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61. 发明申请

US20050040662A1 Overhead transfer flange and support for suspending a substrate carrier 失效
标题翻译：架空传输法兰和支撑件用于悬挂基板载体
公开(公告)号：US20050040662A1
公开(公告)日：2005-02-24
申请号：US10764820
申请日：2004-01-26
申请人： Michael Rice , Martin Elliott , Robert Lowrance , Jeffrey Hudgens , Eric Englhardt
发明人： Michael Rice , Martin Elliott , Robert Lowrance , Jeffrey Hudgens , Eric Englhardt
IPC分类号： B65G49/07 , H01L21/677 , H01L21/68 , B66C1/00
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769 , H01L21/67778
摘要： In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种用于支撑衬底载体的第一装置。第一装置包括适于联接到衬底载体主体和架空托架支架的架空输送凸缘。架空输送法兰具有比第一侧宽的第一侧和与第一侧相对的第二侧。提供了许多其他方面。

62. 发明申请

US20070274813A1 SUBSTRATE CARRIER HANDLER THAT UNLOADS SUBSTRATE CARRIERS DIRECTLY FROM A MOVING CONVEYOR 有权
公开(公告)号：US20070274813A1
公开(公告)日：2007-11-29
申请号：US11838155
申请日：2007-08-13
申请人： Michael Rice , Martin Elliott , Robert Lawrance , Jeffrey Hudgens , Eric Englhardt
发明人： Michael Rice , Martin Elliott , Robert Lawrance , Jeffrey Hudgens , Eric Englhardt
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

63. 发明申请

US20080166210A1 SUPINATING CARTESIAN ROBOT BLADE 审中-公开
标题翻译：安排卡特彼勒机器人刀片
公开(公告)号：US20080166210A1
公开(公告)日：2008-07-10
申请号：US11620606
申请日：2007-01-05
申请人： Jeffrey Hudgens , Charles Carlson , Penchala Kankanala , Mike Rice
发明人： Jeffrey Hudgens , Charles Carlson , Penchala Kankanala , Mike Rice
IPC分类号： B65G65/00
CPC分类号： H01L21/67167 , H01L21/67196 , H01L21/67742 , H01L21/68707
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system (e.g., a cluster tool) that has the capability of receiving and performing substrate processing steps in any substrate orientation. The various embodiments of the cluster tool may utilize one or more robots that are adapted to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool.
摘要翻译：一种使用多室处理系统或集群工具处理衬底的方法和设备，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的脚印。本发明总体上提供了一种用于在多室处理系统（例如，集群工具）中处理和传送衬底的装置和方法，该多腔室处理系统具有以任何衬底取向接收和执行衬底处理步骤的能力。群集工具的各种实施例可以利用适于在保留在处理机架中的各种处理室之间传送衬底的一个或多个机器人，使得可以在衬底上执行期望的处理顺序。此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置屈服和衬底废料问题。

64. 发明申请

US20080166208A1 WET CLEAN SYSTEM DESIGN 失效
标题翻译：湿清洁系统设计
公开(公告)号：US20080166208A1
公开(公告)日：2008-07-10
申请号：US11620610
申请日：2007-01-05
申请人： Paul Lester , Scott Meyer , Wyland L. Atkins , Douglas Richards , Constantin Predoaica , Jeffrey Hudgens , Charles Carlson , Penchala Kankanala , Mike Rice , James S. Papanu , Evanson G. Baiya , John J. Rosato
发明人： Paul Lester , Scott Meyer , Wyland L. Atkins , Douglas Richards , Constantin Predoaica , Jeffrey Hudgens , Charles Carlson , Penchala Kankanala , Mike Rice , James S. Papanu , Evanson G. Baiya , John J. Rosato
IPC分类号： H01L21/67
CPC分类号： H01L21/67766 , H01L21/67051 , H01L21/68707 , Y10S134/902
摘要： The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system that has the capability of receiving and performing single substrate processing steps performed in parallel, while using the many favorable aspects of batch processing. Embodiments of the invention described herein are adapted to maximize system throughput, reduce system cost, reduce cost per substrate during processing, increase system reliability, improve the device yield on the processed substrates, and reduce system footprint. In one embodiment, the cluster tool is adapted to perform a wet/clean process sequence in which various substrate cleaning processes are performed on a substrate in the cluster tool.
摘要翻译：本发明通常提供了一种在多室处理系统中处理和传送基板的装置和方法，该多室处理系统具有在使用批处理的许多有利方面的同时并行执行的单个基板处理步骤的能力。本文描述的本发明的实施例适用于最大化系统吞吐量，降低系统成本，在处理期间降低每个基板的成本，增加系统可靠性，提高处理的基板上的装置产量，并减少系统占用面积。在一个实施例中，群集工具适于执行湿/清洁处理序列，其中在群集工具中的基板上执行各种基板清洁处理。

