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    • 63. 发明申请
    • Liquid immersion type exposure apparatus
    • 液浸式曝光装置
    • US20050134817A1
    • 2005-06-23
    • US10877142
    • 2004-06-24
    • Takashi Nakamura
    • Takashi Nakamura
    • G03F7/20H01L21/027G03B27/42
    • G03F7/70341
    • Disclosed is a liquid immersion type exposure apparatus which is applicable not only to a liquid immersion exposure apparatus of the type that an exposure substrate as a whole is immersed in a liquid vessel but also to a liquid immersion exposure apparatus of the type that a liquid medium is held in a portion between the exposure substrate and a termination end portion of a projection optical system, and by which production of bubbles can be reduced without interference with exposure. In one preferred from, a degassing system for removing a gas dissolved in the liquid is provided in a liquid medium supplying path and/or a liquid medium collecting path, by which production of bubbles is reduced sufficiently.
    • 本发明公开了一种液浸式曝光装置,不仅适用于曝光基板整体浸没在液体容器中的浸液曝光装置,而且适用于液浸式曝光装置,液浸式曝光装置 被保持在曝光基板和投影光学系统的终止端部分之间的部分,并且可以在不影响曝光的情况下减少气泡的产生。 在一个优选的情况下,在液体介质供给路径和/或液体介质收集路径中设置用于除去溶解在液体中的气体的脱气系统,由此充分减少气泡的产生。
    • 67. 发明授权
    • Winding device
    • 绕线装置
    • US06883746B2
    • 2005-04-26
    • US10250550
    • 2001-01-04
    • Atsumi MurachiHideo MiuraTakashi Nakamura
    • Atsumi MurachiHideo MiuraTakashi Nakamura
    • B65H18/04B65H75/24B65H18/10
    • B65H18/04B65H75/243B65H2301/4148B65H2403/731
    • A winding device, comprising a ring-shaped holder disposed concentrically with a winding shaft, a ring-shaped slider fitted onto the outer peripheral surface of the holder, and a plurality of chips disposed at angular intervals on a tapered inclined surface formed on the outer peripheral surface of the slider, wherein a fluid pressure passes through a first flow path in the winding shaft, the slider is moved in the axial direction of the winding shaft by a first piston, each chip is moved in the radial direction of the winding shaft by the inclination surface of the slider and pressed against the inner peripheral surface of the winding core so as to hold the winding core, a second piston is pressed against the end face of the holder by a second flow path independent of the first flow path, and the torque of the winding shaft is transmitted to the holder, slider, chips, and winding core by the friction between the second piston and the holder so as to rotate the winding core.
    • 一种卷绕装置,包括与卷绕轴同心地设置的环形保持器,安装在保持器的外周面上的环状滑块,和以角度间隔设置在形成于外侧的锥形倾斜面上的多个芯片 滑块的外周面,其中流体压力通过卷绕轴中的第一流路,滑块通过第一活塞沿着卷绕轴的轴向移动,每个芯片沿着卷绕轴的径向方向移动 通过滑动件的倾斜表面并压靠在卷芯的内周表面上以便保持卷芯,第二活塞通过独立于第一流动路径的第二流动路径被压靠在保持器的端面上, 并且通过第二活塞和保持器之间的摩擦将卷绕轴的扭矩传递到保持器,滑块,芯片和卷绕芯,以使卷绕芯旋转。
    • 69. 发明授权
    • Ferroelectric capacitor and ferroelectric memory
    • 铁电电容器和铁电存储器
    • US06838718B2
    • 2005-01-04
    • US10093619
    • 2002-03-11
    • Takashi Nakamura
    • Takashi Nakamura
    • G11C29/50H01L27/115H01L29/72
    • H01L27/11502G11C11/22G11C29/50G11C2029/5002
    • A ferroelectric memory comprising a select transistor and a ferroelectric capacitor is characterized in that the ferroelectric capacitor includes a dummy capacitor and a memory capacitor the first electrodes (storage node electrodes) of which are connected to one of the source and drain of the select transistor and which draw the same hysteresis curve, the second electrodes of the dummy capacitor and the memory capacitor are connected to a first plate line and a second plate line, and the potentials of these plate lines are set so as to polarize the dummy capacitor and the memory capacitor in opposite directions to each other with respect to the first electrode.
    • 包括选择晶体管和铁电电容器的铁电存储器的特征在于,铁电电容器包括虚拟电容器和存储电容器,其中第一电极(存储节点电极)连接到选择晶体管的源极和漏极之一,以及 绘制相同的滞后曲线,虚拟电容器和存储电容器的第二电极连接到第一板线和第二板线,并且设置这些板线的电位以使虚拟电容器和存储器极化 电容器相对于第一电极彼此相反。