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    • 66. 发明授权
    • Optical pressure sensor for measuring blood pressure
    • 用于测量血压的光学压力传感器
    • US4691708A
    • 1987-09-08
    • US838125
    • 1986-03-10
    • James Kane
    • James Kane
    • A61B5/0215A61B5/02
    • A61B5/02154
    • The optical blood pressure catheter includes an elongated optical fiber located within the lumen of the catheter for transmitting light received at its proximal end to its distal end where the light is reflected from a mirror and the reflected light is received at the distal end and transmitted back to the proximal end thereof. A pressure transducer is located at the distal end of the catheter and includes a mirror which is spaced forwardly of the distal end of the optical fiber and is fixed in position relative thereto so as to receive and reflect light emitted from the distal end of the optical fiber and back into the distal end thereof. A side port is provided in the catheter housing adjacent its distal end and the side port is sealed with a pressure-responsive membrane responsive to pressure acting transversely thereof. The pressure-responsive memberane is coupled to the distal end of the optical fiber so that the distal end of the optical fiber is displaced in dependence upon pressure acting upon the membrane. The catheter is vented to atmospheric pressure permitting pressure readings greater or less than that of atmospheric pressure.
    • 光学血压导管包括位于导管内腔内的细长光纤,用于将在其近端处接收的光透射到其远端,其中光从反射镜反射并且反射光在远端被接收并传回 到其近端。 压力传感器位于导管的远端,并且包括一个反射镜,该反射镜在光纤的远端向前隔开并相对于其固定在适当的位置,以便接收和反射从光学远端发射的光 纤维并返回其远端。 侧壁端口邻近其远端设置在导管外壳中,侧端口用响应于其横向作用的压力的压力响应膜密封。 压力响应构件联接到光纤的远端,使得光纤的远端根据作用在膜上的压力而移位。 将导管排放到大气压力,允许压力读数大于或小于大气压力读数。
    • 70. 发明授权
    • Optically monitoring the thickness of a depositing layer
    • 光学监测沉积层的厚度
    • US4141780A
    • 1979-02-27
    • US862189
    • 1977-12-19
    • Hans P. KleinknechtJames Kane
    • Hans P. KleinknechtJames Kane
    • G01B11/06H01L21/306
    • G01B11/0675
    • A method of optically monitoring the thickness of a layer of material being deposited on a substrate within a reaction chamber comprises forming on a body a diffraction grating profile, exposing the grating profile to a beam of light while depositing the material on both the substrate and the grating profile, whereby the grating profile functions as a relief pattern diffracting the light beam into diffracted beams of various orders, measuring the intensity of the first order (I.sub.1) and second order (I.sub.2) beams to obtain a ratio signal (I.sub.2 /I.sub.1), and then transmitting the ratio signal to processing means for determining the aspect groove width of the relief pattern, whereby the thickness of the depositing layer is determined from a pre-established relationship dependent upon the aspect groove width.
    • 光学监测沉积在反应室内的衬底上的材料层的厚度的方法包括在体上形成衍射光栅轮廓,将光栅轮廓暴露于光束,同时将材料沉积在衬底和 光栅轮廓,由此光栅轮廓用作将光束衍射成各种衍射光束的浮雕图案,测量第一阶(I1)和第二阶(I2)光束的强度,以获得比率信号(I2 / I1) ,然后将比率信号传送到用于确定浮雕图案的方面凹槽宽度的处理装置,由此根据方面凹槽宽度从预先建立的关系确定沉积层的厚度。