65. 发明授权

US07694688B2 Wet clean system design 失效
标题翻译：湿清洁系统设计
公开(公告)号：US07694688B2
公开(公告)日：2010-04-13
申请号：US11620610
申请日：2007-01-05
申请人： Paul Lester , Scott Meyer , Wyland L. Atkins , Douglas Richards , Constantin Predoaica , Jeffrey Hudgens , Charles Carlson , Penchala Kankanala , Mike Rice , James S. Papanu , Evanson G. Baiya , John J. Rosato
发明人： Paul Lester , Scott Meyer , Wyland L. Atkins , Douglas Richards , Constantin Predoaica , Jeffrey Hudgens , Charles Carlson , Penchala Kankanala , Mike Rice , James S. Papanu , Evanson G. Baiya , John J. Rosato
IPC分类号： B08B3/04
CPC分类号： H01L21/67766 , H01L21/67051 , H01L21/68707 , Y10S134/902
摘要： The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system that has the capability of receiving and performing single substrate processing steps performed in parallel, while using the many favorable aspects of batch processing. Embodiments of the invention described herein are adapted to maximize system throughput, reduce system cost, reduce cost per substrate during processing, increase system reliability, improve the device yield on the processed substrates, and reduce system footprint. In one embodiment, the cluster tool is adapted to perform a wet/clean process sequence in which various substrate cleaning processes are performed on a substrate in the cluster tool.
摘要翻译：本发明通常提供了一种在多室处理系统中处理和传送基板的装置和方法，该多室处理系统具有在使用批处理的许多有利方面的同时并行执行的单个基板处理步骤的能力。本文描述的本发明的实施例适用于最大化系统吞吐量，降低系统成本，在处理期间降低每个基板的成本，增加系统可靠性，提高处理的基板上的装置产量，并减少系统占用面积。在一个实施例中，群集工具适于执行湿/清洁处理序列，其中在群集工具中的基板上执行各种基板清洁处理。

66. 发明申请

US20050232734A1 Small lot size substrate carriers 失效
标题翻译：小批量衬底载体
公开(公告)号：US20050232734A1
公开(公告)日：2005-10-20
申请号：US11051504
申请日：2005-02-04
申请人： Martin Elliott , Michael Rice , Jeffrey Hudgens , Eric Englhardt , Victor Belitsky
发明人： Martin Elliott , Michael Rice , Jeffrey Hudgens , Eric Englhardt , Victor Belitsky
IPC分类号： B65G65/04 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67772 , H01L21/67353 , H01L21/67363 , H01L21/67373 , H01L21/67379 , Y10S414/137
摘要： In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种用于打开衬底载体的衬底载体门的装置。该装置包括适于（1）在负载端口处支撑基板载体门的支撑构件; （2）允许从基板载体移除门; 和（3）将移除的门枢转在衬底载体的底表面下方。提供了许多其他方面。

67. 发明申请

US20070158183A1 METHODS AND APPARATUS FOR PURGING A SUBSTRATE CARRIER 有权
标题翻译：用于采集基板载体的方法和装置
公开(公告)号：US20070158183A1
公开(公告)日：2007-07-12
申请号：US11622300
申请日：2007-01-11
申请人： Vinay Shah , Eric Englhardt , Jeffrey Hudgens , Martin Elliott
发明人： Vinay Shah , Eric Englhardt , Jeffrey Hudgens , Martin Elliott
IPC分类号： C23C14/00
CPC分类号： H01L21/67393 , H01L21/67017 , H01L21/67353 , Y10S414/135 , Y10S414/137 , Y10T137/0318 , Y10T137/0396
摘要： In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种衬底载体，其包括适于可密封的壳体并容纳至少一个衬底。衬底载体包括通向壳体的第一端口，并且适于在衬底载体关闭的同时允许气体流入外壳。提供了许多其他方面。

