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    • 64. 发明授权
    • Photosensor device including means for designating a plurality of pixel
blocks of any desired size
    • 光传感器装置包括用于指定任何所需尺寸的多个像素块的装置
    • US5241167A
    • 1993-08-31
    • US789045
    • 1991-11-07
    • Kenji SuzukiMamoru MiyawakiAkira AkashiToshiki Nakayama
    • Kenji SuzukiMamoru MiyawakiAkira AkashiToshiki Nakayama
    • G02B7/34H01L27/148H04N5/232
    • H04N5/23212G02B7/346H01L27/148
    • A photoelectric sensor device has a two-dimensional arrangement of a multiplicity of unit structures each including a pixel. The sensor device includes a circuit for simultaneously designating a plurality of pixel blocks of any desired sizes at any desired positions on the two dimensional arrangement of unit structures, each pixel block being composed of pixels which are to be actually used. The sensor device also includes a monitor output circuit for outputting, for each of the pixel blocks, at least one monitor output as the representative of the amounts of charges accumulated in the pixels in each of the pixel blocks. The sensor device further includes a circuit which executes the control of accumulation of charges and the control of outputting of the image signals on each of the pixel blocks independently of other pixel blocks. Disclosed also is a focus detection system using the sensor device.
    • 光电传感器装置具有各自包括像素的多个单位结构的二维排列。 传感器装置包括一个电路,用于在单元结构的二维排列上的任何期望位置同时指定任何所需尺寸的多个像素块,每个像素块由实际使用的像素构成。 传感器装置还包括监视器输出电路,用于为每个像素块输出至少一个监视器输出,作为在每个像素块中的像素中积累的电荷量的代表。 传感器装置还包括执行电荷累积控制的电路和独立于其它像素块的每个像素块上输出图像信号的控制。 还公开了使用该传感器装置的焦点检测系统。
    • 65. 发明授权
    • Solid-state heterojunction electron beam generator
    • 固态异质结电子束发生器
    • US5031015A
    • 1991-07-09
    • US563852
    • 1990-08-07
    • Mamoru Miyawaki
    • Mamoru Miyawaki
    • H01J1/308
    • H01J1/308
    • A solid-state electron beam generator has a hetero bipolar structure comprising an emitter region having a first band gap, a base region having a second band gap narrower than the first band gap, and a collector region having an electron-emitting surface. Electrons are injected from the emitter region into the base region while a backward bias voltage being applied between the base region and the collector region. In consequence, electrons are emitted from the electron-emitting surface of the collector region. The emitter region is constituted by an N-type Al.sub.x Ga.sub.1-x) As layer (0
    • 固体电子束发生器具有包含具有第一带隙的发射极区域,具有比第一带隙窄的第二带隙的基极区域和具有电子发射表面的集电极区域的异质双极结构。 电子从发射极区域注入基极区域,而反向偏置电压被施加在基极区域和集电极区域之间。 因此,电子从集电极区域的电子发射表面发射。 发射极区域由具有第一带隙并形成在n型或n +型GaAs衬底或半绝缘GaAs衬底上的N型Al x Ga 1-x)As层(0
    • 70. 发明授权
    • Position detecting device usable with an object having a surface
    • 位置检测装置可与具有表面的物体一起使用
    • US4823014A
    • 1989-04-18
    • US65569
    • 1987-06-23
    • Mamoru Miyawaki
    • Mamoru Miyawaki
    • H01L21/30G01B11/00G02B7/28G02B7/32G03F7/20G03F7/207G03F9/00H01L21/027
    • G03F9/7023
    • A position detecting device, usable in a projection exposure apparatus for optically projecting a pattern of a reticle upon a wafer by use of a projection lens system, for detecting the position of the wafer with respect to an imaging plane of the projection lens system is disclosed. The position detecting device includes a light source from which light is projected upon the surface of the wafer. The light reflected by the wafer surface is converted by a photoelectric converting element into an electric signal, on the basis of which the position of the wafer is detected. Upon the projection of the position detecting light, the light is controlled by an optical integrated-circuit such as an optical waveguide type element. This allows, with a simple and compact structure, the irradiation of the wafer surface with lights of different wavelengths from plural light sources and/or the irradiation of different locations on the wafer surface with the light.
    • 公开了一种位置检测装置,其可用于投影曝光装置,用于通过使用投影透镜系统将晶片的图案光学投射到晶片上,用于检测晶片相对于投影透镜系统的成像平面的位置。 。 位置检测装置包括光从该晶片的表面突出的光源。 由晶片表面反射的光被光电转换元件转换成电信号,基于该信号检测晶片的位置。 在位置检测光的投射时,光被诸如光波导型元件之类的光学集成电路控制。 这允许以简单且紧凑的结构,利用光从晶片表面照射来自多个光源的不同波长的光和/或在晶片表面上的不同位置的照射。