容器形成在第一电极和其他电极分别相交的点处。 不同的地址被分配给各个子块存储器电路的第一地址选择线,并且公共地址分别被分配给多个子块存储器电路中的第二地址选择线,从而形成共享地址选择电路。 第一地址选择线,第一开关元件和第二地址选择线可以用于在铁电电容器中产生极化。 此外,剩余的第二地址选择线被提供有这样的非选择电位,使得施加到铁电电容器的电压达到施加到所选择的铁电电容器的电压的大致一半。 另一方面,当第一地址选择线处于非选择状态并且第一开关元件处于截止状态时,多个第二地址选择线被提供有非选择电位,使得电压 施加到铁电电容器达到零。