68. 发明申请

US20050228525A1 Methods and apparatus for electronic device manufacturing system monitoring and control 有权
标题翻译：电子设备制造系统监控的方法与装置
公开(公告)号：US20050228525A1
公开(公告)日：2005-10-13
申请号：US11067303
申请日：2005-02-25
申请人： Todd Brill , Michael Teferra , Jeffrey Hudgens , Amitabh Puri
发明人： Todd Brill , Michael Teferra , Jeffrey Hudgens , Amitabh Puri
IPC分类号： G05B19/418 , G06F19/00
CPC分类号： G05B19/4189 , G05B2219/31274 , Y02P90/28 , Y10S414/135
摘要： In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more positions along a band of a continuously moving conveyor system, each position adapted to receive a carrier support adapted to transport at least one substrate carrier around an electronic device manufacturing facility; (2) monitor status of the one or more positions included in the continuously moving conveyor system; and (3) control operation of the continuously moving conveyor system based on the status of the one or more positions. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种计算机程序产品。计算机程序产品包括可由计算机读取的介质。计算机可读介质具有计算机程序代码，其适于（1）创建指示沿着连续移动的输送机系统的波段的一个或多个位置的预期状态的波段图，每个位置适于接收适于至少运输的载波支持电子设备制造设备周围的一个基板载体; （2）监视连续移动的输送机系统中包括的一个或多个位置的状态; 和（3）基于一个或多个位置的状态来控制连续移动的输送机系统的操作。提供了许多其他方面。

69. 发明申请

US20070288115A1 METHODS AND APPARATUS FOR ELECTRONIC DEVICE MANUFACTURING SYSTEM MONITORING AND CONTROL 审中-公开
标题翻译：电子设备制造系统监控与控制方法与装置
公开(公告)号：US20070288115A1
公开(公告)日：2007-12-13
申请号：US11838584
申请日：2007-08-14
申请人： Todd Brill , Michael Teferra , Jeffrey Hudgens , Amitabh Puri
发明人： Todd Brill , Michael Teferra , Jeffrey Hudgens , Amitabh Puri
IPC分类号： B65G43/00 , G01R31/26 , G06F19/00
CPC分类号： G05B19/4189 , G05B2219/31274 , Y02P90/28 , Y10S414/135
摘要： In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more positions along a band of a continuously moving conveyor system, each position adapted to receive a carrier support adapted to transport at least one substrate carrier around an electronic device manufacturing facility; (2) monitor status of the one or more positions included in the continuously moving conveyor system; and (3) control operation of the continuously moving conveyor system based on the status of the one or more positions. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种计算机程序产品。计算机程序产品包括可由计算机读取的介质。计算机可读介质具有计算机程序代码，其适于（1）创建指示沿着连续移动的输送机系统的波段的一个或多个位置的预期状态的波段图，每个位置适于接收适于至少运输的载波支持电子设备制造设备周围的一个基板载体; （2）监视连续移动的输送机系统中包括的一个或多个位置的状态; 和（3）基于一个或多个位置的状态来控制连续移动的输送机系统的操作。提供了许多其他方面。

70. 发明申请

US20060245905A1 Multi-axis vacuum motor assembly 有权
标题翻译：多轴真空马达总成
公开(公告)号：US20060245905A1
公开(公告)日：2006-11-02
申请号：US11352004
申请日：2006-02-11
申请人： Jeffrey Hudgens
发明人： Jeffrey Hudgens
IPC分类号： B66C23/00
CPC分类号： B25J9/126 , B25J19/0079 , H01L21/68707 , H02K5/128 , H02K7/09 , H02K7/14 , H02K16/00
摘要： In at least one aspect, a second multi-axis vacuum motor assembly is provided. The second multi-axis vacuum motor assembly includes (1) a first rotor; (2) a first stator adapted to commutate so as to rotate the first rotor across a vacuum barrier and control rotation of a first axis of a robot arm within a vacuum chamber; (3) a second rotor below the first rotor; (4) a second stator below the first stator and adapted to commutate so as to rotate the second rotor across the vacuum barrier and control rotation of a second axis of the robot arm within the vacuum chamber; (5) a first feedback device adapted to monitor rotation of the first axis of the robot arm; and (6) a second feedback device adapted to monitor rotation of the second axis of the robot arm. Numerous other aspects are provided.
摘要翻译：在至少一个方面，提供第二多轴真空马达组件。第二多轴真空马达组件包括：（1）第一转子; （2）第一定子，其适于整流以使所述第一转子跨越真空阻挡件并且控制机器人臂的第一轴线在真空室内的旋转; （3）第一转子下方的第二转子; （4）在所述第一定子下方的第二定子，其适于换向以使所述第二转子跨越所述真空阻挡件并且控制所述机械臂在所述真空室内的第二轴线的旋转; （5）适于监测机器人手臂的第一轴线的旋转的第一反馈装置; 和（6）适于监测机器人手臂的第二轴的旋转的第二反馈装置。提供了许多其他方面。

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